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The molecular and ionic composition of vapor over erbium tribromide sublimed from the Knudsen effusion cell and the open surface of a single crystal was studied by high-temperature mass spectrometry. The partial pressures of ErBr3 and Er2Br6 molecules in saturated vapor and the ratio between their sublimation coefficients under free vaporization conditions were determined. The enthalpies and activation energies of sublimation of ErBr3 crystals in the form of monomers and dimers were calculated. The emission of and Er2 was recorded in studies of ionic sublimation in both modes. The enthalpies of formation of gas molecules and ions were determined.