A dynamic sampling methodology for plasma etch processes using Gaussian process regression

Plasma etch is a key process in modern semiconductor manufacturing facilities as it offers process simplification and yet greater dimensional tolerances compared to wet chemical etch technology. The main challenge of operating plasma etchers is to maintain a consistent etch rate spatially and temporally for a given wafer and for successive wafers processed in the same etch tool. Etch rate measurements require expensive metrology steps and therefore in general only limited sampling is performed. Furthermore, the results of measurements are not accessible in real-time, limiting the options for run-to-run control. This paper investigates a Virtual Metrology (VM) enabled Dynamic Sampling (DS) methodology as an alternative paradigm for balancing the need to reduce costly metrology with the need to measure more frequently and in a timely fashion to enable wafer-to-wafer control. Using a Gaussian Process Regression (GPR) VM model for etch rate estimation of a plasma etch process, the proposed dynamic sampling methodology is demonstrated and evaluated for a number of different predictive dynamic sampling rules. © 2013 IEEE.

ALEA: Fine-Grain Energy Profiling with Basic Block Sampling

Energy efficiency is an essential requirement for all contemporary computing systems. We thus need tools to measure the energy consumption of computing systems and to understand how workloads affect it. Significant recent research effort has targeted direct power measurements on production computing systems using on-board sensors or external instruments. These direct methods have in turn guided studies of software techniques to reduce energy consumption via workload allocation and scaling. Unfortunately, direct energy measurements are hampered by the low power sampling frequency of power sensors. The coarse granularity of power sensing limits our understanding of how power is allocated in systems and our ability to optimize energy efficiency via workload allocation.
We present ALEA, a tool to measure power and energy consumption at the granularity of basic blocks, using a probabilistic approach. ALEA provides fine-grained energy profiling via sta- tistical sampling, which overcomes the limitations of power sens- ing instruments. Compared to state-of-the-art energy measurement tools, ALEA provides finer granularity without sacrificing accuracy. ALEA achieves low overhead energy measurements with mean error rates between 1.4% and 3.5% in 14 sequential and paral- lel benchmarks tested on both Intel and ARM platforms. The sampling method caps execution time overhead at approximately 1%. ALEA is thus suitable for online energy monitoring and optimization. Finally, ALEA is a user-space tool with a portable, machine-independent sampling method. We demonstrate two use cases of ALEA, where we reduce the energy consumption of a k-means computational kernel by 37% and an ocean modelling code by 33%, compared to high-performance execution baselines, by varying the power optimization strategy between basic blocks.

Modeling, Analysis and Performance Comparison of Two Direct Sampling DCSK Receivers under Frequency Nonselective Fading Channels

Two direct sampling correlator-type receivers for differential chaos shift keying (DCSK) communication systems under frequency non-selective fading channels are proposed. These receivers operate based on the same hardware platform with different architectures. In the first scheme, namely sum-delay-sum (SDS) receiver, the sum of all samples in a chip period is correlated with its delayed version. The correlation value obtained in each bit period is then compared with a fixed threshold to decide the binary value of recovered bit at the output. On the other hand, the second scheme, namely delay-sum-sum (DSS) receiver, calculates the correlation value of all samples with its delayed version in a chip period. The sum of correlation values in each bit period is then compared with the threshold to recover the data. The conventional DCSK transmitter, frequency non-selective Rayleigh fading channel, and two proposed receivers are mathematically modelled in discrete-time domain. The authors evaluated the bit error rate performance of the receivers by means of both theoretical analysis and numerical simulation. The performance comparison shows that the two proposed receivers can perform well under the studied channel, where the performances get better when the number of paths increases and the DSS receiver outperforms the SDS one.