Analysis of linearity and frequency response of a novel piezoelectric flextensional actuator using a homodyne interferometer and the J(1)-J(4) method

Piezoelectric transducers are widely used in high-resolution positioning systems. This paper reports the experimental analysis of a novel piezoelectric flextensional actuator (PFA), which is designed by using the topology-optimization method through a low-cost homodyne Michelson interferometer. By applying the J(1) - J(4) method for signal demodulation, which provides a linear and direct measurement of dynamic optical phase shift independent of fading, the nanometric displacements of the PFA were determined. Linearity and frequency response of the PFA were evaluated up to 50 kHz. PFA calibration factor and amplification rate were determined for the PFA operating in the quasi-static regime. To confirm the observed frequencies of resonance, an impedance analyzer is also utilized to measure the magnitude and phase of the PFA admittance.

A high dynamic range method for the direct readout of a dynamic phase change in homodyne interferometers

Fundação de Amparo à Pesquisa do Estado de São Paulo (FAPESP)

Análise teórica de uma nova técnica de processamento de sinais interferométricos baseada na modulação triangular da fase óptica

Conselho Nacional de Desenvolvimento Científico e Tecnológico (CNPq)

Interferometric measurements of nanometric displacements in a Piezoelectric Flextensional Actuator by using the new J1...J5 method

In this work, nanometric displacement amplitudes of a Piezoelectric Flextensional Actuator (PFA) designed using the topology optimization technique and operating in its linear range are measured by using a homodyne Michelson interferometer. A new improved version of the J1...J4 method for optical phase measurements, named J1...J5 method, is presented, which is of easier implementation than the original one. This is a passive phase detection scheme, unaffected by signal fading, source instabilities and changes in visibility. Experimental results using this improvement were compared with those obtained by using the J1... J4, J1...J6(pos) and J1...J 6(neg) methods, concluding that the dynamic range is increased while maintaining the sensitivity. Analysis based on the 1/f voltage noise and random fading show the new method is more stable to phase drift than all those methods. © 2012 IEEE.

Investigação da temperatura eletrônica da fase plasma e estudo da morfologia, estrutura molecular e crescimento do polímero proveniente de um plasma de benzeno excitado por tensão contínua

Pós-graduação em Física - FEG

Dynamic analysis of a new piezoelectric flextensional actuator using the J1-J4 optical interferometric method

Piezoelectric actuators are widely used in positioning systems which demand high resolution such as scanning microscopy, fast mirror scanners, vibration cancellation, cell manipulation, etc. In this work a piezoelectric flextensional actuator (PFA), designed with the topology optimization method, is experimentally characterized by the measurement of its nanometric displacements using a Michelson interferometer. Because this detection process is non-linear, adequate techniques must be applied to obtain a linear relationship between an output electrical signal and the induced optical phase shift. Ideally, the bias phase shift in the interferometer should remain constant, but in practice it suffers from fading. The J1-J4 spectral analysis method provides a linear and direct measurement of dynamic phase shift in a no-feedback and no-phase bias optical homodyne interferometer. PFA application such as micromanipulation in biotechnology demands fast and precise movements. So, in order to operate with arbitrary control signals the PFA must have frequency bandwidth of several kHz. However as the natural frequencies of the PFA are low, unwanted dynamics of the structure are often a problem, especially for scanning motion, but also if trajectories have to be followed with high velocities, because of the tracking error phenomenon. So the PFA must be designed in such a manner that the first mechanical resonance occurs far beyond this band. Thus it is important to know all the PFA resonance frequencies. In this work the linearity and frequency response of the PFA are evaluated up to 50 kHz using optical interferometry and the J1-J4 method.

Nano-displacement measurements of a new piezoelectric flextensional actuator by using a high dynamic range interferometry homodyne method

Conselho Nacional de Desenvolvimento Científico e Tecnológico (CNPq)

Linear readout of dynamic phase modulation index in an optical voltage sensor using the new J(1) ... J(3) spectral method

The J(1)...J(3) is a recent optical method for linear readout of dynamic phase modulation index in homodyne interferometers. In this work, the J(1)... J(3) method is applied to measure voltage in an optical voltage sensor. Based on the classical J(1)...J(4) method, the J(1)... J(3) technique shows to be more stable to phase drift and simpler for implementation than the original one. The sensor dynamic range is enhanced. The agreement between theoretical and experimental results, based on 1/f noise, is demonstrated.

Simple and versatile heterodyne whole-field interferometer for phase optics characterization

Conselho Nacional de Desenvolvimento Científico e Tecnológico (CNPq)

Coupling rate measurement of a novel multi-actuated piezoelectric device using optical interferometry

The class of piezoelectric actuators considered in this paper consists of a multi-flexible structure actuated by two or more piezoceramic devices that must generate different output displacements and forces at different specified points of the domain and in different directions. The devices were modeled by finite element using the software ANSYS and the topology optimization method. The following XY actuators were build to achieve maximum displacement in the X and Y directions with a minimum crosstalk between them. The actuator prototypes are composed of an aluminum structure, manufactured by using a wire Electrical Discharge Machining, which are bonded to rectangular PZT5A piezoceramic blocks by using epoxy resin. Multi-actuator piezoelectric device displacements can be measured by using optical interferometry, since it allows dynamic measurements in the kHz range, which is of the order of the first resonance frequency of these piezomechanisms. A Michelson-type interferometer, with a He-Ne laser source, is used to measure the displacement amplitudes in nanometric range. A new optical phase demodulation technique is applied, based on the properties of the triangular waveform drive voltage applied to the XY piezoelectric nanopositioner. This is a low-phase-modulation-depth-like technique that allows the rapid interferometer auto-calibration. The measurements were performed at 100 Hz frequency, and revealed that the device is linear voltage range utilized in this work. The ratio between the generated and coupled output displacements and the drive voltages is equal to 10.97 nm/V and 1.76 nm/V, respectively, which corresponds to a 16% coupling rate. © 2010 IEEE.

Análise teórica e experimental de um método interferométrico de detecção de fase óptica, auto-consistente e com elevada faixa dinâmica, aplicado à caracterização de atuadores piezoelétricos flextensionais

Conselho Nacional de Desenvolvimento Científico e Tecnológico (CNPq)

Novas técnicas de detecção de fase óptica em interferômetros homódinos aplicadas à caracterização de atuadores piezoelétricos flextensionais

Coordenação de Aperfeiçoamento de Pessoal de Nível Superior (CAPES)

Novas configurações de interferômetros de quadratura e de técnicas de detecção de fase óptica baseadas em phase unwrapping

Pós-graduação em Engenharia Elétrica - FEIS

Wide dynamic range homodyne interferometry method and its application for piezoactuator displacement measurements

Fundação de Amparo à Pesquisa do Estado de São Paulo (FAPESP)

Nanodisplacement measurements of piezoelectric flextensional actuators using a new interferometry homodyne method

Conselho Nacional de Desenvolvimento Científico e Tecnológico (CNPq)