Behavior of ar plasma formed in a high-density plasma source - an ecr reactor

In order to develop the ultra-large scale integration(ULSI), low pressure and high density plasma apparatus are required for etching and deposit of thin films. To understand critical parameters such as the pressure, temperature, electrostatic potential and energy distribution of ions impacting on the wafer, it is necessary to understand how these parameters are influenced by the power input and neutral gas pressure. In the present work, a 2-D hybrid electron fluid-particle ion model has been developed to simulate one of the high density plasma sources-an Electron Cyclotron Resonance (ECR) plasma system with various pressures and power inputs in a non-uniform magnetic field. By means of numerical simulation, the energy distributions of argon ion impacting on the wafer are obtained and the plasma density, electron temperature and plasma electrostatic potential are plotted in 3-D. It is concluded that the plasma density depends mainly on both the power input and neutral gas pressure. However, the plasma potential and electron temperature can hardly be affected by the power input, they seem to be primarily dependent on the neutral gas pressure. The comparison shows that the simulation results are qualitatively in good agreement with the experiment measurements.

Domain decomposition hybrid method for numerical simulation of bluff body flows:theoretical model and application

The discrete vortex method is not capable of precisely predicting the bluff body flow separation and the fine structure of flow field in the vicinity of the body surface. In order to make a theoretical improvement over the method and to reduce the difficulty in finite-difference solution of N-S equations at high Reynolds number, in the present paper, we suggest a new numerical simulation model and a theoretical method for domain decomposition hybrid combination of finite-difference method and vortex method. Specifically, the full flow. field is decomposed into two domains. In the region of O(R) near the body surface (R is the characteristic dimension of body), we use the finite-difference method to solve the N-S equations and in the exterior domain, we take the Lagrange-Euler vortex method. The connection and coupling conditions for flow in the two domains are established. The specific numerical scheme of this theoretical model is given. As a preliminary application, some numerical simulations for flows at Re=100 and Re-1000 about a circular cylinder are made, and compared with the finite-difference solution of N-S equations for full flow field and experimental results, and the stability of the solution against the change of the interface between the two domains is examined. The results show that the method of the present paper has the advantage of finite-difference solution for N-S equations in precisely predicting the fine structure of flow field, as well as the advantage of vortex method in efficiently computing the global characteristics of the separated flow. It saves computer time and reduces the amount of computation, as compared with pure N-S equation solution. The present method can be used for numerical simulation of bluff body flow at high Reynolds number and would exhibit even greater merit in that case.

An asymptotic analysis for one dimensional stress wave propagation in damaged viscoelastic media

A regular perturbation technique is suggested to deal with the problem of one dimensional stress wave propagation in viscoelastic media with damage. Based upon the first order asymptotic solution obtained, the characteristics of wave attenuation are studied. In fact, there exist three different time-dependent phenomena featuring the dynamic response of the materials, the first expressing the characteristics of wave propagation, the second indicating the innate effect of visco-elastic matrix and the third coming from the time dependent damage. The comparision of first order asymptotic solution with the numerical results calculated by a finite difference procedure shows that the perturbation expansion technique may offer a useful approach to the problem concerned.

Compressible laminar boundary-layer flows of a dusty gas over a semi-infinite flat-plate

The compressible laminar boundary-layer flows of a dilute gas-particle mixture over a semi-infinite flat plate are investigated analytically. The governing equations are presented in a general form where more reasonable relations for the two-phase interaction and the gas viscosity are included. The detailed flow structures of the gas and particle phases are given in three distinct regions : the large-slip region near the leading edge, the moderate-slip region and the small-slip region far downstream. The asymptotic solutions for the two limiting regions are obtained by using a seriesexpansion method. The finite-difference solutions along the whole length of the plate are obtained by using implicit four-point and six-point schemes. The results from these two methods are compared and very good agreement is achieved. The characteristic quantities of the boundary layer are calculated and the effects on the flow produced by the particles are discussed. It is found that in the case of laminar boundary-layer flows, the skin friction and wall heat-transfer are higher and the displacement thickness is lower than in the pure-gas case alone. The results indicate that the Stokes-interaction relation is reasonable qualitatively but not correct quantitatively and a relevant non-Stokes relation of the interaction between the two phases should be specified when the particle Reynolds number is higher than unity.

