Coma measurement of projection optics in lithographic tools based on relative image displacements at multiple illumination settings

In this paper, we propose a novel method for measuring the coma aberrations of lithographic projection optics based on relative image displacements at multiple illumination settings. The measurement accuracy of coma can be improved because the phase-shifting gratings are more sensitive to the aberrations than the binary gratings used in the TAMIS technique, and the impact of distortion on displacements of aerial image can be eliminated when the relative image displacements are measured. The PROLITH simulation results show that, the measurement accuracy of coma increases by more than 25% under conventional illumination, and the measurement accuracy of primary coma increases by more than 20% under annular illumination, compared with the TAMIS technique. (c) 2007 Optical Society of America.

Coma measurement using a PSM and transmission image sensor

As feature size decreases, especially with the use of resolution enhancement technique, requirements for the coma aberrations in the projection lenses of the lithographic tools have become extremely severe. So, fast and accurate in situ measurement of coma is necessary. In the present paper, we present a new method for characterizing the coma aberrations in the projection lens using a phase-shifting mask and a transmission image sensor. By measuring the image positions at multiple NA and partial coherence settings, we are able to extract the coma aberration. The simulation results show that the accuracy of coma measurement increases approximately 20% compared to the previous straightforward measurement technique. (c) 2005 Elsevier GmbH. All rights reserved.

Multiple energy transfers in rare earth complex-doped SiO2 spheres

Silica spheres doped with Eu(TTFA)(3) and/or Sm(TTFA)(3) were synthesized by using the modified Stober method. The transmission electron microscope image reveals that the hybrid spheres have smooth surfaces and an average diameter of about 210 nm. Fluorescence spectrometer was used to analyze the fluorescence properties of hybrid spheres. The results show that multiple energy transfer processes are simultaneously achieved in the same samples co-doped with Eu (TTFA)(3) and Sm(TTFA)(3), namely between the ligand and Eu3+ ion, the ligand and Sm3+ ion, and Sm3+ ion and Eu3+, ion. Energy transfer of Sm3+-> Eu3+, in the hybrid spheres leads to fluorescence enhancement of Eu3+ emission by approximately an order of magnitude. The lifetimes of the hybrid spheres were also measured.

Partially Supervised Neighbor Embedding for Example-Based Image Super-Resolution

Neighbor embedding algorithm has been widely used in example-based super-resolution reconstruction from a single frame, which makes the assumption that neighbor patches embedded are contained in a single manifold. However, it is not always true for complicated texture structure. In this paper, we believe that textures may be contained in multiple manifolds, corresponding to classes. Under this assumption, we present a novel example-based image super-resolution reconstruction algorithm with clustering and supervised neighbor embedding (CSNE). First, a class predictor for low-resolution (LR) patches is learnt by an unsupervised Gaussian mixture model. Then by utilizing class label information of each patch, a supervised neighbor embedding is used to estimate high-resolution (HR) patches corresponding to LR patches. The experimental results show that the proposed method can achieve a better recovery of LR comparing with other simple schemes using neighbor embedding.

Multiple melting and crystallization behavior of nylon 1212

The wide-angle X-ray diffraction (WAXD) patterns of isothermally crystallized Nylon 1212 show that gamma-form crystals form below 90 degrees C and the alpha-form crystals call exist above 140 degrees C. In the temperature range of 90-140 degrees C, the a-form gamma-form crystals coexist. Variable-temperature WAXD exhibits that the nylon 1212 gamma-form does not show crystal and transition on heating, while a-form isothermally crystallized at 160 degrees C exhibits Brill transition at a little higher than 180 degrees C on heating. The multiple melting behaviors of Nylon 1212 isothermally crystallized from melt come from a complex mechanism of different crystal structures, dual lamellar population and melting-recrystallization. In polarized optical microscope (POM) observations, Nylon 1212 isothermally crystallized at 175 degrees C shows the ringed banded spherulites. However, at temperatures below 160 degrees C the ringed handed image disappears, and cross-extinct spherulites are formed.