Finite-element discretization of 3D energy-transport equations for semiconductors

In this thesis a mathematical model was derived that describes the charge and energy transport in semiconductor devices like transistors. Moreover, numerical simulations of these physical processes are performed. In order to accomplish this, methods of theoretical physics, functional analysis, numerical mathematics and computer programming are applied. After an introduction to the status quo of semiconductor device simulation methods and a brief review of historical facts up to now, the attention is shifted to the construction of a model, which serves as the basis of the subsequent derivations in the thesis. Thereby the starting point is an important equation of the theory of dilute gases. From this equation the model equations are derived and specified by means of a series expansion method. This is done in a multi-stage derivation process, which is mainly taken from a scientific paper and which does not constitute the focus of this thesis. In the following phase we specify the mathematical setting and make precise the model assumptions. Thereby we make use of methods of functional analysis. Since the equations we deal with are coupled, we are concerned with a nonstandard problem. In contrary, the theory of scalar elliptic equations is established meanwhile. Subsequently, we are preoccupied with the numerical discretization of the equations. A special finite-element method is used for the discretization. This special approach has to be done in order to make the numerical results appropriate for practical application. By a series of transformations from the discrete model we derive a system of algebraic equations that are eligible for numerical evaluation. Using self-made computer programs we solve the equations to get approximate solutions. These programs are based on new and specialized iteration procedures that are developed and thoroughly tested within the frame of this research work. Due to their importance and their novel status, they are explained and demonstrated in detail. We compare these new iterations with a standard method that is complemented by a feature to fit in the current context. A further innovation is the computation of solutions in three-dimensional domains, which are still rare. Special attention is paid to applicability of the 3D simulation tools. The programs are designed to have justifiable working complexity. The simulation results of some models of contemporary semiconductor devices are shown and detailed comments on the results are given. Eventually, we make a prospect on future development and enhancements of the models and of the algorithms that we used.

Foliation boudinage

In this thesis foliation boudinage and related structures have been studied based on field observations and numerical modeling. Foliation boudinage occurs in foliated rocks independent of lithology contrast. The developing structures are called ‘Foliation boudinage structures (FBSs)’ and show evidence for both ductile and brittle deformation. They are recognized in rocks by perturbations in monotonous foliation adjacent to a central discontinuity, mostly filled with vein material. Foliation boudinage structures have been studied in the Çine Massif in SW-Turkey and the Furka Pass-Urseren Zone in central Switzerland. Four common types have been distinguished in the field, named after vein geometries in their boudin necks in sections normal to the boudin axis: lozenge-, crescent-, X- and double crescent- type FBSs. Lozengetype FBSs are symmetric and characterized by lozenge-shaped veins in their boudin neck with two cusps facing opposite sides. A symmetrical pair of flanking folds occurs on the two sides of the vein. Crescent-type FBSs are asymmetric with a single smoothly curved vein in the boudin neck, with vein contacts facing to one side. X- and double crescent- type FBSs are asymmetric. The geometry of the neck veins resembles that of cuspate-lobate structures. The geometry of flanking structures is related to the shape of the veins. The veins are mostly filled with massive quartz in large single crystals, commonly associated with tourmaline, feldspar and biotite and in some cases with chlorite. The dominance of large facetted single quartz crystals and spherulitic chlorite in the veins suggest that the minerals grew into open fluidfilled space. FLAC experiments show that fracture propagation during ductile deformation strongly influences the geometry of developing veins. The cusps of the veins are better developed in the case of propagating fractures. The shape of the boudin neck veins in foliation boudinage depends on the initial orientation and shape of the fracture, the propagation behaviour of the fracture, the geometry of bulk flow, and the stage at which mineral filling takes place. A two dimensional discrete element model was used to study the progressive development of foliation boudinage structures and the behavior of visco-elastic material deformed under pure shear conditions. Discrete elements are defined by particles that are connected by visco-elastic springs. Springs can break. A number of simulations was Abstract vii performed to investigate the effect of material properties (Young’s modulus, viscosity and breaking strength) and anisotropy on the developing structures. The models show the development of boudinage in single layers, multilayers and in anisotropic materials with random mica distribution. During progressive deformation different types of fractures develop from mode I, mode II to the combination of both. Voids develop along extension fractures, at intersections of conjugate shear fractures and in small pull-apart structures along shear fractures. These patterns look similar to the natural examples. Fractures are more localized in the models where the elastic constants are low and the competence contrast is high between the layers. They propagate through layers where the constants are high and the competence contrast is relatively low. Flow localize around these fractures and voids. The patterns similar to symmetric boudinage structures and extensional neck veins (e.g. lozenge type) more commonly develop in the models with lower elastic constants and anisotropy. The patterns similar to asymmetric foliation boudinage structures (e.g. X-type) develop associated with shear fractures in the models where elastic constants and anisotropy of the materials are relatively high. In these models boudin neck veins form commonly at pull-aparts along the shear fractures and at the intersection of fractures.