3D-form metrology of arbitrary optical surfaces by absorption in fluids

We present an imaging technique for the 3D-form metrology of optical surfaces. It is based on the optical absorption in fluids situated between the surface and a reference. An improved setup with a bi-chromatic light source is fundamental to obtain reliable topographic maps. It is able to measure any surface finish (rough or polished), form and slope and independently of scale. We present results focused on flat and spherical optical surfaces, arrays of lenses and with different surface finish (rough-polished). We achieve form accuracies from several nanometers to sub-lambda for sag departures from tens to hundred of microns. Therefore, it seems suitable for the quality control in the production of precision aspheric, freeform lenses and other complex shapes on transparent substrates, independently of the surface finish.

Topographic optical profilometry of steep slope micro-optical transparent surfaces

Optical profilometers based on light reflection may fail at surfaces presenting steep slopes and highly curved features. Missed light, interference and diffraction at steps, peaks and valleys are some of the reasons. Consequently, blind areas or profile artifacts may be observed when using common reflection micro-optical profilometers (confocal, scanning interferometers, etc…). The Topographic Optical Profilometry by Absorption in Fluids (TOPAF) essentially avoids these limitations. In this technique an absorbing fluid fills the gap between a reference surface and the surface to profile. By comparing transmission images at two different spectral bands we obtain a reliable topographic map of the surface. In this contribution we develop a model to obtain the profile under micro-optical observation, where high numerical aperture (NA) objectives are mandatory. We present several analytical and experimental results, validating the technique’s capabilities for profiling steep slopes and highly curved micro-optical surfaces with nanometric height resolution.