Production of EUV power with SECRAL

The high power EUV source is one of key issues in the development of EUV lithography which is considered to be the most promising technology among the next generation lithography. However neither DPP nor LPP seems to meet the requirements of the commercial high-volume product. Insufficiency of DPP and LPP motivate the investigation of other means to produce the EUV radiation required in lithography. ECR plasma seems to be one of the alternatives. In order to investigate the feasibility of ECR plasma as a EUV light source, the EUV power emitted by SECRAL was measured. A EUV power of 1.03W in 4 pi sr solid angle was obtained when 2000W 18GHz rf power was launched, and the corresponding CE was 0.5%. Considering that SECRAL is designed to produce very high charge state ions, this very preliminary result is inspiring. Room-temperature ECR plasma and Sn plasma are both in the planned schedule.

Production of isobutene from n-butane over Pd modified SAPOs and MeAPOs

Pd modified AlPO-11 and SAPO-5, 11, 34 were used in the direct transformation of n-butane to isobutene. The effect of acidity and porous structure on the supported Pd and the catalytic perfori-nance were discussed. For higher isobutene selectivity, some metals, such as Ti, Fe, Mg, Co and Mn, was incorporated into AlPO-11 framework and isobutene selectivity of 34.86% can be obtained over Pd/MnAPO-11. A combined catalyst system was used for a further improvement of the isobutene selectivity.

Space-selective co-precipitation of silver and gold nanoparticles in femtosecond laser pulses irradiated Ag+, Au3+ co-doped silicate glass

We report on space-selective co-precipitation of silver and gold nanoparticles in Ag+, Au3+ co-doped silicate glasses by irradiation of femtosecond laser pulses and subsequent annealing at high temperatures. The color of the irradiated area in the glass sample changed from yellow to red with the increase of the annealing temperature. The effects of average laser power and annealing temperature on precipitation of the nanoparticles were investigated. A reasonable mechanism was proposed to explain the observed phenomena. (c) 2006 Elsevier Ltd. All rights reserved.