Growth and Characterisation of Radio Frequency Magnetron Sputttered Indium Tin Oxide Thin Films

The increasing interest in the interaction of light with electricity and electronically active materials made the materials and techniques for producing semitransparent electrically conducting films particularly attractive. Transparent conductors have found major applications in a number of electronic and optoelectronic devices including resistors, transparent heating elements, antistatic and electromagnetic shield coatings, transparent electrode for solar cells, antireflection coatings, heat reflecting mirrors in glass windows and many other. Tin doped indium oxide (indium tin oxide or ITO) is one of the most commonly used transparent conducting oxides. At present and likely well into the future this material offers best available performance in terms of conductivity and transmittivity combined with excellent environmental stability, reproducibility and good surface morphology. Although partial transparency, with a reduction in conductivity, can be obtained for very thin metallic films, high transparency and simultaneously high conductivity cannot be attained in intrinsic stoichiometric materials. The only way this can be achieved is by creating electron degeneracy in a wide bandgap (Eg > 3eV or more for visible radiation) material by controllably introducing non-stoichiometry and/or appropriate dopants. These conditions can be conveniently met for ITO as well as a number of other materials like Zinc oxide, Cadmium oxide etc. ITO shows interesting and technologically important combination of properties viz high luminous transmittance, high IR reflectance, good electrical conductivity, excellent substrate adherence and chemical inertness. ITO is a key part of solar cells, window coatings, energy efficient buildings, and flat panel displays. In solar cells, ITO can be the transparent, conducting top layer that lets light into the cell to shine the junction and lets electricity flow out. Improving the ITO layer can help improve the solar cell efficiency. A transparent ii conducting oxide is a material with high transparency in a derived part of the spectrum and high electrical conductivity. Beyond these key properties of transparent conducting oxides (TCOs), ITO has a number of other key characteristics. The structure of ITO can be amorphous, crystalline, or mixed, depending on the deposition temperature and atmosphere. The electro-optical properties are a function of the crystallinity of the material. In general, ITO deposited at room temperature is amorphous, and ITO deposited at higher temperatures is crystalline. Depositing at high temperatures is more expensive than at room temperature, and this method may not be compatible with the underlying devices. The main objective of this thesis work is to optimise the growth conditions of Indium tin oxide thin films at low processing temperatures. The films are prepared by radio frequency magnetron sputtering under various deposition conditions. The films are also deposited on to flexible substrates by employing bias sputtering technique. The films thus grown were characterised using different tools. A powder x-ray diffractometer was used to analyse the crystalline nature of the films. The energy dispersive x-ray analysis (EDX) and scanning electron microscopy (SEM) were used for evaluating the composition and morphology of the films. Optical properties were investigated using the UVVIS- NIR spectrophotometer by recording the transmission/absorption spectra. The electrical properties were studied using vander Pauw four probe technique. The plasma generated during the sputtering of the ITO target was analysed using Langmuir probe and optical emission spectral studies.

Frequency tunable metallo–dielectric structure for backscattering reduction

Electromagnetic scattering behaviour of a superstrate loaded metallo– dielectric structure based on Sierpinski carpet fractal geometry is reported. The results indicate that the frequency at which backscattering is minimum can be tuned by varying the thickness of the superstrate. A reduction in backscattered power of 44 dB is obtained simultaneously for both TE and TM polarisations of the incident field.

Characterization of radio frequency plasma using Langmuir probe and optical emission spectroscopy

The radio frequency plasma generated during the sputtering of Indium Tin Oxide target using Argon was analyzed by Langmuir probe and optical-emission spectroscopy. The basic plasma parameters such as electron temperature and ion density were evaluated. These studies were carried out by varying the RF power from 20 to 50 W. A linear increase in ion density and an exponential decrease in electron temperature with rf power were observed. The measured plasma parameters were then correlated with the properties of ITO thin films deposited under similar plasma conditions.