Numerical Simulation of R-M Instability

In order to capture shock waves and contact discontinuities in the field and easy to program with parallel computation a new algorithm is developed to solve the N-S equations for simulation of R-M instability problems. The method with group velocity control is used to suppress numerical oscillations, and an adaptive non-uniform mesh is used to get fine resolution. Numerical results for cylindrical shock-cylindrical interface interaction with a shock Mach number Ms=1.2 and Atwood number A=0.818, 0.961, 0.980 (the interior density of the interface/outer density p(1)/p(2) = 10, 50, 100, respectively), and for the planar shock-spherical interface interaction with Ms=1.2 and p(1)/p(2) = 14.28are presented. The effect of Atwood number and multi-mode initial perturbation on the R-M instability are studied. Multi-collisions of the reflected shock with the interface is a main reason of nonlinear development of the interface instability and formation of the spike-bubble structures In simulation with double mode perturbation vortex merging and second instability are found. After second instability the small vortex structures near the interface produced. It is important factor for turbulent mixing.

Effects of Thermocapillary Convection on the Growth Process in Industrial 8-inch Silicon Czochralski Growth

Czochralski (CZ) crystal growth process is a widely used technique in manufacturing of silicon crystals and other semiconductor materials. The ultimate goal of the IC industry is to have the highest quality substrates, which are free of point defect, impurities and micro defect clusters. The scale up of silicon wafer size from 200 mm to 300 mm requires large crucible size and more heat power. Transport phenomena in crystal growth processes are quite complex due to melt and gas flows that may be oscillatory and/or turbulent, coupled convection and radiation, impurities and dopant distributions, unsteady kinetics of the growth process, melt crystal interface dynamics, free surface and meniscus, stoichiometry in the case of compound materials. A global model has been developed to simulate the temperature distribution and melt flow in an 8-inch system. The present program features the fluid convection, magnetohydrodynamics, and radiation models. A multi-zone method is used to divide the Cz system into different zones, e.g., the melt, the crystal and the hot zone. For calculation of temperature distribution, the whole system inside the stainless chamber is considered. For the convective flow, only the melt is considered. The widely used zonal method divides the surface of the radiation enclosure into a number of zones, which has a uniform distribution of temperature, radiative properties and composition. The integro-differential equations for the radiative heat transfer are solved using the matrix inversion technique. The zonal method for radiative heat transfer is used in the growth chamber, which is confined by crystal surface, melt surface, heat shield, and pull chamber. Free surface and crystal/melt interface are tracked using adaptive grid generation. The competition between the thermocapillary convection induced by non-uniform temperature distributions on the free surface and the forced convection by the rotation of the crystal determines the interface shape, dopant distribution, and striation pattern. The temperature gradients on the free surface are influenced by the effects of the thermocapillary force on the free surface and the rotation of the crystal and the crucible.

槽道湍流的直接数值模拟

通过直接数值模拟(DNS)研究槽道湍流的性质和机理。包含五个部分：1）湍流直接数值模拟的差分方法研究。2）求解不可压N－S方程的高效算法和不可压槽道湍流的直接数值模拟。3）可压缩槽道湍流的直接数值模拟和压缩性机理分析。4）“二维湍流”的机理分析。5）槽道湍流的标度律分析。1．针对壁湍流计算网格变化剧烈的特点，构造了基于非等距网格的的迎风紧致格式。该方法直接针对计算网格构造格式中的系数，克服了传统方法采用 Jacobian 变换因网格变化剧烈而带来的误差。针对湍流场的多尺度特性分析了差分格式的精度、网格尺度与数值模拟能分辨的最小尺度的关系，给出不同差分格式对计算网格步长的限制。同时分析了计算中混淆误差的来源和控制方法，指出了迎风型紧致格式能很好地控制混淆误差。2．将上述格式与三阶精度的Adams半隐格式相结合，构造了不可压槽道湍流直接数值模拟的高效算法。该算法利用基于交错网格的离散形式的压力Poisson方程求解压力项，避免了压力边界条件处理的困难。利用FFT对方程中的隐式部分进行解耦，解耦后的方程采用追赶法（LU分解法）求解，大大减少了计算量。为了检验该方法，进行了三维不可压槽道湍流的直接数值模拟，得到了Re＝2800的充分发展不可压槽道湍流，并对该湍流场进行了统计分析。包括脉动速度偏斜因子在内的各阶统计量与实验结果及Kim等人的计算结果吻合十分理想，说明本方法是行之有效的。3．进行了三维充分发展的可压缩槽道湍流的直接数值模拟。得到了 Re=3300，Ma=0.8的充分发展可压槽道湍流的数据库。流场的统计特征（如等效平均速度分布，“半局部”尺度无量纲化的脉动速度均方根）和他人的数值计算结果吻合。得到了可压槽道湍流的各阶统计量，其中脉动速度的偏斜因子和平坦因子等高阶统计量尚未见其他文献报道。同时还分析了压缩性效应对壁湍流影响的机理，指出近壁处的压力－膨胀项将部分湍流脉动的动能转换成内能，使得可压湍流近壁速度条带结构更加平整。4．模拟了二维不可压槽道流动的饱和态（所谓“二维湍流”），分析了“二维槽道湍流”的非线性行为特征。分析了流场中的上抛－下扫和间歇现象，研究了“二维湍流”与三维湍流的区别。指出“二维湍流”反映了三维湍流的部分特征，同时指出了展向扰动对于湍流核心区发展的重要性。5．首次对可压缩槽道湍流及“二维槽道湍流”标度律进行了分析，得出了以下结论：a）槽道湍流中，在槽道中心线附近较宽的区域，存在标度律。b）该区域流场存在扩展自相似性（ESS）。c）在Mach数不是很高时，压缩性对标度指数影响不大。本文结果同SL标度律的理论值吻合较好，有效支持了该理论。对“二维槽道湍流”也有相似的结论，但与三维湍流不同的是，“二维槽道湍流”存在标度律的区域更宽，近壁处的标度指数比中心处有所升高。

