Topographic optical profilometry of steep slope micro-optical transparent surfaces

Optical profilometers based on light reflection may fail at surfaces presenting steep slopes and highly curved features. Missed light, interference and diffraction at steps, peaks and valleys are some of the reasons. Consequently, blind areas or profile artifacts may be observed when using common reflection micro-optical profilometers (confocal, scanning interferometers, etc…). The Topographic Optical Profilometry by Absorption in Fluids (TOPAF) essentially avoids these limitations. In this technique an absorbing fluid fills the gap between a reference surface and the surface to profile. By comparing transmission images at two different spectral bands we obtain a reliable topographic map of the surface. In this contribution we develop a model to obtain the profile under micro-optical observation, where high numerical aperture (NA) objectives are mandatory. We present several analytical and experimental results, validating the technique’s capabilities for profiling steep slopes and highly curved micro-optical surfaces with nanometric height resolution.

Light losses in hollow, prismatic light guides related to prim defects: a transmittance model

Hollow, cylindrical, prismatic light guides (CPLGs) are optical components that, using total internal reflection (TIR), are able to transmit high-diameter light beams in daylight and artificial lighting applications without relevant losses. It is necessary to study the prism defects of their surfaces to quantify the behavior of these optical components. In this Letter, we analyze a CPLG made of a transparent dielectric material. Scanning electron microscopy (SEM) and the topographic optical profilometry by absorption in fluids (TOPAF) imaging technique are conducted to determine if there are defects in the corners of the prisms. A model for light guide transmittance that is dependent on prism defects is proposed. Finally, a simulation and an experimental study are carried out to check the validity of the proposed model.