Topology Optimization of Micromachined Structures with the Manufacturing Constraints of KOH Etching of (110) Silicon

The focus of this paper is on designing useful compliant micro-mechanisms of high-aspect-ratio which can be microfabricated by the cost-effective wet etching of (110) orientation silicon (Si) wafers. Wet etching of (110) Si imposes constraints on the geometry of the realized mechanisms because it allows only etch-through in the form of slots parallel to the wafer's flat with a certain minimum length. In this paper, we incorporate this constraint in the topology optimization and obtain compliant designs that meet the specifications on the desired motion for given input forces. Using this design technique and wet etching, we show that we can realize high-aspect-ratio compliant micro-mechanisms. For a (110) Si wafer of 250 µm thickness, the minimum length of the etch opening to get a slot is found to be 866 µm. The minimum achievable width of the slot is limited by the resolution of the lithography process and this can be a very small value. This is studied by conducting trials with different mask layouts on a (110) Si wafer. These constraints are taken care of by using a suitable design parameterization rather than by imposing the constraints explicitly. Topology optimization, as is well known, gives designs using only the essential design specifications. In this work, we show that our technique also gives manufacturable mechanism designs along with lithography mask layouts. Some designs obtained are transferred to lithography masks and mechanisms are fabricated on (110) Si wafers.

Mutual inhibition and capacity sharing during parallel preparation of serial eye movements

Many common activities, like reading, scanning scenes, or searching for an inconspicuous item in a cluttered environment, entail serial movements of the eyes that shift the gaze from one object to another. Previous studies have shown that the primate brain is capable of programming sequential saccadic eye movements in parallel. Given that the onset of saccades directed to a target are unpredictable in individual trials, what prevents a saccade during parallel programming from being executed in the direction of the second target before execution of another saccade in the direction of the first target remains unclear. Using a computational model, here we demonstrate that sequential saccades inhibit each other and share the brain's limited processing resources (capacity) so that the planning of a saccade in the direction of the first target always finishes first. In this framework, the latency of a saccade increases linearly with the fraction of capacity allocated to the other saccade in the sequence, and exponentially with the duration of capacity sharing. Our study establishes a link between the dual-task paradigm and the ramp-to-threshold model of response time to identify a physiologically viable mechanism that preserves the serial order of saccades without compromising the speed of performance.

A spring-mass-lever model, stiffness and inertia maps for single-input, single-output compliant mechanisms

A spring-mass-lever (SML) model is introduced in this paper for a single-input-single-output compliant mechanism to capture its static and dynamic behavior. The SML model is a reduced-order model, and its five parameters provide physical insight and quantify the stiffness and inertia(1) at the input and output ports as well as the transformation of force and displacement between the input and output. The model parameters can be determined with reasonable accuracy without performing dynamic or modal analysis. The paper describes two uses of the SML model: computationally efficient analysis of a system of which the compliant mechanism is a part; and design of compliant mechanisms for the given user-specifications. During design, the SML model enables determining the feasible parameter space of user-specified requirements, assessing the suitability of a compliant mechanism to meet the user-specifications and also selecting and/or re-designing compliant mechanisms from an existing database. Manufacturing constraints, material choice, and other practical considerations are incorporated into this methodology. A micromachined accelerometer and a valve mechanism are used as examples to show the effectiveness of the SML model in analysis and design. (C) 2012 Published by Elsevier Ltd.

A Compact and Compliant External Pipe-Crawling Robot

The focus of this paper is on the practical aspects of design, prototyping, and testing of a compact, compliant external pipe-crawling robot that can inspect a closely spaced bundle of pipes in hazardous environments and areas that are inaccessible to humans. The robot consists of two radially deployable compliant ring actuators that are attached to each other along the longitudinal axis of the pipe by a bidirectional linear actuator. The robot imitates the motion of an inchworm. The novel aspect of the compliant ring actuator is a spring-steel compliant mechanism that converts circumferential motion to radial motion of its multiple gripping pads. Circumferential motion to ring actuators is provided by two shape memory alloy (SMA) wires that are guided by insulating rollers. The design of the compliant mechanism is derived from a radially deployable mechanism. A unique feature of the design is that the compliant mechanism provides the necessary kinematic function within the limited annular space around the pipe and serves as the bias spring for the SMA wires. The robot has a control circuit that sequentially activates the SMA wires and the linear actuator; it also controls the crawling speed. The robot has been fabricated, tested, and automated. Its crawling speed is about 45 mm/min, and the weight is about 150 g. It fits within an annular space of a radial span of 15 mm to crawl on a pipe of 60-mm outer diameter.

