Diagnóstico de plasma de cátodo oco: análise da ação de plasma de argônio e Ar-H2 para a deposição de filmes finos de titânio em pós-descarga

Plasma DC hollow cathode has been used for film deposition by sputtering with release of neutral atoms from the cathode. The DC Plasma Ar-H2 hollow cathode currently used in the industry has proven to be effective in cleaning surfaces and thin film deposition when compared to argon plasma. When we wish to avoid the effects of ion bombardment on the substrate discharge, it uses the post-discharge region. Were generated by discharge plasma of argon and hydrogen hollow cathode deposition of thin films of titanium on glass substrate. The optical emission spectroscopy was used for the post-discharge diagnosis. The films formed were analyzed by mechanical profilometry technique. It was observed that in the spectrum of the excitation lines of argon occurred species. There are variations in the rate of deposition of titanium on the glass substrate for different process parameters such as deposition time, distance and discharge working gases. It was noted an increase in intensity of the lines of argon compared with the lines of titanium. Deposition with argon and hydrogen in glass sample observed a higher rate deposition of titanium as more closer the sample was in the discharge

Evolução de estruturas primordiais

Understanding the way in which large-scale structures, like galaxies, form remains one of the most challenging problems in cosmology today. The standard theory for the origin of these structures is that they grew by gravitational instability from small, perhaps quantum generated, °uctuations in the density of dark matter, baryons and photons over an uniform primordial Universe. After the recombination, the baryons began to fall into the pre-existing gravitational potential wells of the dark matter. In this dissertation a study is initially made of the primordial recombination era, the epoch of the formation of the neutral hydrogen atoms. Besides, we analyzed the evolution of the density contrast (of baryonic and dark matter), in clouds of dark matter with masses among 104M¯ ¡ 1010M¯. In particular, we take into account the several physical mechanisms that act in the baryonic component, during and after the recombination era. The analysis of the formation of these primordial objects was made in the context of three models of dark energy as background: Quintessence, ¤CDM(Cosmological Constant plus Cold Dark Matter) and Phantom. We show that the dark matter is the fundamental agent for the formation of the structures observed today. The dark energy has great importance at that epoch of its formation