照明光瞳非对称性对光刻成像质量的影响

研究了照明光瞳非对称性对光刻成像质量的影响。通过PROLITH软件计算了环形与四极照明条件下，光瞳非对称性对图形位置偏移量、曝光图形内水平线条与垂直线条的宽度差、曝光图形上密集线条与孤立线条之间线宽偏差的影响。研究结果表明，光瞳非对称性主要影响曝光图形的位置偏移量，光瞳非对称性引起的图形位置偏移量与光瞳非对称性的大小成线性关系。根据套刻精度的误差分配原则，计算得到光瞳非对称性的容限为5％。

Effect of La3+ on microwave dielectric properties of (Pb0.45Ca0.55) (Fe0.5Nb0.5)O-3 ceramics

In this work, microwave dielectric properties of A-site substitution by La3+ in (Pb0.45Ca0.55) (Fe0.5Nb0.5) 03 system were investigated. Microwave dielectric properties of A-site charge unbalance substitution of [(Pb0.45Ca0.55)(1-x) La-x] (Fe0.5Nb0.5)O-3(+) (P45CLFN) were improved because the solid solution of small amount of surplus La3+ with (Pb, Ca)(2+) could eliminate oxygen vacancies, and the formation of secondary phase (pyrochlore) was also caused by surplus La3+. The decreasing of dielectric constant with the increase of La3+ content is due to the formation of pyrochlore. The grain size is changed slightly and Q(f) values (7000 similar to 7300 GHz) are almost unchanged at x = 0.02 similar to 0.10, but the temperature coefficient of resonant frequency (TCF) are increased and changed from negative to positive. TCF is zero at x 0.075 with Q(f) = 7267 GHz and K = 89. TCF of all specimens are within +/- 5 x 10(-6)degrees C-1.

单元重构问题探讨

在 CIMS 环境下,采用虚拟单元技术可以解决使用成组单元的结构中出现的过量跨单元加工和加工负荷不平衡问题.本文对实现虚拟单元的关键技术——单元重构的可行性进行了分析,对单元重构的两个主要过程,即任务的时间分解过程和任务的空间分解过程进行了详细的讨论,并对所涉及到的时间划分、计划调度、工件、机器成组等问题给出了相应的策略和算法.从而证明了在 CIMS 环境下实现虚拟单元的可行性.