Profile simulations of gas chopping etching processes : model development and comparison with experiments

The progress in microsystem technology or nano technology places extended requirements to the fabrication processes. The trend is moving towards structuring within the nanometer scale on the one hand, and towards fabrication of structures with high aspect ratio (ratio of vertical vs. lateral dimensions) and large depths in the 100 µm scale on the other hand. Current procedures for the microstructuring of silicon are wet chemical etching and dry or plasma etching. A modern plasma etching technique for the structuring of silicon is the so-called "gas chopping" etching technique (also called "time-multiplexed etching"). In this etching technique, passivation cycles, which prevent lateral underetching of sidewalls, and etching cycles, which etch preferably in the vertical direction because of the sidewall passivation, are constantly alternated during the complete etching process. To do this, a CHF3/CH4 plasma, which generates CF monomeres is employed during the passivation cycle, and a SF6/Ar, which generates fluorine radicals and ions plasma is employed during the etching cycle. Depending on the requirements on the etched profile, the durations of the individual passivation and etching cycles are in the range of a few seconds up to several minutes. The profiles achieved with this etching process crucially depend on the flow of reactants, i.e. CF monomeres during the passivation cycle, and ions and fluorine radicals during the etching cycle, to the bottom of the profile, especially for profiles with high aspect ratio. With regard to the predictability of the etching processes, knowledge of the fundamental effects taking place during a gas chopping etching process, and their impact onto the resulting profile is required. For this purpose in the context of this work, a model for the description of the profile evolution of such etching processes is proposed, which considers the reactions (etching or deposition) at the sample surface on a phenomenological basis. Furthermore, the reactant transport inside the etching trench is modelled, based on angular distribution functions and on absorption probabilities at the sidewalls and bottom of the trench. A comparison of the simulated profiles with corresponding experimental profiles reveals that the proposed model reproduces the experimental profiles, if the angular distribution functions and absorption probabilities employed in the model is in agreement with data found in the literature. Therefor the model developed in the context of this work is an adequate description of the effects taking place during a gas chopping plasma etching process.

Research through DESIGN through research - a problem statement and a conceptual sketch

This paper re-addresses the issue of a lacking genuine design research paradigm. It tries to sketch an operational model of such a paradigm, based upon a generic design process model, which is derived from basic notions of evolution and learning in different domains of knowing (and turns out to be not very different from existing ones). It does not abandon the scientific paradigm but concludes that the latter has to be embedded into / subordinated under a design paradigm.

Concept exploration - a tool for creating and exploring conceptual hierarchies

Concept exploration is a knowledge acquisition tool for interactively exploring the hierarchical structure of finitely generated lattices. Applications comprise the support of knowledge engineers by constructing a type lattice for conceptual graphs, and the exploration of large formal contexts in formal concept analysis.

On-line analytical processing with conceptual information systems

A conceptual information system consists of a database together with conceptual hierarchies. The management system TOSCANA visualizes arbitrary combinations of conceptual hierarchies by nested line diagrams and allows an on-line interaction with a database to analyze data conceptually. The paper describes the conception of conceptual information systems and discusses the use of their visualization techniques for on-line analytical processing (OLAP).

Hierarchies of conceptual scales

Formal Concept Analysis allows to derive conceptual hierarchies from data tables. Formal Concept Analysis is applied in various domains, e.g., data analysis, information retrieval, and knowledge discovery in databases. In order to deal with increasing sizes of the data tables (and to allow more complex data structures than just binary attributes), conceputal scales habe been developed. They are considered as metadata which structure the data conceptually. But in large applications, the number of conceptual scales increases as well. Techniques are needed which support the navigation of the user also on this meta-level of conceptual scales. In this paper, we attack this problem by extending the set of scales by hierarchically ordered higher level scales and by introducing a visualization technique called nested scaling. We extend the two-level architecture of Formal Concept Analysis (the data table plus one level of conceptual scales) to many-level architecture with a cascading system of conceptual scales. The approach also allows to use representation techniques of Formal Concept Analysis for the visualization of thesauri and ontologies.

Conceptual knowledge discovery with frequent concept lattices

Knowledge discovery support environments include beside classical data analysis tools also data mining tools. For supporting both kinds of tools, a unified knowledge representation is needed. We show that concept lattices which are used as knowledge representation in Conceptual Information Systems can also be used for structuring the results of mining association rules. Vice versa, we use ideas of association rules for reducing the complexity of the visualization of Conceptual Information Systems.

Numerical aspects in the data model of conceptual information systems

While most data analysis and decision support tools use numerical aspects of the data, Conceptual Information Systems focus on their conceptual structure. This paper discusses how both approaches can be combined.

Acquiring expert knowledge for the design of conceptual information systems

Conceptual Information Systems unfold the conceptual structure of data stored in relational databases. In the design phase of the system, conceptual hierarchies have to be created which describe different aspects of the data. In this paper, we describe two principal ways of designing such conceptual hierarchies, data driven design and theory driven design and discuss advantages and drawbacks. The central part of the paper shows how Attribute Exploration, a knowledge acquisition tool developped by B. Ganter can be applied for narrowing the gap between both approaches.

Dual retrieval in conceptual information systems

Conceptual Information Systems provide a multi-dimensional conceptually structured view on data stored in relational databases. On restricting the expressiveness of the retrieval language, they allow the visualization of sets of realted queries in conceptual hierarchies, hence supporting the search of something one does not have a precise description, but only a vague idea of. Information Retrieval is considered as the process of finding specific objects (documents etc.) out of a large set of objects which fit to some description. In some data analysis and knowledge discovery applications, the dual task is of interest: The analyst needs to determine, for a subset of objects, a description for this subset. In this paper we discuss how Conceptual Information Systems can be extended to support also the second task.