Plasma diagnostics and ITO film deposition by RF-assisted closed-field dual magnetron system

Deposition of indium tin oxide (ITO) among various transparent conductive materials on flexible organic substrates has been intensively investigated among academics and industrials for a whole new array of imaginative optoelectronic products. One critical challenge coming with the organic materials is their poor thermal endurances, considering that the process currently used to produce industry-standard ITO usually involves relatively high substrate temperature in excess of 200°C and post-annealing. A lower processing temperature is thus demanded, among other desires of high deposition rate, large substrate area, good uniformity, and high quality of the deposited materials. For this purpose, we developed an RF-assisted closed-field dual magnetron sputtering system. The “prototype” system consists of a 3-inch unbalanced dual magnetron operated at a closed-field configuration. An RF coil was fabricated and placed between the two magnetron cathodes to initiate a secondary plasma. The concept is to increase the ionization faction with the RF enhancement and utilize the ion energy instead of thermal energy to facilitate the ITO film growth. The closed-field unbalanced magnetrons create a plasma in the intervening region rather than confine it near the target, thus achieving a large-area processing capability. An RF-compensated Langmuir probe was used to characterize and compare the plasmas in mirrored balanced and closed-field unbalanced magnetron configurations. The spatial distributions of the electron density ne and electron temperature Te were measured. The density profiles reflect the shapes of the plasma. Rather than intensively concentrated to the targets/cathodes in the balanced magnetrons, the plasma is more dispersive in the closed-field mode with a twice higher electron density in the substrate region. The RF assistance significantly enhances ne by one or two orders of magnitude higher. The effect of various other parameters, such as pressure, on the plasma was also studied. The ionization fractions of the sputtered atoms were measured using a gridded energy analyzer (GEA) combined with a quartz crystal microbalance (QCM). The presence of the RF plasma effectively increases the ITO ionization fraction to around 80% in both the balanced and closed-field unbalanced configurations. The ionization fraction also varies with pressure, maximizing at 5-10 mTorr. The study of the ionization not only facilitates understanding the plasma behaviors in the RF-assisted magnetron sputtering, but also provides a criterion for optimizing the film deposition process. ITO films were deposited on both glass and plastic (PET) substrates in the 3-inch RF-assisted closed-field magnetrons. The electrical resistivity and optical transmission transparency of the ITO films were measured. Appropriate RF assistance was shown to dramatically reduce the electrical resistivity. An ITO film with a resistivity of 1.2×10-3 Ω-cm and a visible light transmittance of 91% was obtained with a 225 W RF enhancement, while the substrate temperature was monitored as below 110°C. X-ray photoelectron spectroscopy (XPS) was employed to confirm the ITO film stoichiometry. The surface morphology of the ITO films and its effect on the film properties were studied using atomic force microscopy (AFM). The prototype of RF-assisted closed-field magnetron was further extended to a larger rectangular shaped dual magnetron in a flat panel display manufacturing system. Similar improvement of the ITO film conductivities by the auxiliary RF was observed on the large-area PET substrates. Meanwhile, significant deposition rates of 25-42 nm/min were achieved.

Studies of turbulent flows in continuous casting of steel with and without magnetic field

