Electrical characterization of radio frequency discharges

Two electrical techniques that are frequently used to characterize radio frequency plasmas are described: current-voltage probes for plasma power input and compensated Langmuir probes for electron energy probability functions and other parameters. The following examples of the use of these techniques, sometimes in conjunction with other diagnostic methods, are presented: plasma source standardization, plasma system comparison, power efficiency, plasma modelling and complex processing plasma mechanisms.

Helicon Mode Formation and Radio Frequency Power Deposition in a Helicon Produced Plasma

Time- and space-resolved magnetic (B-dot) probe measurements in combination with measurements of the plasma parameters were carried out to investigate the relationship between the formation and propagation of helicon modes and the radio frequency (rf) power deposition in the core of a helicon plasma. The Poynting flux and the absorbed power density are deduced from the measured rf magnetic field distribution in amplitude and phase. Special attention is devoted to the helicon absorption under linear and nonlinear conditions. The present investigations are attached to recent observations in which the nonlinear nature of the helicon wave absorption has been demonstrated by showing that the strong absorption of helicon waves is correlated with parametric excitation of electrostatic fluctuations.

The dynamics of radio-frequency driven atmospheric pressure plasma jets

The complex dynamics of radio-frequency driven atmospheric pressure plasma jets is investigated using various optical diagnostic techniques and numerical simulations. Absolute number densities of ground state atomic oxygen radicals in the plasma effluent are measured by two-photon absorption laser induced fluorescence spectroscopy (TALIF). Spatial profiles are compared with (vacuum) ultra-violet radiation from excited states of atomic oxygen and molecular oxygen, respectively. The excitation and ionization dynamics in the plasma core are dominated by electron impact and observed by space and phase resolved optical emission spectroscopy (PROES). The electron dynamics is governed through the motion of the plasma boundary sheaths in front of the electrodes as illustrated in numerical simulations using a hybrid code based on fluid equations and kinetic treatment of electrons.

Space and phase resolved optical emission in mode transitions of radio-frequency inductively coupled plasmas

Inductively coupled radio-frequency plasmas can be operated in two distinct modes. At low power and comparatively low plasma densities the plasma is sustained in capacitive mode (E-mode). As the plasma density increases a transition to inductive mode (H-mode) is observed. This transition region is of particular interest and governed by non-linear dynamics, which under certain conditions results in structure formation with strong spatial gradients in light emission. These modes show pronounced differences is various measureable quantities e.g. electron densities, electron energy distribution functions, ion energy distribution functions, dynamics of optical light emission. Here the transition from E- to H- mode in an oxygen containing inductively coupled plasma (ICP) is investigated using space and phase resolved optical emission spectroscopy (PROES). The emission, measured phase resolved, allows investigation of the electron dynamics within the rf cycle, important for understanding the power coupling and ionization mechanisms in the discharge. The temporal variation of the emission reflects the dynamics of relatively high-energy electrons. It is possible to distinguish between E- and H-mode from the intensity and temporal behaviour of the emission.

Flexible Natural Language Generation in Multiple Contexts

We present a practical approach to Natural Language Generation (NLG) for spoken dialogue systems. The approach is based on small template fragments (mini-templates). The system’s object architecture facilitates generation of phrases across pre-defined business domains and registers, as well as into different languages. The architecture simplifies NLG in well-understood application contexts, while providing the flexibility for a developer and for the system, to vary linguistic output according to dialogue context, including any intended affective impact. Mini-templates are used with a suite of domain term objects, resulting in an NLG system (MINTGEN – MINi-Template GENerator) whose extensibility and ease of maintenance is enhanced by the sparsity of information devoted to individual domains. The system also avoids the need for specialist linguistic competence on the part of the system maintainer.

Development of a Java-based Unified and Flexible Natural Language Discourse System

This paper outlines the design and development of a Java-based, unified and flexible natural language dialogue system that enables users to interact using natural language, e.g. speech. A number of software development issues are considered with the aim of designing an architecture that enables different discourse components to be readily and flexibly combined in a manner that permits information to be easily shared. Use of XML schemas assists this component interaction. The paper describes how a range of Java language features were employed to support the development of the architecture, providing an illustration of how a modern programming language makes tractable the development of a complex dialogue system.