A moving-coil designed micro-mechanics tester with application on MEMS

A moving-coil designed micro-mechanics tester, named as MicroUTM (universal testing machine), is in-house developed in this paper for micro-mechanics tests. The main component is a moving coil suspended in a uniform magnetic field through a set of springs. When a current passes through the coil, the electromagnetic force is proportional to the magnitude of the current, so the load can easily be measured by the current. The displacement is measured using a capacitive sensor. The load is calibrated using a Sartorius BP211D analytical balance, with a resolution/range of 0.01 mg/80 g or 0.1 mg/210 g. The displacement is calibrated using a HEIDENHAIN CT-6002 length gauge with an accuracy of +/- 0.1 mu m. The calibration results show that the load range is +/- 1 N and the displacement range is +/- 300 mu m. The noise levels of the load and displacement are 50 mu N and 150 nm, respectively. The nonlinearity of the load is only 0.2%. Several in-plane load tests of the MEMS micro-cantilever are performed using this tester. Experimental results, with excellent repeatability, demonstrate the reliability of the load measurement as well as the flexible function of this tester.

Bifunctional nanostructure of magnetic core luminescent shell and its application as solid-state electrochemiluminescence sensor material

Bifunctional nanoarchitecture has been developed by combining the magnetic iron oxide and the luminescent Ru(bpy)(3)(2+) encapsulated in silica. First, the iron oxide nanoparticles were synthesized and coated with silica, which was used to isolate the magnetic nanoparticles from the outer-shell encapsulated Ru(bpy)(3)(2+) to prevent luminescence quenching. Then onto this core an outer shell of silica containing encapsulated Ru(bpy)(3)(2+) was grown through the Stober method. Highly luminescent Ru(bpy)(3)(2+) serves as a luminescent marker, while magnetic Fe3O4 nanoparticles allow external manipulation by a magnetic field. Since Ru(bpy)(3)(2+) is a typical electrochemiluminescence (ECL) reagent and it could still maintain such property when encapsulated in the bifunctional nanoparticle, we explored the feasibility of applying the as-prepared nanostructure to fabricating an ECL sensor; such method is simple and effective. We applied the prepared ECL sensor not only to the typical Ru(bpy)(3)(2+) co-reactant tripropylamine (TPA), but also to the practically important polyamines. Consequently, the ECL sensor shows a wide linear range, high sensitivity, and good stability.

Structure and magnetic properties of CoNiP nanowire arrays embedded in AAO template

Ternary CoNiP nanowire (NW) arrays have been synthesized by electrochemical deposition inside the nanochannels of anodic aluminum oxide (AAO) template. The CoNiP NWs deposited at room temperature present soft magnetic properties, with both parallel and perpendicular coercivities less than 500 Oe. In contrast, as the electrolyte temperature (T-elc) increases from 323 to 343 K, the NWs exhibit hard magnetic properties with coercivities in the range of 1000-2500 Oe. This dramatic increase in coercivities can be attributed to the domain wall pinning that is related to the formation of Ni and Co nanocrystallites and the increase of P content. The parallel coercivity (i.e. the applied field perpendicular to the membrane surface) maximum as high as 2500 Oe with squareness ratio up to 0.8 is achieved at the electrolyte temperature of 328 K. It has been demonstrated that the parallel coercivity of CoNiP NWs can be tuned in a wide range of 200-2500 Oe by controlling the electrolyte temperature, providing an easy way to control magnetic properties and thereby for their integration with magnetic-micro-electromechanical systems (MEMS). (C) 2008 Elsevier B.V. All rights reserved.

高温MEMS剪应力传感器残余应力分析

采用理论分析与数值模拟相结合的方法, 研究了残余应力对静电反馈式MEMS高温剪应力传感器的结构设计的影响.研究表明:在电极宽度和间距不变的情况下, 增加电极数和减小电极长度可有效地减小由静电力引起的应力和变形;残余应力对结构应力和变形的影响远大于静电力

A 3 Tesla Superconducting Magnet for Hall Sensor Calibration

A 3 T superconducting magnet with a 70 mm diameter warm bore and energy storage of 47 kJ has been successfully fabricated and tested, which can be used to calibrate Hall sensors in high magnetic field as well as conduct superconducting experiments. The magnet consists of three solenoid coils and an iron yoke. The homogeneity of the magnetic field in the region of interest (ROI) is +/- 6.0 x 10(-5). The coils of the magnet were fabricated with NbTi-Cu superconducting wire and the stray magnetic field is shielded by an iron yoke. The coils and yoke are fully immersed in a helium vessel. The optimized structural design, stress and quench simulation, fabrication and test results are presented in this paper.