Talbot-SNOM method for non-contact evaluation of high-density gratings

A Talbot scanning near-field optical microscopy (SNOM) method for non-contact evaluating of high-density gratings was described. This method combines the Talbot self-imaging effect of the gratings and the conventional SNOM technique without damage. The significant advantages of this method are its simple structure, reliable and fast measurement for the surface quality of the tested gratings. Experimental results of three different kinds of gratings were demonstrated to indicate that this method is effective for evaluation surface quality of high-density gratings. (c) 2004 Elsevier B.V. All rights reserved.

Structural evaluation of polycrystalline silicon thin films by hot-wire-assisted PECVD

Tungsten wires were introduced into a plasma-enhanced chemical vapor deposition (PECVD) system as a catalyzer: we name this technique 'hot-wire-assisted PECVD' (HW-PECVD). Under constant deposition pressure (p(g)), gas flow ratio and catalyzer position, the effects of the hot wire temperature (T-f) on the structural properties of the poly-Si films have been characterized by X-ray diffraction (XRD), Raman scattering and Fourier-transform infrared (FTIR) spectroscopy. Compared with conventional PECVD, the grain size, crystalline volume fraction (X-e) and deposition rate were all enhanced when a high T-f was used. The best poly-Si film exhibits a preferential (220) orientation, with a full width at half-maximum (FWHM) of 0.2 degrees. The Si-Si TO peak of the Raman scattering spectrum is located at 519.8 cm(-1) with a FWHM of 7.1 cm(-1). The X-c is 0.93. These improvements are mainly the result of promotion of the dissociation of SiH4 and an increase in the atomic H concentration in the gas phase. (C) 2001 Elsevier Science B.V. All rights reserved.

Structural evaluation of polycrystalline silicon thin films by hot-wire-assisted PECVD

Tungsten wires were introduced into a plasma-enhanced chemical vapor deposition (PECVD) system as a catalyzer: we name this technique 'hot-wire-assisted PECVD' (HW-PECVD). Under constant deposition pressure (p(g)), gas flow ratio and catalyzer position, the effects of the hot wire temperature (T-f) on the structural properties of the poly-Si films have been characterized by X-ray diffraction (XRD), Raman scattering and Fourier-transform infrared (FTIR) spectroscopy. Compared with conventional PECVD, the grain size, crystalline volume fraction (X-e) and deposition rate were all enhanced when a high T-f was used. The best poly-Si film exhibits a preferential (220) orientation, with a full width at half-maximum (FWHM) of 0.2 degrees. The Si-Si TO peak of the Raman scattering spectrum is located at 519.8 cm(-1) with a FWHM of 7.1 cm(-1). The X-c is 0.93. These improvements are mainly the result of promotion of the dissociation of SiH4 and an increase in the atomic H concentration in the gas phase. (C) 2001 Elsevier Science B.V. All rights reserved.

Preparation and evaluation of a proton exchange membrane based on oxidation and water stable sulfonated polyimides

A series of novel oxidation and water stable sulfonated polyimides (SPIs) were synthesized from 4,4'-binaphthyl-1,1',8,8'-tetracarboxylic dianhydride (BTDA), and wholly aromatic diamine 2,2'-bis(3-sulfobenzoyl) benzidine (2,2'-BSBB) for proton exchange membrane fuel cells. These polyimides could be cast into flexible and tough membranes from m-cresol solutions. The copolymer membranes exhibited excellent oxidative stability and mechanical properties due to their fully aromatic structure extending through the backbone and pendant groups. Moreover, all BTDA-based SPI membranes exhibited much better water stability than those based on the conventional 1,4,5,8-naphthalenecarboxylic dianhydride. The improved water stability of BTDA-based polyimides was attributed to its unique binaphthalimide structure. The SPI membranes with ion exchange capacity (IEC) of 1.36-1.90 mequiv g(-1) had proton conductivity in the range of 0.41 x 10(-1) to 1. 12 x 10(-1) S cm(-1) at 20 degrees C. The membrane with IEC value of 1.90 mequiv g(-1) displayed reasonably higher proton conductivity than Nafion((R)) 117 (0.9 x 10(-1) S cm(-1)) under the same test condition and the high conductivity of 0.184 S cm(-1) was obtained at 80 degrees C. Microscopic analyses revealed that well-dispersed hydrophilic domains contribute to better proton conducting properties. These results showed that the synthesized materials might have the potential to be applied as the proton exchange membranes for PEMFCs.

Evaluation of a sol-gel derived carbon composite electrode as an amperometric detector for capillary electrophoresis

In this paper, we report the construction and application of a sol-gel derived carbon composite electrode (CCE) as an amperometric detector for capillary electrophoresis. The electrochemical properties were characterized and compared with those of conventional carbon fiber and carbon paste electrode (CPE). Experimental results show that peak-to-peak noise of CCE was about 20% of CPE and electrode capacitance was comparatively low. When applied to the detection of dopamine and epinephrine, the optimal detection potential for CCE was 0.1 V lower than CPE under the same separation conditions; CCE with diameter of 75 and 100 mum could achieve a low detection limit of 3.10(-8) and 6.10(-8) M for the detection of epinephrine, which approaching that of the 33-mum diameter carbon fiber electrode. Also, the linearity for epinephrine at CCE was more than two orders of magnitude, which was slightly wider than that of carbon fiber electrode. Applications to real sample analysis were tested by the determination of betahistine dihydrochloride in tablets and human urine. Using CCE with diameter less than or equal to100 mum as an amperometric detector after capillary electrophoresis separation, a low detection limit and a wide linear range combined with excellent reproducibility were obtained. This CCE possesses of many advantages, namely, convenience, ease of fabrication, low cost and high stability.

Evaluation and application of micro-sampling system for inductively coupled plasma mass spectrometry

Two Meinhard microconcentric nebulizers, model AR30-07-FM02 and AR 30-07-FM005, were employed as a self-installed micro-sampling system for inductively coupled plasma-mass spectrometry (ICP-MS). The FM02 nebulizer at 22 muL/min of solution uptake rate gave the relative standard deviations of 7.6%, 3.0%, 2.7%, 1.8% for determinations (n = 10) of 20 mug/L Be, Co, In and Bi, respectively, and the detection limits (3s) of 0.14, 0.10, 0.02 and 0.01 mug/L for Be, Co In and Bi, respectively. The mass intensity of In-115 obtained by this micro-sampling system was 60% of that by conventional pneumatic nebulizer system at 1.3 mL/min. The analytical results for La, Ce, Pr and Nd in 20 muL Wistar rat amniotic fluid obtained by the present micro-sampling system were precisely in good agreement with those obtained using conventional pneumatic nebulization system.