Profile simulations of gas chopping etching processes : model development and comparison with experiments

The progress in microsystem technology or nano technology places extended requirements to the fabrication processes. The trend is moving towards structuring within the nanometer scale on the one hand, and towards fabrication of structures with high aspect ratio (ratio of vertical vs. lateral dimensions) and large depths in the 100 µm scale on the other hand. Current procedures for the microstructuring of silicon are wet chemical etching and dry or plasma etching. A modern plasma etching technique for the structuring of silicon is the so-called "gas chopping" etching technique (also called "time-multiplexed etching"). In this etching technique, passivation cycles, which prevent lateral underetching of sidewalls, and etching cycles, which etch preferably in the vertical direction because of the sidewall passivation, are constantly alternated during the complete etching process. To do this, a CHF3/CH4 plasma, which generates CF monomeres is employed during the passivation cycle, and a SF6/Ar, which generates fluorine radicals and ions plasma is employed during the etching cycle. Depending on the requirements on the etched profile, the durations of the individual passivation and etching cycles are in the range of a few seconds up to several minutes. The profiles achieved with this etching process crucially depend on the flow of reactants, i.e. CF monomeres during the passivation cycle, and ions and fluorine radicals during the etching cycle, to the bottom of the profile, especially for profiles with high aspect ratio. With regard to the predictability of the etching processes, knowledge of the fundamental effects taking place during a gas chopping etching process, and their impact onto the resulting profile is required. For this purpose in the context of this work, a model for the description of the profile evolution of such etching processes is proposed, which considers the reactions (etching or deposition) at the sample surface on a phenomenological basis. Furthermore, the reactant transport inside the etching trench is modelled, based on angular distribution functions and on absorption probabilities at the sidewalls and bottom of the trench. A comparison of the simulated profiles with corresponding experimental profiles reveals that the proposed model reproduces the experimental profiles, if the angular distribution functions and absorption probabilities employed in the model is in agreement with data found in the literature. Therefor the model developed in the context of this work is an adequate description of the effects taking place during a gas chopping plasma etching process.

