面向供应链管理的企业集成

本文指出面向供应链管理的企业集成是人们对制造业实践和先进制造理论和技术的研究和开发的结果，实现供应链上的企业集成和优化，开发多企业集成控制管理系统是未来制造业追求的目标。本文介绍了企业管理的发展历程，提出了面向供应链的企业集成模式，指出其中信息技术所占的地位。简单介绍了多企业集成的开发方法和我们的方案。 　

DEDS理论在CIMS中应用研究回顾与展望

离散事件动态系统ＤＥＤＳ理论为制造系统分析设计提供了支持工具，制造技术的发展又为ＤＥＤＳ理论提供了实际应用背景．本文综述离散事件动态系统ＤＥＤＳ理论的发展及其在计算机集成制造系统ＣＩＭＳ中的应用研究．分析了各种ＤＥＤＳ方法的特点和探讨了相应ＤＥＤＳ模型的描述范围．扼要叙述了ＣＩＭＳ的发展状况．阐述了ＣＩＭＳ新阶段对未来ＤＥＤＳ理论研究的要求。

Modeling and optimization of semiconductor manufacturing process with neural networks

A neural network-based process model is proposed to optimize the semiconductor manufacturing process. Being different from some works in several research groups which developed neural network-based models to predict process quality with a set of process variables of only single manufacturing step, we applied this model to wafer fabrication parameters control and wafer lot yield optimization. The original data are collected from a wafer fabrication line, including technological parameters and wafer test results. The wafer lot yield is taken as the optimization target. Learning from historical technological records and wafer test results, the model can predict the wafer yield. To eliminate the "bad" or noisy samples from the sample set, an experimental method was used to determine the number of hidden units so that both good learning ability and prediction capability can be obtained.