1 resultado para Structure change
em Universidade do Minho
Filtro por publicador
- Abertay Research Collections - Abertay University’s repository (1)
- Academic Archive On-line (Jönköping University; Sweden) (1)
- Academic Archive On-line (Stockholm University; Sweden) (1)
- Academic Research Repository at Institute of Developing Economies (5)
- Acceda, el repositorio institucional de la Universidad de Las Palmas de Gran Canaria. España (1)
- AMS Tesi di Dottorato - Alm@DL - Università di Bologna (4)
- AMS Tesi di Laurea - Alm@DL - Università di Bologna (2)
- ArchiMeD - Elektronische Publikationen der Universität Mainz - Alemanha (4)
- Archimer: Archive de l'Institut francais de recherche pour l'exploitation de la mer (1)
- Archive of European Integration (1)
- Aston University Research Archive (17)
- Biblioteca de Teses e Dissertações da USP (1)
- Biblioteca Digital da Produção Intelectual da Universidade de São Paulo (8)
- Biblioteca Digital da Produção Intelectual da Universidade de São Paulo (BDPI/USP) (181)
- BORIS: Bern Open Repository and Information System - Berna - Suiça (15)
- Brock University, Canada (4)
- Bucknell University Digital Commons - Pensilvania - USA (1)
- CentAUR: Central Archive University of Reading - UK (43)
- Central European University - Research Support Scheme (1)
- Cochin University of Science & Technology (CUSAT), India (1)
- Coffee Science - Universidade Federal de Lavras (1)
- Comissão Econômica para a América Latina e o Caribe (CEPAL) (11)
- Consorci de Serveis Universitaris de Catalunya (CSUC), Spain (16)
- CORA - Cork Open Research Archive - University College Cork - Ireland (3)
- Corvinus Research Archive - The institutional repository for the Corvinus University of Budapest (2)
- CUNY Academic Works (1)
- Dalarna University College Electronic Archive (2)
- DI-fusion - The institutional repository of Université Libre de Bruxelles (1)
- Digital Commons - Michigan Tech (5)
- Digital Commons - Montana Tech (2)
- Digital Commons @ DU | University of Denver Research (1)
- Digital Commons at Florida International University (15)
- Digital Peer Publishing (1)
- DigitalCommons - The University of Maine Research (1)
- DigitalCommons@The Texas Medical Center (7)
- Diposit Digital de la UB - Universidade de Barcelona (1)
- Doria (National Library of Finland DSpace Services) - National Library of Finland, Finland (13)
- DRUM (Digital Repository at the University of Maryland) (2)
- Duke University (3)
- Ecology and Society (1)
- eResearch Archive - Queensland Department of Agriculture; Fisheries and Forestry (1)
- Glasgow Theses Service (4)
- Greenwich Academic Literature Archive - UK (1)
- Illinois Digital Environment for Access to Learning and Scholarship Repository (1)
- Instituto Politécnico do Porto, Portugal (4)
- Massachusetts Institute of Technology (2)
- National Center for Biotechnology Information - NCBI (36)
- Plymouth Marine Science Electronic Archive (PlyMSEA) (2)
- Publishing Network for Geoscientific & Environmental Data (9)
- QSpace: Queen's University - Canada (1)
- QUB Research Portal - Research Directory and Institutional Repository for Queen's University Belfast (3)
- Repositório Científico do Instituto Politécnico de Lisboa - Portugal (1)
- Repositório da Produção Científica e Intelectual da Unicamp (25)
- Repositório digital da Fundação Getúlio Vargas - FGV (6)
- Repositório Institucional UNESP - Universidade Estadual Paulista "Julio de Mesquita Filho" (40)
- RUN (Repositório da Universidade Nova de Lisboa) - FCT (Faculdade de Cienecias e Technologia), Universidade Nova de Lisboa (UNL), Portugal (5)
- Scielo Saúde Pública - SP (8)
- Scottish Institute for Research in Economics (SIRE) (SIRE), United Kingdom (1)
- Universidad de Alicante (1)
- Universidad Politécnica de Madrid (8)
- Universidade do Minho (1)
- Universidade Metodista de São Paulo (2)
- Universita di Parma (1)
- Universitat de Girona, Spain (4)
- Universitätsbibliothek Kassel, Universität Kassel, Germany (1)
- Université de Lausanne, Switzerland (25)
- Université de Montréal (1)
- Université de Montréal, Canada (10)
- Université Laval Mémoires et thèses électroniques (1)
- University of Connecticut - USA (1)
- University of Michigan (1)
- University of Queensland eSpace - Australia (355)
- University of Washington (3)
- WestminsterResearch - UK (1)
Resumo:
tThe main purpose of this work is to present and to interpret the change of electrical properties of TaxNyOzthin films, produced by DC reactive magnetron sputtering. Some parameters were varied during deposi-tion: the flow of the reactive gases mixture (N2and O2, with a constant concentration ratio of 17:3); thesubstrate voltage bias (grounded, −50 V or −100 V) and the substrate (glass, (1 0 0) Si or high speed steel).The obtained films exhibit significant differences. The variation of the deposition parameters inducesvariations of the composition, microstructure and morphology. These differences cause variation of theelectrical resistivity essentially correlated with the composition and structural changes. The gradualdecrease of the Ta concentration in the films induces amorphization and causes a raise of the resistivity.The dielectric characteristics of some of the high resistance TaxNyOzfilms were obtained in the sampleswith a capacitor-like design (deposited onto high speed steel, with gold pads deposited on the dielectricTaxNyOzfilms). Some of these films exhibited dielectric constant values higher than those reported forother tantalum based dielectric films.