A silicon capacitive microphone based on oxidized porous silicon sacrificial technology

In this paper, a new capacitive microphone fabrication technology is proposed. It describes using the oxidized porous silicon sacrificial technology to make air gap and using KOH etching technique to make the backplate containing acoustic holes based on the principle that the heavy p(+)-doping silicon can be nearly etched in KOH solution. The innovation of the method is using oxidized porous silicon technology. The sensitivity of the fabricated microphone is from -55dB ( 1.78mV/Pa) to -45dB (5.6mV/Pa) in the frequency range of 500Hz to 25kHz. Its cut-off frequency is higher than 20kHz.

Fabrication of Silicon Condenser Microphone Using Oxidized Porous Silicon as Sacrificial Layer

A new technique to fabricate silicon condenser microphone is presented. The technique is based on the use of oxidized porous silicon as sacrificial layer for the air gap and the heavy p~+-doping silicon of approximately 15μm thickness for the stiff backplate. The measured sensitivity of the microphone fabricated with this technique is in the range from -45dB (5.6mV/Pa) to -55dB (1.78mV/Pa) under the frequency from 500Hz to 10kHz, and shows a gradual increase at high frequency. The cut-off frequency is above 20kHz.

Investigation on a pressure-gradient fiber laser hydrophone

In this paper, a pressure-gradient fiber laser hydrophone is demonstrated. Two brass diaphragms are installed at the end of a metal cylinder as sensing elements. A distributed feedback fiber laser, fixed at the center of the two diaphragms, is elongated or shortened due to the acoustic wave. There are two orifices at the middle of the cylinder. So this structure can work as a pressure-gradient microphone in the acoustic field. Furthermore, the hydrostatic pressure is self-compensated and an ultra-thin dimension is achieved. Theoretical analysis is given based on the electro-acoustic theory. Field trials are carried out to test the performance of the hydrophone. A sensitivity of 100 nm MPa-1 has been achieved. Due to the small dimensions, no directivity is found in the test.