Design and fabrication of MOMS-based ultrasonic probes for minimally invasive endoscopic applications

A Micro-opto-mechanical systems (MOMS) based technology for the fabrication of ultrasonic probes on optical fiber is presented. Thanks to the high miniaturization level reached, the realization of an ultrasonic system constituted by ultrasonic generating and detecting elements, suitable for minimally invasive applications or Non Destructive Evaluation (NDE) of materials at high resolution, is demonstrated. The ultrasonic generation is realized by irradiating a highly absorbing carbon film patterned on silicon micromachined structures with a nanosecond pulsed laser source, generating a mechanical shock wave due to the thermal expansion of the film induced by optical energy conversion into heat. The short duration of the pulsed laser, together with an appropriate emitter design, assure high frequency and wide band ultrasonic generation. The acoustic detection is also realized on a MOMS device using an interferometric receiver, fabricated with a Fabry-Perot optical cavity realized by means of a patterned SU-8 and two Al metallization levels. In order to detect the ultrasonic waves, the cavity is interrogated by a laser beam measuring the reflected power with a photodiode. Various issues related to the design and fabrication of these acoustic probes are investigated in this thesis. First, theoretical models are developed to characterize the opto-acoustic behavior of the devices and estimate their expected acoustic performances. Tests structures are realized to derive the relevant physical parameters of the materials constituting the MOMS devices and determine the conditions theoretically assuring the best acoustic emission and detection performances. Moreover, by exploiting the models and the theoretical results, prototypes of acoustic probes are designed and their fabrication process developed by means of an extended experimental activity.

Laser guide stars wavefront sensors for the EELT

The Adaptive Optics is the measurement and correction in real time of the wavefront aberration of the star light caused by the atmospheric turbulence, that limits the angular resolution of ground based telescopes and thus their capabilities to deep explore faint and crowded astronomical objects. The lack of natural stars enough bright to be used as reference sources for the Adaptive Optics, over a relevant fraction of the sky, led to the introduction of artificial reference stars. The so-called Laser Guide Stars are produced by exciting the Sodium atoms in a layer laying at 90km of altitude, by a powerful laser beam projected toward the sky. The possibility to turn on a reference star close to the scientific targets of interest has the drawback in an increased difficulty in the wavefront measuring, mainly due to the time instability of the Sodium layer density. These issues are increased with the telescope diameter. In view of the construction of the 42m diameter European Extremely Large Telescope a detailed investigation of the achievable performances of Adaptive Optics becomes mandatory to exploit its unique angular resolution . The goal of this Thesis was to present a complete description of a laboratory Prototype development simulating a Shack-Hartmann wavefront sensor using Laser Guide Stars as references, in the expected conditions for a 42m telescope. From the conceptual design, through the opto-mechanical design, to the Assembly, Integration and Test, all the phases of the Prototype construction are explained. The tests carried out shown the reliability of the images produced by the Prototype that agreed with the numerical simulations. For this reason some possible upgrades regarding the opto-mechanical design are presented, to extend the system functionalities and let the Prototype become a more complete test bench to simulate the performances and drive the future Adaptive Optics modules design.