Topology Optimization of Micromachined Structures with the Manufacturing Constraints of KOH Etching of (110) Silicon

The focus of this paper is on designing useful compliant micro-mechanisms of high-aspect-ratio which can be microfabricated by the cost-effective wet etching of (110) orientation silicon (Si) wafers. Wet etching of (110) Si imposes constraints on the geometry of the realized mechanisms because it allows only etch-through in the form of slots parallel to the wafer's flat with a certain minimum length. In this paper, we incorporate this constraint in the topology optimization and obtain compliant designs that meet the specifications on the desired motion for given input forces. Using this design technique and wet etching, we show that we can realize high-aspect-ratio compliant micro-mechanisms. For a (110) Si wafer of 250 µm thickness, the minimum length of the etch opening to get a slot is found to be 866 µm. The minimum achievable width of the slot is limited by the resolution of the lithography process and this can be a very small value. This is studied by conducting trials with different mask layouts on a (110) Si wafer. These constraints are taken care of by using a suitable design parameterization rather than by imposing the constraints explicitly. Topology optimization, as is well known, gives designs using only the essential design specifications. In this work, we show that our technique also gives manufacturable mechanism designs along with lithography mask layouts. Some designs obtained are transferred to lithography masks and mechanisms are fabricated on (110) Si wafers.

REDEFINE: Architecture of a SoC Fabric for Runtime Composition of Computation Structures

In this paper we propose the architecture of a SoC fabric onto which applications described in a HLL are synthesized. The fabric is a homogeneous layout of computation, storage and communication resources on silicon. Through a process of composition of resources (as opposed to decomposition of applications), application specific computational structures are defined on the fabric at runtime to realize different modules of the applications in hardware. Applications synthesized on this fabric offers performance comparable to ASICs while retaining the programmability of processing cores. We outline the application synthesis methodology through examples, and compare our results with software implementations on traditional platforms with unbounded resources.

Health Monitoring Of Composite Structures Based On Acoustic Wave Sensing Using Fiber Optic Sensors

Structural Health Monitoring has gained wide acceptance in the recent past as a means to monitor a structure and provide an early warning of an unsafe condition using real-time data. Utilization of structurally integrated, distributed sensors to monitor the health of a structure through accurate interpretation of sensor signals and real-time data processing can greatly reduce the inspection burden. The rapid improvement of the Fiber Optic Sensor technology for strain, vibration, ultrasonic and acoustic emission measurements in recent times makes it feasible alternative to the traditional strain gauges, PVDF and conventional Piezoelectric sensors used for Non Destructive Evaluation (NDE) and Structural Health Monitoring (SHM). Optical fiber-based sensors offer advantages over conventional strain gauges, and PZT devices in terms of size, ease of embedment, immunity from electromagnetic interference (EMI) and potential for multiplexing a number of sensors. The objective of this paper is to demonstrate the acoustic wave sensing using Extrinsic Fabry-Perot Interferometric (EFPI) sensor on a GFRP composite laminates. For this purpose experiments have been carried out initially for strain measurement with Fiber Optic Sensors on GFRP laminates with intentionally introduced holes of different sizes as defects. The results obtained from these experiments are presented in this paper. Numerical modeling has been carried out to obtain the relationship between the defect size and strain.

Active Vibration Suppression of One-dimensional Nonlinear Structures Using Optimal Dynamic Inversion

A flexible robot arm can be modeled as an Euler-Bernoulli beam which are infinite degrees of freedom (DOF) system. Proper control is needed to track the desired motion of a robotic arm. The infinite number of DOF of beams are reduced to finite number for controller implementation, which brings in error (due to their distributed nature). Therefore, to represent reality better distributed parameter systems (DPS) should be controlled using the systems partial differential equation (PDE) directly. In this paper, we propose to use a recently developed optimal dynamic inversion technique to design a controller to suppress nonlinear vibration of a beam. The method used in this paper determines control forces directly from the PDE model of the system. The formulation has better practical significance, because it leads to a closed form solution of the controller (hence avoids computational issues).