Growth and Characterization of Silicon Carbide Thin Films Using a Nontraditional Hollow Cathode Sputtering Technique

Silicon carbide (SiC) is considered a suitable candidate for high-power, high-frequency devices due to its wide bandgap, high breakdown field, and high electron mobility. It also has the unique ability to synthesize graphene on its surface by subliming Si during an annealing stage. The deposition of SiC is most often carried out using chemical vapor deposition (CVD) techniques, but little research has been explored with respect to the sputtering of SiC. Investigations of the thin film depositions of SiC from pulse sputtering a hollow cathode SiC target are presented. Although there are many different polytypes of SiC, techniques are discussed that were used to identify the film polytype on both 4H-SiC substrates and Si substrates. Results are presented about the ability to incorporate Ge into the growing SiC films for the purpose of creating a possible heterojunction device with pure SiC. Efforts to synthesize graphene on these films are introduced and reasons for the inability to create it are discussed. Analysis mainly includes crystallographic and morphological studies about the deposited films and their quality using x-ray diffraction (XRD), reflection high energy electron diffraction (RHEED), transmission electron microscopy (TEM), scanning electron microscopy (SEM), atomic force microscopy (AFM), Auger electron spectroscopy (AES) and Raman spectroscopy. Optical and electrical properties are also discussed via ellipsometric modeling and resistivity measurements. The general interpretation of these analytical experiments indicates that the films are not single crystal. However, the majority of the films, which proved to be the 3C-SiC polytype, were grown in a highly ordered and highly textured manner on both (111) and (110) Si substrates.

Feasibility Study of Solar Driven Underground Cooling System

In the United States the peak electrical use occurs during the summer. In addition, the building sector consumes a major portion of the annual electrical energy consumption. One of the main energy consuming components in the building sector is the Heating, Ventilation, and Air-Conditioning (HVAC) systems. This research studies the feasibility of implementing a solar driven underground cooling system that could contribute to reducing building cooling loads. The developed system consists of an Earth-to-Air Heat Exchanger (EAHE) coupled with a solar chimney that provides a natural cool draft to the test facility building at the Solar Energy Research Test Facility in Omaha, Nebraska. Two sets of tests have been conducted: a natural passively driven airflow test and a forced fan assisted airflow test. The resulting data of the tests has been analyzed to study the thermal performance of the implemented system. Results show that: The underground soil proved to be a good heat sink at a depth of 9.5ft, where its temperature fluctuates yearly in the range of (46.5°F-58.2°F). Furthermore, the coupled system during the natural airflow modes can provide good thermal comfort conditions that comply with ASHRAE standard 55-2004. It provided 0.63 tons of cooling, which almost covered the building design cooling load (0.8 tons, extreme condition). On the other hand, although the coupled system during the forced airflow mode could not comply with ASHRAE standard 55-2004, it provided 1.27 tons of cooling which is even more than the building load requirements. Moreover, the underground soil experienced thermal saturation during the forced airflow mode due to the oversized fan, which extracted much more airflow than the EAHE ability for heat dissipation and the underground soil for heat absorption. In conclusion, the coupled system proved to be a feasible cooling system, which could be further improved with a few design recommendations.