Die Natur als Erholungs(t)raum

Zur Erholung in die Natur gehen oder doch lieber zur Natursimulation greifen? Intuitiv würden die meisten Menschen der Natur einen größeren Erholungswert zusprechen als einer Natursimulation. Aber ist die Natur tatsächlich erholsamer? In der Naturerholungsforschung (Restorative Environment Research) kommen häufig Natursimulationen zum Einsatz, um die erholsame Wirkung von Natur zu ermitteln. Problematisch ist dabei, dass deren ökologische Validität und Vergleichbarkeit noch nicht empirisch abgesichert ist. Vorliegende Arbeit setzt an dieser methodischen und empirischen Lücke an. Sie überprüft sowohl die ökologische Validität als auch die Vergleichbarkeit von Natursimulationen. Dazu wird die erholsame Wirkung von zwei Natursimulationen im Vergleich zu der physisch-materiellen Natur empirisch untersucht und verglichen. Darüber hinaus werden Aspekte des subjektiven Erlebens und der Bewertung im Naturerholungskontext exploriert. Als bedeutsamer Wirkmechanismus wird die erlebnisbezogene Künstlichkeit/Natürlichkeit angesehen, die sich auf die Erlebnisqualität von Natursimulationen und der physisch-materiellen Natur bezieht: Natursimulationen weisen im Vergleich zur physisch-materiellen Natur eine reduzierte Erlebnisqualität auf (erlebnisbezogene Künstlichkeit), z.B. eine reduzierte Qualität und Quantität der Sinnesansprache. Stellt man einen derartigen Vergleich nicht nur mit der physisch-materiellen Natur, sondern mit unterschiedlichen Natursimulationstypen an, dann zeigen sich auch hier Unterschiede in der erlebnisbezogenen Künstlichkeit. Beispielsweise unterscheidet sich ein Naturfoto von einem Naturfilm durch das Fehlen von auditiven und bewegten Stimuli. Diese erlebnisbezogene Künstlichkeit kann die erholsame Wirkung von Natur - direkt oder indirekt über Bewertungen - hemmen. Als Haupthypothese wird angenommen, dass mit zunehmendem Ausmaß an erlebnisbezogener Künstlichkeit die erholsame Wirkung der Natur abnimmt. Dem kombinierten Feld- und Laborexperiment liegt ein einfaktorielles Vorher-Nachher-Design zugrunde. Den 117 Probanden wurde zunächst eine kognitiv und affektiv belastende Aufgabe vorgelegt, danach folgte die Erholungsphase. Diese bestand aus einem Spaziergang, der entweder in der physisch-materiellen Natur (urbaner Park) oder in einer der beiden audio-visuellen Natursimulationen (videogefilmter vs. computergenerierter Spaziergang durch selbigen urbanen Park) oder auf dem Laufband ohne audio-visuelle Darbietung stattfand. Die erlebnisbezogene Künstlichkeit/Natürlichkeit wurde also wie folgt operationlisiert: die physische Natur steht für die erlebnisbezogene Natürlichkeit. Die beiden Natursimulationen stehen für die erlebnisbezogene Künstlichkeit. Die computergenerierte Version ist im Vergleich zur Videoversion erlebnisbezogen künstlicher, da sie weniger fotorealistisch ist. Die Zuordnung zu einer der vier experimentellen Erholungssettings erfolgte nach dem Zufallsprinzip. Die Effekte von moderater Bewegung wurden in den Natursimulationen durch das Laufen auf dem Laufband kontrolliert. Die Beanspruchungs- bzw. Erholungsreaktionen wurden auf kognitiver (Konzentriertheit, Aufmerksamkeitsleistung) affektiver (3 Befindlichkeitsskalen: Wachheit, Ruhe, gute Stimmung) und physiologischer (Alpha-Amylase) Ebene gemessen, um ein umfassendes Bild der Reaktionen zu erhalten. Insgesamt zeigen die Ergebnisse, dass die beiden Natursimulationen trotz Unterschiede in der erlebnisbezogenen Künstlichkeit/Natürlichkeit zu relativ ähnlichen Erholungsreaktionen führen, wie die physisch-materielle Natur. Eine Ausnahme stellen eine der drei affektiven (Wachheit) und die physiologische Reaktion dar: Probanden der physisch-materiellen Naturbedingung geben an wacher zu sein und weisen - wider erwarten - eine höhere physiologische Erregung auf. Demnach ist die physisch-materielle Natur nicht grundsätzlich erholsamer als die Natursimulationen. Die Hypothese ließ sich somit nicht bestätigen. Vielmehr deuten sich komplexe Erholungsmuster und damit auch unterschiedliche Erholungsqualitäten der Settings an, die einer differenzierten Betrachtung bedürfen. Für die ökologische Validität von Natursimulationen gilt, dass diese nur mit Einschränkung als ökologisch valide bezeichnet werden können, d.h. nur für bestimmte, aber nicht für alle Erholungsreaktionen. Die beiden Natursimulationen führen ebenfalls trotz Unterschiede in der erlebnisbezogenen Künstlichkeit zu ähnlichen Erholungsreaktionen und können somit als gleichwertig behandelt werden. Erstaunlicherweise kommt es hier zu ähnlichen Erholungsreaktionen, obwohl die bestehenden Unterschiede von den Probanden wahrgenommen und die erlebnisbezogen künstlichere computergenerierte Version negativer bewertet wird. Aufgrund der nicht erwartungskonformen Ergebnisse muss das Erklärungskonzept der erlebnisbezogenen Künstlichkeit/Natürlichkeit infrage gestellt werden. Alternative Erklärungskonzepte für die Ergebnisse („Ungewissheit“, mentale räumliche Modelle), die sich andeutenden unterschiedlichen Erholungsqualitäten der Settings, methodische Einschränkungen sowie die praktische Bedeutung der Ergebnisse werden kritisch diskutiert.