Analysis of the degrees-of-freedom of spatial parallel manipulators in regular and singular configurations

This paper presents a study of the nature of the degrees-of-freedom of spatial manipulators based on the concept of partition of degrees-of-freedom. In particular, the partitioning of degrees-of-freedom is studied in five lower-mobility spatial parallel manipulators possessing different combinations of degrees-of-freedom. An extension of the existing theory is introduced so as to analyse the nature of the gained degree(s)-of-freedom at a gain-type singularity. The gain of one- and two-degrees-of-freedom is analysed in several well-studied, as well as newly developed manipulators. The formulations also present a basis for the analysis of the velocity kinematics of manipulators of any architecture. (C) 2013 Elsevier Ltd. All rights reserved.

Design of a Portable Compliant Device for Estimating the Failure-Load of Mesoscale Cemented Sand Specimens

In this paper, we present the design and development of a portable, hand-operated composite compliant mechanism for estimating the failure-load of cm-sized stiff objects whose stiffness is of the order of 10 s of kN/m. The motivation for the design comes from the need to estimate the failure-load of mesoscale cemented sand specimens in situ, which is not possible with traditional devices used for large specimens or very small specimens. The composite compliant device, developed in this work, consists of two compliant mechanisms: a force-amplifying compliant mechanism (FaCM) to amplify sufficiently the force exerted by hand in order to break the specimen and a displacement-amplifying compliant mechanism (DaCM) to enable measurement of the force using a proximity sensor. The two mechanisms are designed using the selection-maps technique to amplify the force up to 100N by about a factor of 3 and measure the force with a resolution of 15 mN. The composite device, made using a FaCM, a DaCM, and a Hall effect-based proximity sensor, was tested on mesoscale cemented sand specimens that were 10mm in diameter and 20mm in length. The results are compared with those of a large commercial instrument. Through the experiments, it was observed that the failure-load of the cemented sand specimens varied from 0.95N to 24.33 N, depending on the percentage of cementation and curing period. The estimation of the failure-load using the compliant device was found to be within 1.7% of the measurements obtained using the commercial instrument and thus validating the design. The details of the design, prototyping, specimen preparation, testing, and the results comprise the paper.

Micro-scale composite compliant mechanisms for evaluating the bulk stiffness of MCF-7 cells

Biomechanical assays offer a good alternative to biochemical assays in diagnosing disease states and assessing the efficacy of drugs. In view of this, we have developed a miniature compliant tool to estimate the bulk stiffness of cells, particularly MCF-7 (Michigan Cancer Foundation) cells whose diameter is 12-15 mu m in suspension. The compliant tool comprises a gripper and a displacement-amplifying compliant mechanism (DaCM), where the former helps in grasping the cell and the latter enables vision-based force-sensing. A DaCM is necessary because the microscope's field of view at the required magnification is not sufficient to simultaneously observe the cell and the movement of a point on the gripper, in order to estimate the force. Therefore, a DaCMis strategically embedded within an existing gripper design leading to a composite compliant mechanism. The DaCM is designed using the kinetoelastostatic map technique to achieve a 42 nN resolution of the force. The gripper, microfabricated with SU-8 using photolithography, is within the footprint of about 10 mm by 10 mm with the smallest feature size of about 5 mu m. The experiments with MCF-7 cells suggest that the bulk stiffness of these is in the range of 8090 mN/m. The details of design, prototyping and testing comprise the paper. (C) 2015 Elsevier Ltd. All rights reserved.