Broadband dual frequency microstrip antenna

A new dual port microstrip antenna geometry for dual frequency operation is presented. The structure consists of the intersection of two circles of the same radius with their centres displaced by a small fraction of the wavelength . This antenna provides wide impedance bandwidth and excellent isolation between its ports. The gain of the antenna is comparable to that of a standard circular microstrip antenna operating at the same resonant frequency. A theoretical analysis for calculating the resonant frequencies of the two ports is also presented

Single-feed dual-frequency dual-polarized slotted square microstrip antenna

A novel dual frequency dual-polarized square microstrip patch antenna embedded with a slot is presented. The proposed antenna offers tunability of the frequency ratio between the two frequencies by adjusting the slot dimensions. This configuration also provides a size reduction up to -51 and 35% for the two modes as compared to a square micro strip patch antenna

Slot-Loaded Compact Microstrip Antenna for Dual-Frequency Operation

Dual frequency operation is achieved from a compact microstrip antenna by loading a pair of narrow slots close to its radiating edges. The two frequencies have parallel polarization planes and similar radiation characteristics. The ratio between the two operating frequencies can be tuned in the range (1.14-1. 24), which is much smaller than that of similar designs. The above excellent radiation characteristics are achieved along with an area reduction of - 75% compared to the standard rectangular patch

Analytical Equations for Compact Dual Frequency Microstrip Antenna

Design equations are presented for calculating the resonance frequencies for a compact dual frequency arrow-shaped microstrip antenna. This provides a fast and simple way to predict the resonant frequencies of the antenna. The antenna is also analyzed using the IE3D simulation package. The theoretical predictions are found to be very close to the IE3D results and thus establish the validity of the design formulae

Slot coupled sqaure microstrip antenna for compact dual-frequency operation

A novel dual frequency design of a square microstrip antenna coaxially fed along the diagonal with a chip capacitor mounted at the bottom of the stub is introduced. This design provides enhanced area reduction and good cross-polarization levels. The antenna design can be used as a compact antenna system where limited size is a major requirement. The details of the antenna design and experimental results are presented

Tunnel-Based Artificial Neural Network Technique to Calculate the Resonant Frequency of a Thick-Substrate Microstrip Antenna

The mathematical formulation of empirically developed formulas Jirr the calculation of the resonant frequency of a thick-substrate (h s 0.08151 A,,) microstrip antenna has been analyzed. With the use qt' tunnel-based artificial neural networks (ANNs), the resonant frequency of antennas with h satisfying the thick-substrate condition are calculated and compared with the existing experimental results and also with the simulation results obtained with the use of an IE3D software package. The artificial neural network results are in very good agreement with the experimental results

Dual-frequency dual-polarized slot -coupled compact microstrip antenna for communication system

A new design of' a dual-frequency dual-polarized square microsh'ip antenna fed along the diagonal, embedded with a square slot having three extended stubs for frequency tuning, is introduced. The proposed antenna was fabricated using a standard photolithographic method and the antenna was tested using the HP 3510(:; Vector Network Analyser. The antenna is capable of generating dual resonant frequencies with mutually perpendicular polarizations and broad radiation pattern characteristics. Such dual-frequency designs find wide applications in personal mobile handsets combining GSM and CDS 1800 modes, and applications in which different frequencies are used for emission and reception such as personal satellite communications and cellular network systems.

A Compact Novel Slot-Loaded Dual-Frequency H-Shaped Antenna

A novel compact single-layer dual frequency microstrip antenna which uses an H-shaped geometry with two U-shaped slots embedded near the radiation edges, is presented. By changing the design parameters, the lower and higher resonant frequencies can be controlled easily, and a range of frequency ratios (1.716-2.363) can be obtained in this design. For the two operating frequencies of the proposed antenna, the same polarization planes and broadside radiation patterns are achieved. Compared to the regular dualfrequency patch antenna, this antenna can realize a significant size reduction

A reconfiguration dual-frequency slot-loaded microstrip antenna controlled by pin diodes

A novel reconfigurable, single feed, dual frequency, dualpolarized operation of a hexagonal slot-loaded square mwrostrip antenna is presented in this paper. A pin diode incorporated in the slot is used to switch the two operating frequencies considerably, without significantly affecting the radiation characteristics and gain. The proposed antenna provides a size reduction up to 61% and 26% Jor the two resonating frequencies, compared to standard rectangular patches. This design also gives considerable bandwidth up to 3.3% and 4.27%, for the two frequencies with a low operating frequency ratio

Development of a varactor -controlled dual-frequency reconfigurable microstrip antenna

A new design for a compact electronically reconffgurable singlefeed dual frequency dual-polarized operation of a square-microstrip antenna capable of achieving tunable frequency ratios in the range 1.1 to 1.37 is proposed and experimentally studied. Varactor diodes inlegruted with the arms of the hexagonal slot and embedded in the square patch are used to tune the operating frequencies by applying reverse-bias voltage. The design has the advantage of size reduction up to 73.21% and 49.86% for the two resonant frequencies, respectively, as compared to standard rectangular patches. The antenna offers good bandwidth of 5.74% and 5.36% for the two operating frequencies. A highly simplified tuning circuitry without any transmission lines adds to the compactness of the design