Plasma Ionization in Low-Pressure Radio-Frequency Discharges. Part I: Optical Measurements

The electron dynamics in the low-pressure operation regime ($«$ 5 Pa) of a neon capacitively coupled plasma is investigated using phase-resolved optical emission spectroscopy. Plasma ionization and sustainment mechanisms are governed by the expanding and contracting sheath and complex wave–particle interactions. Electrons are energized through the advancing and retreating electric field of the RF sheath. The associated interaction of energetic sheath electrons with thermal bulk plasma electrons drives a two-stream instability also dissipating power in the plasma.

Plasma Ionization in Low-Pressure Radio-Frequency Discharges—Part II: Particle-in-Cell Simulation

Plasma ionization in the low-pressure operation regime ( $«$ 5 Pa) of RF capacitively coupled plasmas (CCPs) is governed by a complex interplay of various mechanisms, such as field reversal, sheath expansion, and wave–particle interactions. In a previous paper, it was shown that experimental observations in a hydrogen CCP operated at 13.56 MHz are qualitatively well described in a 1-D symmetrical particle-in-cell (PIC) simulation. In this paper, a spherical asymmetrical PIC simulation that is closer to the conditions of the highly asymmetrical experimental device is used to simulate a low-pressure neon CCP operated at 2 MHz. The results show a similar behavior, with pronounced ionization through field reversal, sheath expansion, and wave–particle interactions, and can be exploited for more accurate quantitative comparisons with experimental observations.

Electrical characterization of radio frequency discharges

Two electrical techniques that are frequently used to characterize radio frequency plasmas are described: current-voltage probes for plasma power input and compensated Langmuir probes for electron energy probability functions and other parameters. The following examples of the use of these techniques, sometimes in conjunction with other diagnostic methods, are presented: plasma source standardization, plasma system comparison, power efficiency, plasma modelling and complex processing plasma mechanisms.

Postglacial vegetation and climate dynamics in the Seymour-Belize Inlet Complex, central coastal British Columbia, Canada: palynological evidence from Tiny Lake.

A pollen-based study from Tiny Lake in the Seymour-Belize Inlet Complex of central coastal British Columbia, Canada, permits an evaluation of the dynamic response of coastal temperate rainforests to postglacial climate change. Open Pinus parklands grew at the site during the early Lateglacial when the climate was cool and dry, but more humid conditions in the later phases of the Lateglacial permitted mesophytic conifers to colonise the region. Early Holocene conditions were warmer than present and a successional mosaic of Tsuga heterophylla and Alnus occurred at Tiny Lake. Climate cooling and moistening at 8740?±?70 14C a BP initiated the development of closed, late successional T. heterophylla–Cupressaceae forests, which achieved modern character after 6860?±?50 14C a BP, when a temperate and very wet climate became established. The onset of early Holocene climate cooling and moistening at Tiny Lake may have preceded change at more southern locations, including within the Seymour-Belize Inlet Complex, on a meso- to synoptic scale. This would suggest that an early Holocene intensification of the Aleutian Low pressure system was an important influence on forest dynamics in the Seymour-Belize Inlet Complex and that the study region was located near the southern extent of immediate influence of this semi-permanent air mass.

Helicon Mode Formation and Radio Frequency Power Deposition in a Helicon Produced Plasma

Time- and space-resolved magnetic (B-dot) probe measurements in combination with measurements of the plasma parameters were carried out to investigate the relationship between the formation and propagation of helicon modes and the radio frequency (rf) power deposition in the core of a helicon plasma. The Poynting flux and the absorbed power density are deduced from the measured rf magnetic field distribution in amplitude and phase. Special attention is devoted to the helicon absorption under linear and nonlinear conditions. The present investigations are attached to recent observations in which the nonlinear nature of the helicon wave absorption has been demonstrated by showing that the strong absorption of helicon waves is correlated with parametric excitation of electrostatic fluctuations.

The dynamics of radio-frequency driven atmospheric pressure plasma jets

The complex dynamics of radio-frequency driven atmospheric pressure plasma jets is investigated using various optical diagnostic techniques and numerical simulations. Absolute number densities of ground state atomic oxygen radicals in the plasma effluent are measured by two-photon absorption laser induced fluorescence spectroscopy (TALIF). Spatial profiles are compared with (vacuum) ultra-violet radiation from excited states of atomic oxygen and molecular oxygen, respectively. The excitation and ionization dynamics in the plasma core are dominated by electron impact and observed by space and phase resolved optical emission spectroscopy (PROES). The electron dynamics is governed through the motion of the plasma boundary sheaths in front of the electrodes as illustrated in numerical simulations using a hybrid code based on fluid equations and kinetic treatment of electrons.

Space and phase resolved optical emission in mode transitions of radio-frequency inductively coupled plasmas

Inductively coupled radio-frequency plasmas can be operated in two distinct modes. At low power and comparatively low plasma densities the plasma is sustained in capacitive mode (E-mode). As the plasma density increases a transition to inductive mode (H-mode) is observed. This transition region is of particular interest and governed by non-linear dynamics, which under certain conditions results in structure formation with strong spatial gradients in light emission. These modes show pronounced differences is various measureable quantities e.g. electron densities, electron energy distribution functions, ion energy distribution functions, dynamics of optical light emission. Here the transition from E- to H- mode in an oxygen containing inductively coupled plasma (ICP) is investigated using space and phase resolved optical emission spectroscopy (PROES). The emission, measured phase resolved, allows investigation of the electron dynamics within the rf cycle, important for understanding the power coupling and ionization mechanisms in the discharge. The temporal variation of the emission reflects the dynamics of relatively high-energy electrons. It is possible to distinguish between E- and H-mode from the intensity and temporal behaviour of the emission.