NON-DIMENSIONAL KINETOELASTOSTATIC MAPS FOR COMPLIANT MECHANISMS

How do we assess the capability of a compliant mechanism of given topology and shape? The kinetoelastostatic maps proposed in this paper help answer this question. These maps are drawn in 2D using two non-dimensional quantities, one capturing the nonlinear static response and the other the geometry, material, and applied forces. Geometrically nonlinear finite element analysis is used to create the maps for compliant mechanisms consisting of slender beams. In addition to the topology and shape, the overall proportions and the proportions of the cross-sections of the beam segments are kept fixed for a map. The finite region of the map is parameterized using a non-dimensional quantity defined as the slenderness ratio. The shape and size of the map and the parameterized curves inside it indicate the complete kinetoelastostatic capability of the corresponding compliant mechanism of given topology, shape, and fixed proportions. Static responses considered in this paper include input/output displacement, geometric amplification, mechanical advantage, maximum stress, etc. The maps can be used to compare mechanisms, to choose a suitable mechanism for an application, or re-design as may be needed. The usefulness of the non-dimensional maps is presented with multiple applications of different variety. Non-dimensional portrayal of snap-through mechanisms is one such example. The effect of the shape of the cross-section of the beam segments and the role of different segments in the mechanism as well as extension to 3D compliant mechanisms, the cases of multiple inputs and outputs, and moment loads are also explained. The effects of disproportionate changes on the maps are also analyzed.

Singularity-free path planning for the Stewart platform manipulator

This paper addresses the problem of singularity-free path planning for the six-degree-of-freedom parallel manipulator known as the Stewart platform manipulator. Unlike serial manipulators, the Stewart platform possesses singular configurations within the workspace where the manipulator is uncontrollable. An algorithm has been developed to construct continuous paths within the workspace of the manipulator by avoiding singularities and ill-conditioning. Given two end-poses of the manipulator, the algorithm finds out safe (well-conditioned) via points and plans a continuous path from the initial pose to the final one. When the two end-poses belong to different branches and no singularity-free path is possible, the algorithm indicates the impossibility of a valid path. A numerical example has also been presented as illustration of the path planning strategy.

A New Mechanism For Ferromagnetism In C-60-TDAE

Based on the topology of C-60 and the resulting non-disjoint nature of the lowest unoccupied molecular orbitals, Ne propose a new model for ferromagnetic exchange in C-60-TDAE. Within the Hubbard model, we find that the ferromagnetic exchange integral is stabilized to first order in the inter-ball transfer integral, while the antiferromagnetic coupling is stabilized only to second order. This difference is adequate to counter the larger phase space available for stabilizing the antiferromagnetic state. Thus, the ground state is found to be ferromagnetic for reasonable inter-ball transfer integrals.

Unsteady-Flow Of A Viscous-Fluid Between 2 Parallel Disks With A Time-Varying Gap Width And A Magnetic-Field

The unsteady incompressible viscous fluid flow between two parallel infinite disks which are located at a distance h(t*) at time t* has been studied. The upper disk moves towards the lower disk with velocity h'(t*). The lower disk is porous and rotates with angular velocity Omega(t*). A magnetic field B(t*) is applied perpendicular to the two disks. It has been found that the governing Navier-Stokes equations reduce to a set of ordinary differential equations if h(t*), a(t*) and B(t*) vary with time t* in a particular manner, i.e. h(t*) = H(1 - alpha t*)(1/2), Omega(t*) = Omega(0)(1 - alpha t*)(-1), B(t*) = B-0(1 - alpha t*)(-1/2). These ordinary differential equations have been solved numerically using a shooting method. For small Reynolds numbers, analytical solutions have been obtained using a regular perturbation technique. The effects of squeeze Reynolds numbers, Hartmann number and rotation of the disk on the flow pattern, normal force or load and torque have been studied in detail

Diffraction Of Elastic Waves By Two Parallel Rigid Strips Embedded In An Infinite Orthotropic Medium

The elastodynamic response of a pair of parallel rigid strips embedded in an infinite orthotropic medium due to elastic waves incident normally on the strips has been investigated. The mixed boundary value problem has been solved by the Integral Equation method. The normal stress and the vertical displacement have been derived in closed form. Numerical values of stress intensity factors at inner and outer edges of the strips and vertical displacement at points in the plane of the strips for several orthotropic materials have been calculated and plotted graphically to show the effect of material orthotropy.

