3D Finite Volume Scheme for Czochralski Single Crystal Growth

Czochralski (Cz) technique, which is used for growing single crystals, has dominated the production of single crystals for electronic applications. The Cz growth process involves multiple phases, moving interface and three-dimensional behavior. Much has been done to study these phenomena by means of numerical methods as well as experimental observations. A three-dimensional curvilinear finite volume based algorithm has been developed to model the Cz process. A body-fitted transformation based approach is adopted in conjunction with a multizone adaptive grid generation (MAGG) technique to accurately handle the three-dimensional problems of phase-change in irregular geometries with free and moving surfaces. The multizone adaptive model is used to perform a three-dimensional simulation of the Cz growth of silicon single crystals.Since the phase change interface are irregular in shape and they move in response to the solution, accurate treatment of these interfaces is important from numerical accuracy point of view. The multizone adaptive grid generation (MAGG) is the appropriate scheme for this purpose. Another challenge encountered is the moving and periodic boundary conditions, which is essential to the numerical solution of the governing equations. Special treatments are implemented to impose the periodic boundary condition in a particular direction and to determine the internal boundary position and shape varying with the combination of ambient physicochemical transport process and interfacial dynamics. As indicated above that the applications and processes characterized by multi-phase, moving interfaces and irregular shape render the associated physical phenomena three-dimensional and unsteady. Therefore a generalized 3D model rather than a 2D simulation, in which the governing equations are solved in a general non-orthogonal coordinate system, is constructed to describe and capture the features of the growth process. All this has been implemented and validated by using it to model the low pressure Cz growth of silicon. Accuracy of this scheme is demonstrated by agreement of simulation data with available experimental data. Using the quasi-steady state approximation, it is shown that the flow and temperature fields in the melt under certain operating conditions become asymmetric and unsteady even in the absence of extrinsic sources of asymmetry. Asymmetry in the flow and temperature fields, caused by high shear initiated phenomena, affects the interface shape in the azimuthal direction thus results in the thermal stress distribution in the vicinity, which has serious implications from crystal quality point of view.

Effects of Thermocapillary Convection on the Growth Process in Industrial 8-inch Silicon Czochralski Growth

Czochralski (CZ) crystal growth process is a widely used technique in manufacturing of silicon crystals and other semiconductor materials. The ultimate goal of the IC industry is to have the highest quality substrates, which are free of point defect, impurities and micro defect clusters. The scale up of silicon wafer size from 200 mm to 300 mm requires large crucible size and more heat power. Transport phenomena in crystal growth processes are quite complex due to melt and gas flows that may be oscillatory and/or turbulent, coupled convection and radiation, impurities and dopant distributions, unsteady kinetics of the growth process, melt crystal interface dynamics, free surface and meniscus, stoichiometry in the case of compound materials. A global model has been developed to simulate the temperature distribution and melt flow in an 8-inch system. The present program features the fluid convection, magnetohydrodynamics, and radiation models. A multi-zone method is used to divide the Cz system into different zones, e.g., the melt, the crystal and the hot zone. For calculation of temperature distribution, the whole system inside the stainless chamber is considered. For the convective flow, only the melt is considered. The widely used zonal method divides the surface of the radiation enclosure into a number of zones, which has a uniform distribution of temperature, radiative properties and composition. The integro-differential equations for the radiative heat transfer are solved using the matrix inversion technique. The zonal method for radiative heat transfer is used in the growth chamber, which is confined by crystal surface, melt surface, heat shield, and pull chamber. Free surface and crystal/melt interface are tracked using adaptive grid generation. The competition between the thermocapillary convection induced by non-uniform temperature distributions on the free surface and the forced convection by the rotation of the crystal determines the interface shape, dopant distribution, and striation pattern. The temperature gradients on the free surface are influenced by the effects of the thermocapillary force on the free surface and the rotation of the crystal and the crucible.

煤层气数值试井非结构网格生成方法研究

分析了数值试井中的非结构网格的生成方法,利用Delaunay三角剖分的优良特性,设计了"翼边"数据结构,实现了满足数值计算前处理要求的Delaunay网格生成算法,并对网格质量进行了控制。实例表明,生成的网格具有边界约束一致性和较好的质量,可以满足煤层气数值试井计算的要求。

Electrochemiluminescent microoptoprobe with mini-grid working electrode and self-contained sample container

A new electrochemiluminescence (ECL) microoptoprobe with simple structure. small sampling volume and high efficiency was developed. It was constructed by fixing the transparent gold mini-grid on the end surface of the optical fiber, and by surrounding the fiber with the counter- and reference electrodes to form a self-contained three-electrode system. The use of mini-grid electrode increased the surface area and collection efficiency. which resulted in higher ECL signal and better sensitivity. The counter electrode together with one end of the fiber formed a mini-vessel, which eliminated the need of additional container and allowed to perform ECL detection in a very small volume (about 10 mul). The microoptoprobe obtained was characterized with the Ru(bpy)(3)(2-)-tripropylamine system and was applied for the determination of oxalate and chlorpromazine (CPZ). Detection limits (S/N = 3) were 5 x 10(-7) and 1 x 10(-6) mol l(-1) for oxalate and CPZ. respectively. The linear range for oxalate and CPZ extended from 1 x 10(-6) to 1 x 10(-3) mol l(-1), and from 5 x 10(-6) to 5 x 10(-4) mol l(-1). respectively.

