Effects of Thermocapillary Convection on the Growth Process in Industrial 8-inch Silicon Czochralski Growth

Czochralski (CZ) crystal growth process is a widely used technique in manufacturing of silicon crystals and other semiconductor materials. The ultimate goal of the IC industry is to have the highest quality substrates, which are free of point defect, impurities and micro defect clusters. The scale up of silicon wafer size from 200 mm to 300 mm requires large crucible size and more heat power. Transport phenomena in crystal growth processes are quite complex due to melt and gas flows that may be oscillatory and/or turbulent, coupled convection and radiation, impurities and dopant distributions, unsteady kinetics of the growth process, melt crystal interface dynamics, free surface and meniscus, stoichiometry in the case of compound materials. A global model has been developed to simulate the temperature distribution and melt flow in an 8-inch system. The present program features the fluid convection, magnetohydrodynamics, and radiation models. A multi-zone method is used to divide the Cz system into different zones, e.g., the melt, the crystal and the hot zone. For calculation of temperature distribution, the whole system inside the stainless chamber is considered. For the convective flow, only the melt is considered. The widely used zonal method divides the surface of the radiation enclosure into a number of zones, which has a uniform distribution of temperature, radiative properties and composition. The integro-differential equations for the radiative heat transfer are solved using the matrix inversion technique. The zonal method for radiative heat transfer is used in the growth chamber, which is confined by crystal surface, melt surface, heat shield, and pull chamber. Free surface and crystal/melt interface are tracked using adaptive grid generation. The competition between the thermocapillary convection induced by non-uniform temperature distributions on the free surface and the forced convection by the rotation of the crystal determines the interface shape, dopant distribution, and striation pattern. The temperature gradients on the free surface are influenced by the effects of the thermocapillary force on the free surface and the rotation of the crystal and the crucible.

The research of phosphorus of Xiangxi River nearby the Three Gorges, China

The Xiangxi River is the first middling tributary of the Changjiang River near the Three Gorges Dam. The River is subject to phosphorus pollution mainly from industrial wastewater. As the water quality of the Xiangxi River could directly influence the water quality of the Three Gorges Reservoir, the research on phosphorus levels and its change in the sediment profile of the Xiangxi River could provide useful information in the dynamic changes in the system, thereby offering options for mitigative measures. Water and sediment samples from lower reaches of Xiangxi River were collected and the different forms of phosphorus in sediments of the Xiangxi River were studied. The concentrations of total phosphorus in sediment ranged from 757.67 to 1438.54 mg/kg. Inorganic phosphorus concentrations ranged from 684.63 to 1055.58 mg/kg. Phosphorus contamination was serious in some parts of the Xiangxi River. With an average concentration of 635.17 mg/kg, calcium-bound phosphorus is the main form among different inorganic phosphorus forms. Labile phosphorus and iron/aluminum-bound phosphorus measured 3.40, 0.05and 35.28 mg/kg, respectively. The mobilization potential of phosphorus of sediments was studied through adsorption and release experiments. The equilibrium concentration of phosphorus adsorption and release was around 0.1 mg/L. The initial concentrations of phosphorus in the overlying water and the sediments have obvious effect on phosphorus mobilization potential. In addition, the release rate of phosphorus in sediment increased with water depth.

Mobilization potential of heavy metals: A comparison between river and lake sediments

Toxic metals introduced into aquatic environments by human activities accumulation in sediments. A common notion is that the association of metals with acid volatile sulfides (AVS) affords a mechanism for partitioning metals from water to solid phase, thereby reducing biological availability. However, variation in environmental conditions can mobilize the sediment-bound metal and result in adverse environmental impacts. The AVS levels and the effect of AVS on the fate of Cu, Cd, Zn, Ni in sediments in the the Changjiang River, a suboxic river with sandy bottom sediment and the Donghu Lake, a anoxic lake with muddy sediment in China, were compared through aeration, static adsorption and release experiments in laboratory. Sips isotherm equation, kinetic equation and grade ion exchange theory were used to describe the heavy metal adsorb and release process. The results showed that AVS level in the lake sediment are higher than that of the river. Heavy metals in the overlying water can transfer to sediments incessantly as long as the sediment remains undisturbed. The metal release process is mainly related to AVS oxidation in lake sediment while also related to Org-C and Fe-Mn oxyhydroxide oxidation in river sediment. The effect of sulfides on Zn and Ni is high, followed by Cd, and Cu is easy bound to Org-C. AVS plays a major role in controlling metals activity in lake sediment and its presence increase the adsorption capacity both of the lake and river sediments.