Thermal Degradation Processes in Poly(xylylene sulfides) Investigated by Comparative Direct Pyrolysis MS and Flash Pyrolysis GC/MS Experiments

The thermal degradation processes of two sulfur polymers, poly(xylylene sulfide) (PXM) and poly(xylylene disulfide) (PXD), were investigated in parallel by direct pyrolysis mass spectrometry (DPMS) and flash pyrolysis GC/MS (Py-GC/MS). Thermogravimetric data showed that these polymers decompose with two separate steps in the temperature ranges of 250-280 and 600-650 degrees C, leaving a high amount of residue (about 50% at 800 degrees C). The pyrolysis products detected by DPMS in the first degradation step of PXM and PXD were terminated by three types of end groups, -CH3, -CH2SH, and -CH=S, originating from thermal cleavage reactions involving a series of homolytic chain scissions followed by hydrogen transfer reactions, generating several oligomers containing some intact xylylene sulfide repeating units. The presence of pyrolysis compounds containing some stilbene-like units in the first degradation step has also been observed. Their formation has been accounted for with a parallel cleavage involving the elimination of H2S from the PXM main chains. These unsaturated units can undergo cross-linking at higher temperatures, producing the high amount of char residue observed. The thermal degradation compounds detected by DPMS in the second decomposition step at about 600-650 degrees C were constituted of condensed aromatic molecules containing dihydrofenanthrene and fenanthrene units. These compounds might be generated from the polymer chains containing stilbene units, by isomerization and dehydrogenation reactions. The pyrolysis products obtained in the Py-GC/MS of PXM and PXD at 610 degrees C are almost identical. The relative abundance in the pyrolysate and the spectral properties of the main pyrolysis products were found to be in generally good agreement with those obtained by DPMS. Polycyclic aromatic hydrocarbons (PAHs) were also detected by Py-GC/MS but in minor amounts with respect to DPMS. This apparent discrepancy was due to the simultaneous detection of PAHs together with all pyrolysis products in the Py-GC/MS, whereas in DPMS they were detected in the second thermal degradation step without the greatest part of pyrolysis compounds generated in the first degradation step. The results obtained by DPMS and PSI-GC/MS experiments showed complementary data for the degradation of PXM and PXD and, therefore, allowed the unequivocal formulation of the thermal degradation mechanism for these sulfur-containing polymers.

The Parallel Complexity Of Propagation In Boolean Circuits

We consider the problem of deciding whether the output of a boolean circuit is determined by a partial assignment to its inputs. This problem is easily shown to be hard, i.e., co-Image Image -complete. However, many of the consequences of a partial input assignment may be determined in linear time, by iterating the following step: if we know the values of some inputs to a gate, we can deduce the values of some outputs of that gate. This process of iteratively deducing some of the consequences of a partial assignment is called propagation. This paper explores the parallel complexity of propagation, i.e., the complexity of determining whether the output of a given boolean circuit is determined by propagating a given partial input assignment. We give a complete classification of the problem into those cases that are Image -complete and those that are unlikely to be Image complete.

An eigenproblem approach to classical screw theory

This paper presents a novel algebraic formulation of the central problem of screw theory, namely the determination of the principal screws of a given system. Using the algebra of dual numbers, it shows that the principal screws can be determined via the solution of a generalised eigenproblem of two real, symmetric matrices. This approach allows the study of the principal screws of the general two-, three-systems associated with a manipulator of arbitrary geometry in terms of closed-form expressions of its architecture and configuration parameters. We also present novel methods for the determination of the principal screws for four-, five-systems which do not require the explicit computation of the reciprocal systems. Principal screws of the systems of different orders are identified from one uniform criterion, namely that the pitches of the principal screws are the extreme values of the pitch.The classical results of screw theory, namely the equations for the cylindroid and the pitch-hyperboloid associated with the two-and three-systems, respectively have been derived within the proposed framework. Algebraic conditions have been derived for some of the special screw systems. The formulation is also illustrated with several examples including two spatial manipulators of serial and parallel architecture, respectively.