Resonant elements contactless coupled to bolometric micro-stripes

One of the main technical difficulties in the fabrication of optical antennas working as light detectors is the proper design and manufacture of auxiliary elements as load lines and signal extraction structures. These elements need to be quite small to reach the location of the antennas and should have a minimal effect on the response of the device. Unfortunately this is not an easy task and signal extraction lines resonate along with the antenna producing a complex signal that usually masks the one given by the antenna. In order to decouple the resonance from the transduction we present in this contribution a parametric analysis of the response of a bolometric stripe that is surrounded by resonant dipoles with different geometries and orientations. We have checked that these elements should provide a signal proportional to the polarization state of the incoming light.

Micromachined silicon lenses for terahertz applications

Silicon microlenses are a very important tool for coupling terahertz (THz) radiation into antennas and detectors in integrated circuits. They can be used in a large array structures at this frequency range reducing considerably the crosstalk between the pixels. Drops of photoresist have been deposited and their shape transferred into the silicon by means of a Reactive Ion Etching (RIE) process. Large silicon lenses with a few mm diameter (between 1.5 and 4.5 mm) and hundreds of μm height (between 50 and 350 μm) have been fabricated. The surface of such lenses has been characterized using Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM), resulting in a surface roughness of about ∼3 μm, good enough for any THz application. The beam profile at the focal plane of such lenses has been measured at a wavelength of 10.6 μm using a tomographic knife-edge technique and a CO2 laser.