Computation of Viscous Incompressible Flow using Pressure Correction Method on Unstructured Chimera Grid

In this paper, a pressure correction algorithm for computing incompressible flows is modified and implemented on unstructured Chimera grid. Schwarz method is used to couple the solutions of different sub-domains. A new interpolation to ensure consistency between primary variables and auxiliary variables is proposed. Other important issues such as global mass conservation and order of accuracy in the interpolations are also discussed. Two numerical simulations are successfully performed. They include one steady case, the lid-driven cavity and one unsteady case, the flow around a circular cylinder. The results demonstrate a very good performance of the proposed scheme on unstructured Chimera grids. It prevents the decoupling of pressure field in the overlapping region and requires only little modification to the existing unstructured Navier–Stokes (NS) solver. The numerical experiments show the reliability and potential of this method in applying to practical problems.

Application of Similarity Theory to the Characterization of Non-Transferred Laminar Plasma Jet Generation

Laminar-flow non-transferred DC plasma jets were generated by a torch with an inter-electrode insert by which the arc column was limited to a length of about 20 mm. Current–voltage characteristics, thermal efficiency and jet length, a parameter which changes greatly with the generating parameters in contrast with the almost unchangeable jet length of the turbulent plasma, were investigated systematically, by using the similarity theory combined with the corresponding experimental examination. Formulae in non-dimensional forms were derived for predicting the characteristics of the laminar plasma jet generation, within the parameter ranges where no transfer to turbulent flow occurs. Mean arc temperature in the torch channel and mean jet-flow temperature at the torch exit were obtained, and the results indicate that the thermal conductivity feature of the working gas seems to be an important factor affecting thermal efficiency of laminar plasma generation.

Generation of large-scale vortex dislocations in a three-dimensional wake-type flow

Numerical study of three-dimensional evolution of wake-type flow and vortex dislocations is performed by using a compact finite diffenence-Fourier spectral method to solve 3-D incompressible Navier-Stokes equations. A local spanwise nonuniformity in momentum defect is imposed on the incoming wake-type flow. The present numerical results have shown that the flow instability leads to three-dimensional vortex streets, whose frequency, phase as well as the strength vary with the span caused by the local nonuniformity. The vortex dislocations are generated in the nonuniform region and the large-scale chain-like vortex linkage structures in the dislocations are shown. The generation and the characteristics of the vortex dislocations are described in detail.

Experimental Study on the Generation and Characteristics of Plasma Jets

报道热等离子体射流产生及射流特性的实验研究结果。。采用同一个直流等离子体发生器，工作气体流量小时产生出层流等离子体长射流，射流长度随气体流量或弧电流的增加而明显增加；工作气体流量大时则产生出湍流等离子体短射流，此时射流长度几乎与工作气体流量或弧电流无关；在层流与湍流等离子体射流工况之间，存在一个流动状况不稳定的过渡区，此时等离子体射流的平均长度随气流量的加大而减小，但随弧电流的加大而明显加大。层流等离子体长射流有相当好的刚性。

Experimental Study on the Thermal Argon Plasma Generation and Jet Length Change Characteristics at Atmospheric Pressure

The generation, jet length and flow-regime change characteristics of argon plasma issuing into ambient air have been experimentally examined. Different torch structures have been used in the tests. Laminar plasma jets can be generated within a rather wide range of working-gas flow rates, and an unsteady transitional flow state exists between the laminar and turbulent flow regimes. The high-temperature region length of the laminar plasma jet can be over an order longer than that of the turbulent plasma jet and increases with increasing argon flow rate or arc current, while the jet length of the turbulent plasma is less influenced by the generating parameters. The flow field of the plasma jet has very high radial gradients of plasma parameters, and a Reynolds number alone calculated in the ordinary manner may not adequately serve as a criterion for transition. The laminar plasma jet can have a higher velocity than that of an unsteady or turbulent jet. The long laminar plasma jet has good stiffness to withstand the impact of laterally injected cold gas and particulate matter. It could be used as a rather ideal object for fundamental studies and be applied to novel materials processing due to its attractive stable and adjustable properties.

