1.55 µm High-Speed QDs Lasers for Optical Telecommunication Applications

In this work investigation of the QDs formation and the fabrication of QD based semiconductor lasers for telecom applications are presented. InAs QDs grown on AlGaInAs lattice matched to InP substrates are used to fabricate lasers operating at 1.55 µm, which is the central wavelength for far distance data transmission. This wavelength is used due to its minimum attenuation in standard glass fibers. The incorporation of QDs in this material system is more complicated in comparison to InAs QDs in the GaAs system. Due to smaller lattice mismatch the formation of circular QDs, elongated QDs and quantum wires is possible. The influence of the different growth conditions, such as the growth temperature, beam equivalent pressure, amount of deposited material on the formation of the QDs is investigated. It was already demonstrated that the formation process of QDs can be changed by the arsenic species. The formation of more round shaped QDs was observed during the growth of QDs with As2, while for As4 dash-like QDs. In this work only As2 was used for the QD growth. Different growth parameters were investigated to optimize the optical properties, like photoluminescence linewidth, and to implement those QD ensembles into laser structures as active medium. By the implementation of those QDs into laser structures a full width at half maximum (FWHM) of 30 meV was achieved. Another part of the research includes the investigation of the influence of the layer design of lasers on its lasing properties. QD lasers were demonstrated with a modal gain of more than 10 cm-1 per QD layer. Another achievement is the large signal modulation with a maximum data rate of 15 Gbit/s. The implementation of optimized QDs in the laser structure allows to increase the modal gain up to 12 cm-1 per QD layer. A reduction of the waveguide layer thickness leads to a shorter transport time of the carriers into the active region and as a result a data rate up to 22 Gbit/s was achieved, which is so far the highest digital modulation rate obtained with any 1.55 µm QD laser. The implementation of etch stop layers into the laser structure provide the possibility to fabricate feedback gratings with well defined geometries for the realization of DFB lasers. These DFB lasers were fabricated by using a combination of dry and wet etching. Single mode operation at 1.55 µm with a high side mode suppression ratio of 50 dB was achieved.

Optimization of the Mechanical and Optical Properties of Tunable Optical Sensor Arrays (TOSA) for a Nanospectrometer in the Visible and Near Infrared Spectral Range

Tunable Optical Sensor Arrays (TOSA) based on Fabry-Pérot (FP) filters, for high quality spectroscopic applications in the visible and near infrared spectral range are investigated within this work. The optical performance of the FP filters is improved by using ion beam sputtered niobium pentoxide (Nb2O5) and silicon dioxide (SiO2) Distributed Bragg Reflectors (DBRs) as mirrors. Due to their high refractive index contrast, only a few alternating pairs of Nb2O5 and SiO2 films can achieve DBRs with high reflectivity in a wide spectral range, while ion beam sputter deposition (IBSD) is utilized due to its ability to produce films with high optical purity. However, IBSD films are highly stressed; resulting in stress induced mirror curvature and suspension bending in the free standing filter suspensions of the MEMS (Micro-Electro-Mechanical Systems) FP filters. Stress induced mirror curvature results in filter transmission line degradation, while suspension bending results in high required filter tuning voltages. Moreover, stress induced suspension bending results in higher order mode filter operation which in turn degrades the optical resolution of the filter. Therefore, the deposition process is optimized to achieve both near zero absorption and low residual stress. High energy ion bombardment during film deposition is utilized to reduce the film density, and hence the film compressive stress. Utilizing this technique, the compressive stress of Nb2O5 is reduced by ~43%, while that for SiO2 is reduced by ~40%. Filters fabricated with stress reduced films show curvatures as low as 100 nm for 70 μm mirrors. To reduce the stress induced bending in the free standing filter suspensions, a stress optimized multi-layer suspension design is presented; with a tensile stressed metal sandwiched between two compressively stressed films. The stress in Physical Vapor Deposited (PVD) metals is therefore characterized for use as filter top-electrode and stress compensating layer. Surface micromachining is used to fabricate tunable FP filters in the visible spectral range using the above mentioned design. The upward bending of the suspensions is reduced from several micrometers to less than 100 nm and 250 nm for two different suspension layer combinations. Mechanical tuning of up to 188 nm is obtained by applying 40 V of actuation voltage. Alternatively, a filter line with transmission of 65.5%, Full Width at Half Maximum (FWHM) of 10.5 nm and a stopband of 170 nm (at an output wavelength of 594 nm) is achieved. Numerical model simulations are also performed to study the validity of the stress optimized suspension design for the near infrared spectral range, wherein membrane displacement and suspension deformation due to material residual stress is studied. Two bandpass filter designs based on quarter-wave and non-quarter-wave layers are presented as integral components of the TOSA. With a filter passband of 135 nm and a broad stopband of over 650 nm, high average filter transmission of 88% is achieved inside the passband, while maximum filter transmission of less than 1.6% outside the passband is achieved.

