Tentative analysis of Swirl defects in silicon crystals

Swirl defects in dislocation-free Czochralski (CZ) silicon crystals have been investigated by preferential etching, transmission electron microscopy (TER I) and electron energy loss spectroscopy (EELS) mode of a scanning transmission electron microscope (STEM). Two kinds of Swirl defects have been found with a good correspondence between striated pattern consisting of hillocks and the buried micro-defects. The Swirl defects were identified as perfect dislocation loop cluster and tetrahedral precipitate, respectively. In addition, a kind of tiny micro-defects is found to be distributed preferentially in the vicinity of the Swirl pattern although there is no detectable correspondence between hillocks and the micro-defects. The energy-filtered images have been obtained by the plasma peaks at different parts of a coherent precipitate with the Si matrix. The experimental results show some indications of the existence of oxygen and carbon in the core of the precipitate and suggest that oxygen and carbon may play important roles in the formation of Swirl defect. (C) 2000 Elsevier Science B.V. All rights reserved.

Studies of the Effect of a Coal Concentrator on NO Formation in Swirling Coal Combustion

To develop low-pollution burners, the effect of a coal concentrator on NO formation in swirling coal combustion is studied using both numerical simulation and experiments. The isothermal gas-particle two-phase velocities and particle concentration in a cold model of swirl burners with and without coal concentrators were measured using the phase Doppler particle anemometer (PDPA). A full two-fluid model of reacting gas-particle flows and coal combustion with an algebraic unified second-order moment (AUSM) turbulence-chemistry model for the turbulent reaction rate of NO formation are used to simulate swirling coal combustion and NO formation with different coal concentrators. The results give the turbulent kinetic energy, particle concentration, temperature and NO concentration in cases of with and without coal concentrators. The predicted results for cold two-phase flows are in good agreement with the PDPA measurement results, showing that the coal concentrator increases the turbulence and particle concentration in the recirculation zone. The combustion modeling results indicate that although the coal concentrator increases the turbulence and combustion temperature, but still can remarkably reduce the NO formation due to creating high coal concentration in the recirculation zone.

Operational Optimization of GaN Thin Film Growth Employing Numerical Simulation in a Showerhead MOCVD Reactor

A detailed reaction-tran sport model was studied in a showerhead reactor for metal organic chemical vapor deposition of GaN film by using computational fluid dynamics simulation. It was found that flat flow lines without swirl are crucial to improve the uniformity of the film growth, and thin temperature gradient above the suscptor can increase the film deposition rate. By above-mentioned research, we can employ higher h (the distance from the susceptor to the inlet), P (operational pressure) and the rate of susceptor rotation to improve the film growth.