Inductively coupled reactive ion etching studies on sputtered yttria stabilized zirconia thin films in SF6, Cl-2, and BCl3 chemistries

Downscaling of yttria stabilized zirconia (YSZ) based electrochemical devices and gate oxide layers requires successful pattern transfer on YSZ thin films. Among a number of techniques available to transfer patterns to a material, reactive ion etching has the capability to offer high resolution, easily controllable, tunable anisotropic/isotropic pattern transfer for batch processing. This work reports inductively coupled reactive ion etching studies on sputtered YSZ thin films in fluorine and chlorine based plasmas and their etch chemistry analyses using x-ray photoelectron spectroscopy. Etching in SF6 plasma gives an etch rate of 7 nm/min chiefly through physical etching process. For same process parameters, in Cl-2 and BCl3 plasmas, YSZ etch rate is 17 nm/min and 45 nm/min, respectively. Increased etch rate in BCl3 plasma is attributed to its oxygen scavenging property synergetic with other chemical and physical etch pathways. BCl3 etched YSZ films show residue-free and smooth surface. The surface atomic concentration ratio of Zr/Y in BCl3 etched films is closer to as-annealed YSZ thin films. On the other hand, Cl-2 etched films show surface yttrium enrichment. Selectivity ratio of YSZ over silicon (Si), silicon dioxide (SiO2) and silicon nitride (Si3N4) are 1:2.7, 1:1, and 1:0.75, respectively, in BCl3 plasma. YSZ etch rate increases to 53 nm/min when nonoxygen supplying carrier wafer like Si3N4 is used. (C) 2015 American Vacuum Society.

Flower-like porous cobalt(II) monoxide nanostructures as anode material for Li-ion batteries

In the present study, a microwave-assisted, solution-based route has been employed to obtain porous CoO nano structures. Detailed characterization reveals that the flower-like nanostructures comprise petal-like sheets, each of which is made of an ordered, porous arrangement of crystallites of CoO measuring about 6 nm. TEM analysis shows that each ``petal'' is an oriented aggregate of CoO nanocrystals, such aggregation promoted by the hydroxyl moieties derived from the solution. The structure provides a large specific area as well as the porosity desirable in electrodes in Li-ion batteries. Electrochemical measurements carried out on electrodes made of nanostructured CoO show excellent Li ion-storing capability. A specific capacitance of 779 mAh g(-1) has been measured at a specific current of 100 mA g(-1). Measurements show also excellent cyclability and coulombic efficiency. Impedance spectroscopy provides evidence for charge transfer occurring in the porous networks. (C) 2015 Elsevier B.V. All rights reserved.