Fabrication and testing of a poly(vinylidene fluoride) (PVDF) microvalve for gas flow control

A microactuator made from poly(vinylidene fluoride) (PVDF), a piezoelectric polymer, was fabricated to control the gas flow rate through a glass micronozzle. The actuator was formed by gluing together two PVDF sheets with opposite polarization directions. The sheets were covered with thin conducting films on one side, that were then used as electrodes to apply an electric field to move the valve. The actuator has a rectangular shape, 3 mm x 6 mm. The device was incorporated with a micronozzle fabricated by a powder blasting technique. Upon applying a DC voltage across the actuator electrodes, one sheet expands while the other contracts, generating an opening motion. A voltage of +300 V DC was used to open the device by moving the actuator 30 mu m, and a voltage of -200 V DC was used to close the device by moving the actuator 20 mu m lower than the relaxed position. Flow measurements were performed in a low-pressure vacuum system, maintaining the microvalve inlet pressure constant at 266 Pa. Tests carried out with the actuator in the open position and with a pressure ratio (inlet pressure divided by outlet pressure) of 0.5, indicated a flow rate of 0.36 sccm. In the closed position, and with a pressure ratio of 0.2, a flow rate of 0.32 sccm was measured.

Development of microvalves for gas flow control in micronozzles using PVDF piezoelectric polymer

This work describes a fabrication and test sequence of microvalves installed on micronozzles. The technique used to fabricate the micronozzles was powder blasting. The microvalves are actuators made from PVDF (polivinylidene fluoride), that is a piezoelectric polymer. The micronozzles have convergent-divergent shape with external diameter of 1mm and throat around 230μm. The polymer have low piezoelectric coefficient, for this reason a bimorph structure with dimensions of 2mm width and 4mm of length was build (two piezoelectric sheets were glued together with opposite polarization). Both sheets are recovered with a conductor thin film used as electrodes. Applying a voltage between the electrodes one sheet expands while the other contracts and this generate a vertical movement to the entire actuator. Appling +300V DC between the electrodes the volume flux rate, for a pressure ratio of 0.5, was 0.36 sccm. Applying -200V DC between the electrodes (that means it closed) the volume flux rate was 0.32 sccm, defining a possible range of flow between 0.32 and 0.36 sccm. The third measurement was performed using AC voltage (200V AC with frequency of 1Hz), where the actuator was oscillating. For pressure ratio of 0.5, the flow rate was 0.62 sccm. © 2008 IOP Publishing Ltd.