The influence of microcrack density on the elastic and fracture mechanical properties of stripa granite

Microcracks can have a strong influence on the elastic and fracture mechanical properties of rocks if they are numerous, or if they are orientated in unfavourable directions in anisotropic rocks in particular. This paper presents results from a great number of mechanical tests on Stripa granite containing various amounts of microcracks. Variations in the microcrack density were obtained by shock-heating the rock at different temperatures in the range 100–600°C for 3 h.

In situ surface topography measurement method of granite base in scanning wafer stage with laser interferometer

Topography of a granite surface has an effect on the vertical positioning of a wafer stage in a lithographic tool, when the wafer stage moves on the granite. The inaccurate measurement of the topography results in a bad leveling and focusing performance. In this paper, an in situ method to measure the topography of a granite surface with high accuracy is present. In this method, a high-order polynomial is set up to express the topography of the granite surface. Two double-frequency laser interferometers are used to measure the tilts of the wafer stage in the X- and Y-directions. From the sampling tilts information, the coefficients of the high-order polynomial can be obtained by a special algorithm. Experiment results shows that the measurement reproducibility of the method is better than 10 nm. (c) 2006 Elsevier GmbH. All rights reserved.