Influência dos parâmetros de processo na deposição de nitreto de titânio por plasma em gaiola catódica

Titanium nitride films were grown on glass using the Cathodic Cage Plasma Deposition technique in order to verify the influence of process parameters in optical and structural properties of the films. The plasma atmosphere used was a mixture of Ar, N2 and H2, setting the Ar and N2 gas flows at 4 and 3 sccm, respectively and H2 gas flow varied from 0, 1 to 2 sccm. The deposition process was monitored by Optical Emission Spectroscopy (OES) to investigate the influence of the active species in plasma. It was observed that increasing the H2 gas flow into the plasma the luminescent intensities associated to the species changed. In this case, the luminescence of N2 (391,4nm) species was not proportional to the increasing of the H2 gas into the reactor. Other parameters investigated were diameter and number of holes in the cage. The analysis by Grazing Incidence X-Ray Diffraction (GIXRD) confirmed that the obtained films are composed by TiN and they may have variations in the nitrogen amount into the crystal and in the crystallite size. The optical microscopy images provided information about the homogeneity of the films. The atomic force microscopy (AFM) results revealed some microstructural characteristics and surface roughness. The thickness was measured by ellipsometry. The optical properties such as transmittance and reflectance (they were measured by spectrophotometry) are very sensitive to changes in the crystal lattice of the material, chemical composition and film thicknesses. Therefore, such properties are appropriate tools for verification of this process control. In general, films obtained at 0 sccm of H2 gas flow present a higher transmittance. It can be attributed to the smaller crystalline size due to a higher amount of nitrogen in the TiN lattice. The films obtained at 1 and 2 sccm of H2 gas flow have a golden appearance and XRD pattern showed peaks characteristics of TiN with higher intensity and smaller FWHM (Full Width at Half Maximum) parameter. It suggests that the hydrogen presence in the plasma makes the films more stoichiometric and becomes it more crystalline. It was observed that with higher number of holes in the lid of the cage, close to the region between the lid and the sample and the smaller diameter of the hole, the deposited film is thicker, which is justified by the most probability of plasma species reach effectively the sample and it promotes the growth of the film

Crescimento urbano e seus impactos no sistema de drenagem de uma bacia em Natal/RN

The uncontrolled growth of most Brazilian cities is not accompanied by the development of urban infrastructure. With increasing soil sealing, runoff and decreased infiltration volume, impacts on water resources and on population of the areas affected by urban growth are inevitable. This study aims to evaluate the use and occupation of a watershed and analyze the drainage system in order to control the impact using tools to integrate urban development with the drainage of rainwater in an important watershed in the Natal City, Rio Grande do Norte State. The study involved the characterization of the basin XII.4 on the land use and occupation, for the years 2005 and 2014. With the application of SWMM model was possible to analyze the impacts caused by the urbanization process in the existing drainage system, showing the two years analyzed have their areas very close to percentage saturation of impervious areas. Although the region is still predominantly single family residential, suffers increasing verticalization of mainly commercial buildings. The drainage system is inefficient for the area's needs by the year 2005. The drainage system was also tested for four variations of land use by developing scenarios. Scenario 1 is related to the year 2014, considered current. Scenario 2 was adopted the maximum rate of 80% for land use, allowed for the Natal City. Scenario 3 gives the critical condition of land use, with the area 100% impervious. Scenario 4 is applied to the existence of LID (Low Impact Device). The scenarios analysis showed that all indicate deficiency at some point of the drainage system as a result of the high degree of occupation of the area that generate higher flows than the initial drainage system capacity. With the study it became clear that the adoption of non-structural tools are effective in reducing flooding and improving the drainage system capacity.

Crescimento urbano e seus impactos no sistema de drenagem de uma bacia em Natal/RN

The uncontrolled growth of most Brazilian cities is not accompanied by the development of urban infrastructure. With increasing soil sealing, runoff and decreased infiltration volume, impacts on water resources and on population of the areas affected by urban growth are inevitable. This study aims to evaluate the use and occupation of a watershed and analyze the drainage system in order to control the impact using tools to integrate urban development with the drainage of rainwater in an important watershed in the Natal City, Rio Grande do Norte State. The study involved the characterization of the basin XII.4 on the land use and occupation, for the years 2005 and 2014. With the application of SWMM model was possible to analyze the impacts caused by the urbanization process in the existing drainage system, showing the two years analyzed have their areas very close to percentage saturation of impervious areas. Although the region is still predominantly single family residential, suffers increasing verticalization of mainly commercial buildings. The drainage system is inefficient for the area's needs by the year 2005. The drainage system was also tested for four variations of land use by developing scenarios. Scenario 1 is related to the year 2014, considered current. Scenario 2 was adopted the maximum rate of 80% for land use, allowed for the Natal City. Scenario 3 gives the critical condition of land use, with the area 100% impervious. Scenario 4 is applied to the existence of LID (Low Impact Device). The scenarios analysis showed that all indicate deficiency at some point of the drainage system as a result of the high degree of occupation of the area that generate higher flows than the initial drainage system capacity. With the study it became clear that the adoption of non-structural tools are effective in reducing flooding and improving the drainage system capacity.

Influência dos parâmetros de processo na deposição de nitreto de titânio por plasma em gaiola catódica

Titanium nitride films were grown on glass using the Cathodic Cage Plasma Deposition technique in order to verify the influence of process parameters in optical and structural properties of the films. The plasma atmosphere used was a mixture of Ar, N2 and H2, setting the Ar and N2 gas flows at 4 and 3 sccm, respectively and H2 gas flow varied from 0, 1 to 2 sccm. The deposition process was monitored by Optical Emission Spectroscopy (OES) to investigate the influence of the active species in plasma. It was observed that increasing the H2 gas flow into the plasma the luminescent intensities associated to the species changed. In this case, the luminescence of N2 (391,4nm) species was not proportional to the increasing of the H2 gas into the reactor. Other parameters investigated were diameter and number of holes in the cage. The analysis by Grazing Incidence X-Ray Diffraction (GIXRD) confirmed that the obtained films are composed by TiN and they may have variations in the nitrogen amount into the crystal and in the crystallite size. The optical microscopy images provided information about the homogeneity of the films. The atomic force microscopy (AFM) results revealed some microstructural characteristics and surface roughness. The thickness was measured by ellipsometry. The optical properties such as transmittance and reflectance (they were measured by spectrophotometry) are very sensitive to changes in the crystal lattice of the material, chemical composition and film thicknesses. Therefore, such properties are appropriate tools for verification of this process control. In general, films obtained at 0 sccm of H2 gas flow present a higher transmittance. It can be attributed to the smaller crystalline size due to a higher amount of nitrogen in the TiN lattice. The films obtained at 1 and 2 sccm of H2 gas flow have a golden appearance and XRD pattern showed peaks characteristics of TiN with higher intensity and smaller FWHM (Full Width at Half Maximum) parameter. It suggests that the hydrogen presence in the plasma makes the films more stoichiometric and becomes it more crystalline. It was observed that with higher number of holes in the lid of the cage, close to the region between the lid and the sample and the smaller diameter of the hole, the deposited film is thicker, which is justified by the most probability of plasma species reach effectively the sample and it promotes the growth of the film