Topographic optical profilometry of steep slope micro-optical transparent surfaces

Optical profilometers based on light reflection may fail at surfaces presenting steep slopes and highly curved features. Missed light, interference and diffraction at steps, peaks and valleys are some of the reasons. Consequently, blind areas or profile artifacts may be observed when using common reflection micro-optical profilometers (confocal, scanning interferometers, etc…). The Topographic Optical Profilometry by Absorption in Fluids (TOPAF) essentially avoids these limitations. In this technique an absorbing fluid fills the gap between a reference surface and the surface to profile. By comparing transmission images at two different spectral bands we obtain a reliable topographic map of the surface. In this contribution we develop a model to obtain the profile under micro-optical observation, where high numerical aperture (NA) objectives are mandatory. We present several analytical and experimental results, validating the technique’s capabilities for profiling steep slopes and highly curved micro-optical surfaces with nanometric height resolution.

SAFARI optical system architecture and design concept

SpicA FAR infrared Instrument, SAFARI, is one of the instruments planned for the SPICA mission. The SPICA mission is the next great leap forward in space-based far-infrared astronomy and will study the evolution of galaxies, stars and planetary systems. SPICA will utilize a deeply cooled 2.5m-class telescope, provided by European industry, to realize zodiacal background limited performance, and high spatial resolution. The instrument SAFARI is a cryogenic grating-based point source spectrometer working in the wavelength domain 34 to 230 μm, providing spectral resolving power from 300 to at least 2000. The instrument shall provide low and high resolution spectroscopy in four spectral bands. Low Resolution mode is the native instrument mode, while the high Resolution mode is achieved by means of a Martin-Pupplet interferometer. The optical system is all-reflective and consists of three main modules; an input optics module, followed by the Band and Mode Distributing Optics and the grating Modules. The instrument utilizes Nyquist sampled filled linear arrays of very sensitive TES detectors. The work presented in this paper describes the optical design architecture and design concept compatible with the current instrument performance and volume design drivers.