This thesis develops and tests various transient and steady-state computational models such as direct numerical simulation (DNS), large eddy simulation (LES), filtered unsteady Reynolds-averaged Navier-Stokes (URANS) and steady Reynolds-averaged Navier-Stokes (RANS) with and without magnetic field to investigate turbulent flows in canonical as well as in the nozzle and mold geometries of the continuous casting process. The direct numerical simulations are first performed in channel, square and 2:1 aspect rectangular ducts to investigate the effect of magnetic field on turbulent flows. The rectangular duct is a more practical geometry for continuous casting nozzle and mold and has the option of applying magnetic field either perpendicular to broader side or shorter side. This work forms the part of a graphic processing unit (GPU) based CFD code (CU-FLOW) development for magnetohydrodynamic (MHD) turbulent flows. The DNS results revealed interesting effects of the magnetic field and its orientation on primary, secondary flows (instantaneous and mean), Reynolds stresses, turbulent kinetic energy (TKE) budgets, momentum budgets and frictional losses, besides providing DNS database for two-wall bounded square and rectangular duct MHD turbulent flows. Further, the low- and high-Reynolds number RANS models (k-ε and Reynolds stress models) are developed and tested with DNS databases for channel and square duct flows with and without magnetic field. The MHD sink terms in k- and ε-equations are implemented as proposed by Kenjereš and Hanjalić using a user defined function (UDF) in FLUENT. This work revealed varying accuracies of different RANS models at different levels. This work is useful for industry to understand the accuracies of these models, including continuous casting. After realizing the accuracy and computational cost of RANS models, the steady-state k-ε model is then combined with the particle image velocimetry (PIV) and impeller probe velocity measurements in a 1/3rd scale water model to study the flow quality coming out of the well- and mountain-bottom nozzles and the effect of stopper-rod misalignment on fluid flow. The mountain-bottom nozzle was found more prone to the longtime asymmetries and higher surface velocities. The left misalignment of stopper gave higher surface velocity on the right leading to significantly large number of vortices forming behind the nozzle on the left. Later, the transient and steady-state models such as LES, filtered URANS and steady RANS models are combined with ultrasonic Doppler velocimetry (UDV) measurements in a GaInSn model of typical continuous casting process. LES-CU-LOW is the fastest and the most accurate model owing to much finer mesh and a smaller timestep. This work provided a good understanding on the performance of these models. The behavior of instantaneous flows, Reynolds stresses and proper orthogonal decomposition (POD) analysis quantified the nozzle bottom swirl and its importance on the turbulent flow in the mold. Afterwards, the aforementioned work in GaInSn model is extended with electromagnetic braking (EMBr) to help optimize a ruler-type brake and its location for the continuous casting process. The magnetic field suppressed turbulence and promoted vortical structures with their axis aligned with the magnetic field suggesting tendency towards 2-d turbulence. The stronger magnetic field at the nozzle well and around the jet region created large scale and lower frequency flow behavior by suppressing nozzle bottom swirl and its front-back alternation. Based on this work, it is advised to avoid stronger magnetic field around jet and nozzle bottom to get more stable and less defect prone flow.

Examining the growth and evolution of magnetic fields in clusters of galaxies: a numerical perspective

Magnetic fields are ubiquitous in galaxy cluster atmospheres and have a variety of astrophysical and cosmological consequences. Magnetic fields can contribute to the pressure support of clusters, affect thermal conduction, and modify the evolution of bubbles driven by active galactic nuclei. However, we currently do not fully understand the origin and evolution of these fields throughout cosmic time. Furthermore, we do not have a general understanding of the relationship between magnetic field strength and topology and other cluster properties, such as mass and X-ray luminosity. We can now begin to answer some of these questions using large-scale cosmological magnetohydrodynamic (MHD) simulations of the formation of galaxy clusters including the seeding and growth of magnetic fields. Using large-scale cosmological simulations with the FLASH code combined with a simplified model of the acceleration of cosmic rays responsible for the generation of radio halos, we find that the galaxy cluster frequency distribution and expected number counts of radio halos from upcoming low-frequency sur- veys are strongly dependent on the strength of magnetic fields. Thus, a more complete understanding of the origin and evolution of magnetic fields is necessary to understand and constrain models of diffuse synchrotron emission from clusters. One favored model for generating magnetic fields is through the amplification of weak seed fields in active galactic nuclei (AGN) accretion disks and their subsequent injection into cluster atmospheres via AGN-driven jets and bubbles. However, current large-scale cosmological simulations cannot directly include the physical processes associated with the accretion and feedback processes of AGN or the seeding and merging of the associated SMBHs. Thus, we must include these effects as subgrid models. In order to carefully study the growth of magnetic fields in clusters via AGN-driven outflows, we present a systematic study of SMBH and AGN subgrid models. Using dark-matter only cosmological simulations, we find that many important quantities, such as the relationship between SMBH mass and galactic bulge velocity dispersion and the merger rate of black holes, are highly sensitive to the subgrid model assumptions of SMBHs. In addition, using MHD calculations of an isolated cluster, we find that magnetic field strengths, extent, topology, and relationship to other gas quantities such as temperature and density are also highly dependent on the chosen model of accretion and feedback. We use these systematic studies of SMBHs and AGN inform and constrain our choice of subgrid models, and we use those results to outline a fully cosmological MHD simulation to study the injection and growth of magnetic fields in clusters of galaxies. This simulation will be the first to study the birth and evolution of magnetic fields using a fully closed accretion-feedback cycle, with as few assumptions as possible and a clearer understanding of the effects of the various parameter choices.