Generation of long, laminar plasma jets at atmospheric pressure and effects of flow turbulence

Long, laminar plasma jets at atmospheric pressure of pure argon and a mixture of argon and nitrogen with jet length up to 45 fi,Hes its diameter could be generated with a DC are torch by! restricting the movement of arc root in the torch channel. Effects of torch structure, gas feeding, and characteristics of power supply on the length of plasma jets were experimentally examined. Plasma jets of considerable length and excellent stability could be obtained by regulating the generating parameters, including are channel geometry gas flow I ate, and feeding methods, etc. Influence of flow turbulence at the torch,nozzle exit on the temperature distribution of plasma jets was numerically simulated. The analysis indicated that laminar flow plasma with very low initial turbulent kinetic energy will produce a long jet, with low axial temperature gradient. This kind of long laminar plasma jet could greatly improve the controllability for materials processing, compared with a short turbulent are let.

A Multimoment Finite-Volume Shallow-Water Model On The Yin-Yang Overset Spherical Grid

A numerical model for shallow-water equations has been built and tested on the Yin-Yang overset spherical grid. A high-order multimoment finite-volume method is used for the spatial discretization in which two kinds of so-called moments of the physical field [i.e., the volume integrated average ( VIA) and the point value (PV)] are treated as the model variables and updated separately in time. In the present model, the PV is computed by the semi-implicit semi-Lagrangian formulation, whereas the VIA is predicted in time via a flux-based finite-volume method and is numerically conserved on each component grid. The concept of including an extra moment (i.e., the volume-integrated value) to enforce the numerical conservativeness provides a general methodology and applies to the existing semi-implicit semi-Lagrangian formulations. Based on both VIA and PV, the high-order interpolation reconstruction can only be done over a single grid cell, which then minimizes the overlapping zone between the Yin and Yang components and effectively reduces the numerical errors introduced in the interpolation required to communicate the data between the two components. The present model completely gets around the singularity and grid convergence in the polar regions of the conventional longitude-latitude grid. Being an issue demanding further investigation, the high-order interpolation across the overlapping region of the Yin-Yang grid in the current model does not rigorously guarantee the numerical conservativeness. Nevertheless, these numerical tests show that the global conservation error in the present model is negligibly small. The model has competitive accuracy and efficiency.

A Pressure-Correction Method And Its Applications On An Unstructured Chimera Grid

In this paper, an unstructured Chimera mesh method is used to compute incompressible flow around a rotating body. To implement the pressure correction algorithm on unstructured overlapping sub-grids, a novel interpolation scheme for pressure correction is proposed. This indirect interpolation scheme can ensure a tight coupling of pressure between sub-domains. A moving-mesh finite volume approach is used to treat the rotating sub-domain and the governing equations are formulated in an inertial reference frame. Since the mesh that surrounds the rotating body undergoes only solid body rotation and the background mesh remains stationary, no mesh deformation is encountered in the computation. As a benefit from the utilization of an inertial frame, tensorial transformation for velocity is not needed. Three numerical simulations are successfully performed. They include flow over a fixed circular cylinder, flow over a rotating circular cylinder and flow over a rotating elliptic cylinder. These numerical examples demonstrate the capability of the current scheme in handling moving boundaries. The numerical results are in good agreement with experimental and computational data in literature. (C) 2007 Elsevier Ltd. All rights reserved.

Sediment incipience in turbulence generated in a square tank by a vertically oscillating grid

The failure of hydraulic structures in many estuaries and coastal regions around the world has been attributed to sediment transport and local scour. The sediment incipience in homogenous turbulence generated by oscillating grid is studied in this paper. The turbulent flow is measured by particle tracer velocimetry (PTV) technique. The integral length scale and time scale of turbulence are obtained. The turbulent flow near the wall is measured by local optical magnification. The sediment incipience is described by static theory. The relationship of probability of sediment incipience and the turbulent kinetic energy were obtained experimentally and theoretically. The distribution of the turbulent kinetic energy near the wall is found to obey the power law and the turbulent energy is further identified as the dynamic mechanism of sediment incipience.

Digitized Processing Track Generation of a Computer Integrated Multi-Functional 5-Axis Laser Processing System

Based on the computer integrated and flexible laser processing system, an intelligent measuring sub-system was developed. A novel model has been built up to compensate the deviations of the main frame-structure, and a new 3-D laser tracker system is applied to adjust the accuracy of the system. To analyze the characteristic of all kind surfaces of automobile outer penal moulds and dies, classification of types of the surface、brim and ridge(or vale) area to be measured and processed has been established, resulting in one of the main processing functions of the laser processing system. According to different type of surfaces, a 2-D adaptive measuring method based on B?zier curve was developed; furthermore a 3-D adaptive measuring method based on Spline curve was also developed. According to the laser materials processing characteristics and data characteristics, necessary methods have been developed to generate processing tracks, they are explained in details. Measuring experiments and laser processing experiments were carried out to testify the above mentioned methods, which have been applied in the computer integrated and flexible laser processing system developed by the Institute of Mechanics, CAS.