Protein Folding Simulations: Confinement, External Fields and Sequence Design

The present Thesis looks at the problem of protein folding using Monte Carlo and Langevin simulations, three topics in protein folding have been studied: 1) the effect of confining potential barriers, 2) the effect of a static external field and 3) the design of amino acid sequences which fold in a short time and which have a stable native state (global minimum). Regarding the first topic, we studied the confinement of a small protein of 16 amino acids known as 1NJ0 (PDB code) which has a beta-sheet structure as a native state. The confinement of proteins occurs frequently in the cell environment. Some molecules called Chaperones, present in the cytoplasm, capture the unfolded proteins in their interior and avoid the formation of aggregates and misfolded proteins. This mechanism of confinement mediated by Chaperones is not yet well understood. In the present work we considered two kinds of potential barriers which try to mimic the confinement induced by a Chaperon molecule. The first kind of potential was a purely repulsive barrier whose only effect is to create a cavity where the protein folds up correctly. The second kind of potential was a barrier which includes both attractive and repulsive effects. We performed Wang-Landau simulations to calculate the thermodynamical properties of 1NJ0. From the free energy landscape plot we found that 1NJ0 has two intermediate states in the bulk (without confinement) which are clearly separated from the native and the unfolded states. For the case of the purely repulsive barrier we found that the intermediate states get closer to each other in the free energy landscape plot and eventually they collapse into a single intermediate state. The unfolded state is more compact, compared to that in the bulk, as the size of the barrier decreases. For an attractive barrier modifications of the states (native, unfolded and intermediates) are observed depending on the degree of attraction between the protein and the walls of the barrier. The strength of the attraction is measured by the parameter $\epsilon$. A purely repulsive barrier is obtained for $\epsilon=0$ and a purely attractive barrier for $\epsilon=1$. The states are changed slightly for magnitudes of the attraction up to $\epsilon=0.4$. The disappearance of the intermediate states of 1NJ0 is already observed for $\epsilon =0.6$. A very high attractive barrier ($\epsilon \sim 1.0$) produces a completely denatured state. In the second topic of this Thesis we dealt with the interaction of a protein with an external electric field. We demonstrated by means of computer simulations, specifically by using the Wang-Landau algorithm, that the folded, unfolded, and intermediate states can be modified by means of a field. We have found that an external field can induce several modifications in the thermodynamics of these states: for relatively low magnitudes of the field ($<2.06 \times 10^8$ V/m) no major changes in the states are observed. However, for higher magnitudes than ($6.19 \times 10^8$ V/m) one observes the appearance of a new native state which exhibits a helix-like structure. In contrast, the original native state is a $\beta$-sheet structure. In the new native state all the dipoles in the backbone structure are aligned parallel to the field. The design of amino acid sequences constitutes the third topic of the present work. We have tested the Rate of Convergence criterion proposed by D. Gridnev and M. Garcia ({\it work unpublished}). We applied it to the study of off-lattice models. The Rate of Convergence criterion is used to decide if a certain sequence will fold up correctly within a relatively short time. Before the present work, the common way to decide if a certain sequence was a good/bad folder was by performing the whole dynamics until the sequence got its native state (if it existed), or by studying the curvature of the potential energy surface. There are some difficulties in the last two approaches. In the first approach, performing the complete dynamics for hundreds of sequences is a rather challenging task because of the CPU time needed. In the second approach, calculating the curvature of the potential energy surface is possible only for very smooth surfaces. The Rate of Convergence criterion seems to avoid the previous difficulties. With this criterion one does not need to perform the complete dynamics to find the good and bad sequences. Also, the criterion does not depend on the kind of force field used and therefore it can be used even for very rugged energy surfaces.

Ab initio Molecular Dynamics Simulations of the Structural Response of Solids to Ultrashort Laser and XUV Pulses

The theoretical model and underlying physics described in this thesis are about the interaction of femtosecond-laser and XUV pulses with solids. The key to understand the basics of such interaction is to study the structural response of the materials after laser interaction. Depending on the laser characteristics, laser-solid interaction can result in a wide range of structural responses such as solid-solid phase transitions, vacuum phonon squeezing, ultrafast melting, generation of coherent phonons, etc. During my research work, I have modeled the systems irradiated by low-, medium- and high-laser intensities, and studied different types of structural dynamics of solids at various laser fluences.

Vesicle motion during sustained exocytosis in chromaffin cells

Chromaffin cells release catecholamines by exocytosis, a process that includes vesicle docking, priming and fusion. Although all these steps have been intensively studied, some aspects of their mechanisms, particularly those regarding vesicle transport to the active sites situated at the membrane, are still unclear. In this work, we show that it is possible to extract information on vesicle motion in Chromaffin cells from the combination of Langevin simulations and amperometric measurements. We developed a numerical model based on Langevin simulations of vesicle motion towards the cell membrane and on the statistical analysis of vesicle arrival times. We also performed amperometric experiments in bovine-adrenal Chromaffin cells under Ba2+ stimulation to capture neurotransmitter releases during sustained exocytosis. In the sustained phase, each amperometric peak can be related to a single release from a new vesicle arriving at the active site. The amperometric signal can then be mapped into a spike-series of release events. We normalized the spike-series resulting from the current peaks using a time-rescaling transformation, thus making signals coming from different cells comparable. We discuss why the obtained spike-series may contain information about the motion of all vesicles leading to release of catecholamines. We show that the release statistics in our experiments considerably deviate from Poisson processes. Moreover, the interspike-time probability is reasonably well described by two-parameter gamma distributions. In order to interpret this result we computed the vesicles’ arrival statistics from our Langevin simulations. As expected, assuming purely diffusive vesicle motion we obtain Poisson statistics. However, if we assume that all vesicles are guided toward the membrane by an attractive harmonic potential, simulations also lead to gamma distributions of the interspike-time probability, in remarkably good agreement with experiment. We also show that including the fusion-time statistics in our model does not produce any significant changes on the results. These findings indicate that the motion of the whole ensemble of vesicles towards the membrane is directed and reflected in the amperometric signals. Our results confirm the conclusions of previous imaging studies performed on single vesicles that vesicles’ motion underneath plasma membranes is not purely random, but biased towards the membrane.