Fabrication and investigation of three-dimensional ferroelectric capacitors for the application of FeRAM

Magdeburg, Univ., Fak. für Elektrotechnik und Informationstechnik, Diss., 2015

Fabrication and characterisation of ferroelectric lead zirconate titanate and strontium bismuth tantalate thin films

Ferroelectrics, liquid delivery, MOCVD, lead zirconate titanate, strontium bismuth tantalate