Electrical resistivity change in amorphous Ta42Si13N45 films by stress relaxation

In a first experiment, a reactively sputtered amorphous Ta₄₂Si₁₃N₄₅ film about 260 nm thick deposited on a flat and smooth alumina substrate was thermally annealed in air for 30 min and let cooled again repeatedly at successively higher temperatures from 200 to 500 °C. This treatment successively and irreversibly increases the room temperature resistivity of the film monotonically from its initial value of 670 μΩ cm to a maximum of 705 μΩ cm (+5.2 %). Subsequent heat treatments at temperatures below 500 °C and up to 6 h have no further effect on the room temperature resistivity. The new value remains unchanged after 3.8 years of storage at room temperature. In a second experiment, the evolution of the initially compressive stress of a film similarly deposited by reactive sputtering on a 2-inch silicon wafer was measured by tracking the wafer curvature during similar thermal annealing cycles. A similar pattern of irreversible and reversible changes of stress was observed as for the film resistivity. Transmission electron micrographs and secondary ion mass profiles of the film taken before and after thermal annealing in air establish that both the structure and the composition of the film scarcely change during the annealing cycles. We reason that the film stress is implicated in the resistivity change. In particular, to interpret the observations, a model is proposed where the interface between the film and the substrate is mechanically unyielding.

On supercurrent superfields and Fayet–Iliopoulos terms in N=1N=1 gauge theories

We revisit the supermultiplet structure of Noether currents for N=1 supersymmetric gauge theories. Using superfield identities and the field equations we show how to derive a superfield equation for the divergences of the Noether currents in terms of the supercurrent and anomaly superfields containing 16_B+16_F components. We refer to this as the natural supercurrent structure as it is invariant under all local symmetries of the theory. It corresponds to the S-multiplet of Komargodski and Seiberg. We clarify the on/off-shell nature of the currents appearing in this multiplet and we study in detail the effect of specific improvement transformations leading to 1) a Ferrara-Zumino multiplet and to 2) a multiplet containing the new improved energy-momentum tensor of Callan, Coleman and Jackiw. Our methods also apply to supersymmetric gauge theories with a Fayet-Iliopoulos term. We construct the natural supercurrent multiplet for such a theory and show how to improve this to a formally gauge-invariant Ferrara-Zumino multiplet by introducing a non-dynamical chiral superfield S to ensure superfield gauge invariance. Finally we study the coupling of this theory to supergravity and show that S remains non-dynamical if the theory is R-symmetric and that S becomes propagating if the theory is not R-symmetric, leading to non-minimal 16_B+16_F supergravity