Effects of Thermocapillary Convection on the Growth Process in Industrial 8-inch Silicon Czochralski Growth

Czochralski (CZ) crystal growth process is a widely used technique in manufacturing of silicon crystals and other semiconductor materials. The ultimate goal of the IC industry is to have the highest quality substrates, which are free of point defect, impurities and micro defect clusters. The scale up of silicon wafer size from 200 mm to 300 mm requires large crucible size and more heat power. Transport phenomena in crystal growth processes are quite complex due to melt and gas flows that may be oscillatory and/or turbulent, coupled convection and radiation, impurities and dopant distributions, unsteady kinetics of the growth process, melt crystal interface dynamics, free surface and meniscus, stoichiometry in the case of compound materials. A global model has been developed to simulate the temperature distribution and melt flow in an 8-inch system. The present program features the fluid convection, magnetohydrodynamics, and radiation models. A multi-zone method is used to divide the Cz system into different zones, e.g., the melt, the crystal and the hot zone. For calculation of temperature distribution, the whole system inside the stainless chamber is considered. For the convective flow, only the melt is considered. The widely used zonal method divides the surface of the radiation enclosure into a number of zones, which has a uniform distribution of temperature, radiative properties and composition. The integro-differential equations for the radiative heat transfer are solved using the matrix inversion technique. The zonal method for radiative heat transfer is used in the growth chamber, which is confined by crystal surface, melt surface, heat shield, and pull chamber. Free surface and crystal/melt interface are tracked using adaptive grid generation. The competition between the thermocapillary convection induced by non-uniform temperature distributions on the free surface and the forced convection by the rotation of the crystal determines the interface shape, dopant distribution, and striation pattern. The temperature gradients on the free surface are influenced by the effects of the thermocapillary force on the free surface and the rotation of the crystal and the crucible.

Experimental Study the Flow Pattern in Thermal Capillary Convection

In the present research work, the thermal capillary convection has been investigated and measured by particle image velocimetry (PIV) technique. There is one liquid layer in a rectangular cavity with different temperature’s sidewalls. The cavity is 52mm,42mm,20mm, 4mm in height of the silicon oil liquid layer. A sidewall of the cavity is heated by electro-thermal film, another sidewall is cooled by the semiconductor cooling sheet. The velocity field and the stream lines in cross section in liquid layer have been obtained at different temperature difference. The present experiment demonstrates that the pattern of the convection mainly relates with temperature difference.

Oscillatory Instabilities of Two-Layer Rayleigh-Marangoni-Benard Convection

The Rayleigh-Marangoni-Benard convective instability (R-M-B instability) in the two-layer systems such as Silicone oil (10cSt)/Fluorinert (FC70) and Silicone oil (2cSt)/water liquids are studied. Both linear instability analysis and nonlinear instability analysis (2D numerical simulation) were performed to study the influence of thermocapillary force on the convective instability of the two-layer system. The results show the strong effects of thermocapillary force at the interface on the time-dependent oscillations at the onset of instability convection. The secondary instability phenomenon found in the real two-layer system of Silicone oil over water could explain the difference in the comparison of the Degen's experimental observation with the previous linear stability analysis results of Renardy et al.

Experimental Observation on Surface Wave Phenomena in Thermal Capillary Convection

An optical diagnostic system consisting of the Michelson interferometer with the image processor has been developed for studying of the surface wave in the thermal capillary convection in a rectangular cavity. In this paper, the capillary convection, surface deformation and surface wave due to the different temperature between the two sidewalls have been investigated. The cavity is 52mm?42mm in horizontal cross section and 4mm in height. The temperature difference is increased gradually and flow in liquid layer will change from steady convection to unstable convection. The optical interference method measures the surface deformation and the surface wave of the convection. The deformation of the interference fringes, which produced by the meeting of the reflected light from the liquid surface and the reference light has been captured, and the surface deformation appears when the steady convection is developed. The surface deformation is enhanced with the increasing of the temperature difference, and then several knaggy peeks in the interference fringes appear and move from the heated side to the cooled side, it demonstrates that the surface wave is existed. The surface deformation, the wavelength, the frequency, and the wave amplitude of the surface wave have been calculated.

