Localized annealing of polysilicon microstructures by inductively heated ferromagnetic films

The monolithic integration of dissimilar microsystems is often limited by conflicts in thermal budget. One of the most prevalent examples is the fabrication of active micro-electromechanical systems (MEMS), as structural films utilized for surface micromachining such as polysilicon typically require processing at temperatures unsuitable for microelectronic circuitry. A localized annealing process could provide for the post-deposition heat treatment of integrated structures without compromising active devices. This dissertation presents a new microfabrication technology based on the inductive heating of ferromagnetic films patterned to define regions for heat treatment. Support is provided through theory, finite-element modeling, and experimentation, concluding with the demonstration of inductive annealing on polysilicon inertial sensing structures. Though still in its infancy, the results confirm the technology to be a viable option for integrated MEMS as well as any microsystem fabrication process requiring a thermal gradient.

Spray characterization under flash boiling conditions of a DI multi-hole injector at high injection pressures in a combustion vessel

Spray characterization under flash boiling conditions was investigated utilizing a symmetric multi-hole injector applicable to the gasoline direct injection (GDI) engine. Tests were performed in a constant volume combustion vessel using a high-speed schlieren and Mie scattering imaging systems. Four fuels including n-heptane, 100% ethanol, pure ethanol blended with 15% iso-octane by volume, and test grade E85 were considered in the study. Experimental conditions included various ambient pressure, fuel temperature, and fuel injection pressure. Visualization of the vaporizing spray development was acquired by utilizing schlieren and laser-based Mie scattering techniques. Time evolved spray tip penetration, spray angle, and the ratio of the vapor to liquid region were analyzed by utilizing digital image processing techniques in MATLAB. This research outlines spray characteristics at flash boiling and non-flash boiling conditions. At flash boiling conditions it was observed that individual plumes merge together, leading to significant contraction in spray angle as compared to non-flash boiling conditions. The results indicate that at flash boiling conditions, spray formation and expansion of vapor region is dependent on momentum exchange offered by the ambient gas. A relation between momentum exchange and liquid spray angle formed was also observed.

WRITING A COMMUNITY GUIDEBOOK FOR EVALUATING LOW-GRADE GEOTHERMAL ENERGY FROM FLOODED UNDERGROUND MINES FOR HEATING AND COOLING BUILDINGS

When underground mines close they often fill with water from ground and surface sources; each mine can contain millions to billions of gallons of water. This water, heated by the Earth’s geothermal energy, reaches temperatures ideal for heat pumps. The sheer scale of these flooded underground mines presents a unique opportunity for large scale geothermal heat pump setups which would not be as economically, socially, and environmentally feasible anywhere else. A literature search revealed approximately 30 instances of flooded underground mines being used to heat and cool buildings worldwide. With thousands of closed/abandoned underground mines in the U.S. and a million estimated globally, why hasn’t this opportunity been more widely adopted? This project has found perception and lack of knowledge about the feasibility to be key barriers. To address these issues, this project drafted a guidebook for former mining communities titled A Community Guide to Mine Water Geothermal Heating and Cooling.