Optimization in the Technological Steps for the Fabrication of Large Area Micromirror Arrays

Micromirror arrays are a very strong candidate for future energy saving applications. Within this work, the fabrication process for these micromirror arrays has been optimized and some steps for the large area fabrication of micromirror modules were performed. At first the surface roughness of the insulation layer of silicon dioxide (SiO2) was investigated. This SiO2 thin layer was deposited on three different type of substrates i.e. silicon, glass and Polyethylene Naphthalate (PEN) substrates. The deposition techniques which has been used are Plasma Enhanced Chemical Vapor Deposition (PECVD), Physical Vapor Deposition (PVD) and Ion Beam Sputter Deposition (IBSD). The thickness of the SiO2 thin layer was kept constant at 150nm for each deposition process. The surface roughness was measured by Stylus Profilometry and Atomic Force Microscopy (AFM). It was found that the layer which was deposited by IBSD has got the minimum surface roughness value and the layer which was deposited by PECVD process has the highest surface roughness value. During the same investigation, the substrate temperature of PECVD was varied from 80° C to 300° C with the step size of 40° C and it was found that the surface roughness keeps on increasing as the substrate holder temperature increases in the PECVD process. A new insulation layer system was proposed to minimize the dielectric breakdown effect in insulation layer for micromirror arrays. The conventional bilayer system was replaced by five layer system but the total thickness of insulation layer remains the same. It was found that during the actuation of micromirror arrays structure, the dielectric breakdown effect was reduced considerably as compared to the bilayer system. In the second step the fabrication process of the micromirror arrays was successfully adapted and transferred from glass substrates to the flexible PEN substrates by optimizing the conventional process recipe. In the last section, a large module of micromirror arrays was fabricated by electrically interconnecting four 10cm×10cm micromirror modules on a glass pane having dimensions of 21cm×21cm.

Zum Querkrafttragverhalten von UHPC-Balken mit kombinierter Bewehrung aus Stahlfasern und Stabstahl

Ultrahochfester Beton besitzt aufgrund seiner Zusammensetzung eine sehr hohe Druckfestigkeit von 150 bis über 200 N/mm² und eine außergewöhnlich hohe Dichtigkeit. Damit werden Anwendungen in stark belasteten Bereichen und mit hohen Anforderungen an die Dauerhaftigkeit des Materials ermöglicht. Gleichzeitig zeigt ultrahochfester Beton bei Erreichen seiner Festigkeit ein sehr sprödes Verhalten. Zur Verhinderung eines explosionsartigen Versagens werden einer UHPC-Mischung Fasern zugegeben oder wird eine Umschnürung mit Stahlrohren ausgebildet. Die Zugabe von Fasern zur Betonmatrix beeinflusst neben der Verformungsfähigkeit auch die Tragfähigkeit des UHPC. Das Versagen der Fasern ist abhängig von Fasergeometrie, Fasergehalt, Verbundverhalten sowie Zugfestigkeit der Faser und gekennzeichnet durch Faserauszug oder Faserreißen. Zur Sicherstellung der Tragfähigkeit kann daher auf konventionelle Bewehrung außer bei sehr dünnen Bauteilen nicht verzichtet werden. Im Rahmen des Schwerpunktprogramms SPP 1182 der Deutschen Forschungsgemeinschaft (DFG) wurden in dem dieser Arbeit zugrunde liegenden Forschungsprojekt die Fragen nach der Beschreibung des Querkrafttragverhaltens von UHPC-Bauteilen mit kombinierter Querkraftbewehrung und der Übertragbarkeit bestehender Querkraftmodelle auf UHPC untersucht. Neben einer umfassenden Darstellung vorhandener Querkraftmodelle für Stahlbetonbauteile ohne Querkraftbewehrung und mit verschiedenen Querkraftbewehrungsarten bilden experimentelle Untersuchungen zum Querkrafttragverhalten an UHPC-Balken mit verschiedener Querkraftbewehrung den Ausgangspunkt der vorliegenden Arbeit. Die experimentellen Untersuchungen beinhalteten zehn Querkraftversuche an UHPC-Balken. Diese Balken waren in Abmessungen und Biegezugbewehrung identisch. Sie unterschieden sich nur in der Art der Querkraftbewehrung. Die Querkraftbewehrungsarten umfassten eine Querkraftbewehrung aus Stahlfasern oder Vertikalstäben, eine kombinierte Querkraftbewehrung aus Stahlfasern und Vertikalstäben und einen Balken ohne Querkraftbewehrung. Obwohl für die in diesem Projekt untersuchten Balken Fasergehalte gewählt wurden, die zu einem entfestigenden Nachrissverhalten des Faserbetons führten, zeigten die Balkenversuche, dass die Zugabe von Stahlfasern die Querkrafttragfähigkeit steigerte. Durch die gewählte Querkraftbewehrungskonfiguration bei ansonsten identischen Balken konnte außerdem eine quantitative Abschätzung der einzelnen Traganteile aus den Versuchen abgeleitet werden. Der profilierte Querschnitt ließ einen großen Einfluss auf das Querkrafttragverhalten im Nachbruchbereich erkennen. Ein relativ stabiles Lastniveau nach Erreichen der Höchstlast konnte einer Vierendeelwirkung zugeordnet werden. Auf Basis dieser Versuchsergebnisse und analytischer Überlegungen zu vorhandenen Querkraftmodellen wurde ein additiver Modellansatz zur Beschreibung des Querkrafttragverhaltens von UHPCBalken mit einer kombinierten Querkraftbewehrung aus Stahlfasern und Vertikalstäben formuliert. Für die Formulierung der Traganteile des Betonquerschnitts und der konventionellen Querkraftbewehrung wurden bekannte Ansätze verwendet. Für die Ermittlung des Fasertraganteils wurde die Faserwirksamkeit zugrunde gelegt. Das Lastniveau im Nachbruchbereich aus Viendeelwirkung ergibt sich aus geometrischen Überlegungen.