Information Preservation Modeling of Rayleigh-Benard Transition from Thermal Conduction to Convection

Onset and evolution of the Rayleigh-Benard (R-B) convection are investigated using the Information Preservation (IP) method. The information velocity and temperature are updated using the Octant Flux Splitting (OFS) model developed by Masters & Ye based on the Maxwell transport equation suggested by Sun & Boyd. Statistical noise inherent in particle approaches such as the direct simulation Monte Carlo (DSMC) method is effectively reduced by the IP method, and therefore the evolutions from an initial quiescent fluid to a final steady state are shown clearly. An interesting phenomenon is observed: when the Rayleigh number (Ra) exceeds its critical value, there exists an obvious incubation stage. During the incubation stage, the vortex structure clearly appears and evolves, whereas the Nusselt number (Nu) of the lower plate is close to unity. After the incubation stage, the vortex velocity and Nu rapidly increase, and the flow field quickly reaches a steady, convective state. A relation of Nu to Ra given by IP agrees with those given by DSMC, the classical theory and experimental data.

Flow similariy applied in convection-based tilt sensor

The environment temperature has inevitable effects on property of the convect ion-based tilt sensors. It not only redefines the application, but also prevents the improvement of the sensor performance. Numerical simulation of the fluid flow in the chamber of a sensor was performed and the influence of the environment temperature was studied in this paper. At zero tilt angle, the temperature distribution along the perpendicular line cross the heat source at various environment temperatures was presented. It was found that the flow varied dramatically at different environment temperatures, which would cause the output signal vary accordingly, even when the tilt angle was kept at a constant, because this device works by sensing the change of flow. At the same condition, we present the numerical results when the temperature difference across the heat source and the environment was kept at the same, in those results, it was found that the temperature difference at every point along the perpendicular line cross the heat source keep the same, this result confirms the similarity principle of nature convection. Second, A method of eliminating environment temperature infect on property of convect ion-based tilt sensor, which is based on the theory of flow similarity, is proposed. It was found that a thermal transistance can be piped on the circuit of heat source to compensate the temperature of the heat source. A compensative circuit was specially designed which can keep flow similarity by changing heat source temperature in order to eliminate the influence of environment temperature. The experiment results show that above 70% temperature drift can be eliminated by this compensative circuit.

Two bifurcation processes for onset of oscillatory thermocapillary convection in a floating half zone

An overview on the onset of thermocapillary oscillatory convection in a floating half zone is provided, and it is a typical subject in the microgravity sciences related to the space materials science, especially the floating zone processing, and also to the microgravity fluid physics. The main interests are focused around the process for onset of oscillatory thermocapillary convection, which is known also as the bifurcation transition from quasi-steady convection to oscillatory convection. The onset of oscillation depends on a set of critical parameters, such as the Marangoni number, Prandtl number, geometrical parameters, and heat transfer parameters. Recent studies show that, there exists the bifurcation transition from steady and axial symmetric convection to the steady and axial non-symmetric convection before the onset of oscillation in cases of small Prandtl number fluids and in cases of larger Prandtl number fluids of fat liquid bridge with small aspect ratio. The transition process is a strong non-linear process because the velocity deviation has the same order of magnitude as that of an average flow after the onset of oscillation, and unsteady 3-D numerical simulation is suitable to do in depth analysis on strong non-linear process, and leads generally to a better comparison with the experimental results.

Floating zone convection

The microgravity research, as a branch of the advanced sciences and a spe- cialized field of high technology, has been made in China since the late 1980's. The research group investigating microgravity fluid physics consisted of our col- leagues and the authors in the Institute of Mechanics of the Chinese Academy of Sciences (CAS), and we pay special attention to the floating zone convection as our first research priority. Now, the research group has expanded and is a part of the National Microgravity Laboratory of the CAS, and the research fields have been extended to include more subjects related to microgravity science. Howev- er, the floating zone convection is still an important topic that greatly holds our research interests.

Monte Carlo Simulation Of Thermal Fluctuations Below The Onset Of Rayleigh-Benard Convection

The density fluctuations below the onset of convection in the Rayleigh-Benard problem are studied with the direct simulation Monte Carlo method. The particle simulation results clearly show the connection between the static correlation functions of fluctuations below the critical Rayleigh number and the flow patterns above the onset of convection for small Knudsen number flows (Kn=0.01 and Kn=0.005). Furthermore, the physical nature for no convection in the Rayleigh-Benard problem under large Knudsen number conditions (Kn>0.028) is explained based on the dynamics of fluctuations.

