1 resultado para wafer chuck
em Aberystwyth University Repository - Reino Unido
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Relevância:
Resumo:
Langstaff, David; Chase, T., (2007) 'A multichannel detector array with 768 pixels developed for electron spectroscopy', Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 573(1-2) pp.169-171 RAE2008