Complex Transition of Double-Diffusive Convection in a Rectangular Enclosure with Height-to-Length Ratio Equal to 4: Part I

This is the first part of direct numerical simulation (DNS) of double-diffusive convection in a slim rectangular enclosure with horizontal temperature and concentration gradients. We consider the case with the thermal Rayleigh number of 10^5, the Pradtle number of 1, the Lewis number of 2, the buoyancy ratio of composition to temperature being in the range of [0,1], and height-to-width aspect ration of 4. A new 7th order upwind compact scheme was developed for approximation of convective terms, and a three-stage third-order Runge-Kutta method was employed for time advancement. Our DNS suggests that with the buoyancy ratio increasing form 0 to 1, the flow of transition is a complex series changing fromthe steady to periodic, chaotic, periodic, quasi-periodic, and finally back to periodic. There are two types of periodic flow, one is simple periodic flow with single fundamental frequency (FF), and another is complex periodic flow with multiple FFs. This process is illustrated by using time-velocity histories, Fourier frequency spectrum analysis and the phase-space rajectories.

Study On Buoyancy Convection Phenomenon In The Crystal Growth Process

Real-time phase shift Mach-Zehnder interference technique, imaging technique, and computer image processing technique were combined to perform a real-time diagnosis of NaClO3 crystal, which described both the dissolution process and the crystallization process of the NaClO3 crystal in real-time condition. The dissolution fringes and the growth fringes in the process were obtained. Moreover, a distribution of concentration field in this process was obtained by inversion calculation. Finally, the buoyancy convection phenomenon caused by gravity in the crystal growth process was analyzed. The results showed that this convection phenomenon directly influences the growth rate of each crystal face in the crystal.

Effect of interfacial heat transfer on the onset of oscillatory convection in liquid bridge

In present study, effect of interfacial heat transfer with ambient gas on the onset of oscillatory convection in a liquid bridge of large Prandtl number on the ground is systematically investigated by the method of linear stability analyses. With both the constant and linear ambient air temperature distributions, the numerical results show that the interfacial heat transfer modifies the free-surface temperature distribution directly and then induces a steeper temperature gradient on the middle part of the free surface, which may destabilize the convection. On the other hand, the interfacial heat transfer restrains the temperature disturbances on the free surface, which may stabilize the convection. The two coupling effects result in a complex dependence of the stability property on the Biot number. Effects of melt free-surface deformation on the critical conditions of the oscillatory convection were also investigated. Moreover, to better understand the mechanism of the instabilities, rates of kinetic energy change and "thermal" energy change of the critical disturbances were investigated (C) 2009 Elsevier Ltd. All rights reserved.

Experimental Study on the Combined Evaporation Effect and Thermocapillary Convection in a Thin Liquid Layer

The coupling mechanisms and flow characteristics of thermocapillary convection in a thin liquid layer with evaporating interface were studied. The planar liquid layer, with the upper surface open to air, was imposed externally horizontal temperature differences. The measured average evaporating rates and interfacial temperature profiles indicated the relative importance of evaporation effect and thermocapillary convection under different temperature gradients. A temperature jump was found at the interface, which was thought to be related to the influence of evaporation effect. All above mentioned results were repeated in a rarely evaporating liquid to compare the influence of evaporation effect.

Numerical Study On Transient Flow In The Deep Naturally Fractured Reservoir With High Pressure

According to the experimental results and the characteristics of the pressure-sensitive fractured formation, a transient flow model is developed for the deep naturally-fractured reservoirs with different outer boundary conditions. The finite element equations for the model are derived. After generating the unstructured grids in the solution regions, the finite element method is used to calculate the pressure type curves for the pressure-sensitive fractured reservoir with different outer boundaries, such as the infinite boundary, circle boundary and combined linear boundaries, and the characteristics of the type curves are comparatively analyzed. The effects on the pressure curves caused by pressure sensitivity module and the effective radius combined parameter are determined, and the method for calculating the pressure-sensitive reservoir parameters is introduced. By analyzing the real field case in the high temperature and pressure reservoir, the perfect results show that the transient flow model for the pressure-sensitive fractured reservoir in this paper is correct.