Prevalence Of Shear Banding In Compression Of Zr41Ti14Cu12.5Ni10Be22.5 Pillars As Small As 150 Nm In Diameter

Recently, the size dependence of mechanical behaviors, particularly the yield strength and plastic deformation mode, of bulk metallic glasses (BMG) has created a great deal of interest. Contradicting conclusions have been drawn by different research groups, based on various experiments on different BMG systems. Based on in situ compression transmission electron microscopy (TEM) experiments on Zr41Ti14Cu12.5Ni10Be22.5 (Vit 1) nanopillars, this paper provides strong evidence that shear banding still prevails at specimen length scales as small as 150 nm in diameter. This is supported by in situ and ex situ images of shear bands, and by the carefully recorded displacement bursts under load control its well as load drops under displacement control. Finite element modeling of the stress state within the pillar shows that the unavoidable geometry constraints accompanying such experiments impart a strong effect on the experimental results, including non-uniform stress distributions and high level hydrostatic pressures. The seemingly improved compressive ductility is believed to be due to such geometry constraints. Observations underscore the notion that the mechanical behavior of metallic glasses, including strength and plastic deformation mode, is size independent at least in Vit 1. (C) 2009 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.

Numerical study of sub-wavelength plasmonic waveguide

The authors present an analysis of a plasmonic waveguide, simulated using a two-dimensional finite-difference time-domain technique. With the surface structures located on the surface of the metal, the device is able to confine and guide light waves in a sub-wavelength scale. And two waveguides can be placed within 150 nm (similar to 6% of the incident wavelength) that will helpful for the optoelectronic integration. Within the 20 mu m simulation region, it is found that the intensity of the guided light at the interface is roughly two to four times the peak intensity of the incident light, and the propagation length can reach approximately 40 Pm at the wavelength of 2.44 mu m. (c) 2007 Elsevier B.V. All rights reserved.

Resonant Enhanced Wave Filter and Waveguide via Surface Plasmons

The authors present an analysis of plasmonic wave filter and curved waveguide, simulated using a 2-D finite-difference time-domain technique. With different dielectric materials or surface structures located on the interface of the metal/dielectric, the resonant enhanced wave filter can divide light waves of different wavelengths and guide them with low losses. And the straight or curved waveguide can confine and guide light waves in a subwavelength scale. Within the 20 mu m simulation region, it is found that the intensity of the guided light at the interface is roughly four times the peak intensity of the incident light.

Analysis of mode characteristics for deformed square resonators by FDTD technique

The mode frequencies and quality factors (Q-factors) in two-dimensional (2-D) deformed square resonators are analyzed by finite-difference time-domain (FDTD) technique. The results show that the deformed square cavities with circular and cut corners have larger Q-factors than the perfect ones at certain conditions. For a square cavity with side length of 2 mu m and refractive index of 3.2, the mode Q-factor can increase 13 times as the perfect corners are replaced by a quarter of circle with radius of 0.3 pm. Furthermore the blue shift with the increasing deformations is found as a result of the reduction in effective resonator area. In square cavities with periodic roughness at sidewalls which maintains the symmetry of the square, the Q-factors of the whisperin gallery (WG)-like modes are still one order of magnitude larger that those of non-WG-like modes. However, the Q-tactors of these two types of modes are of the same order in the square cavity with random roughness. We also find that the rectangular and rhombic deformation largely reduce the Q-factors with the increasing offset and cause the splitting of the doubly degenerate modes due to the breaking of certain symmetry properties.

Effect of dopant concentration on photocatalytic activity of TiO2 film doped by Mn non-uniformly

The thin films of TiO2 doped by Mn non-uniformly were prepared by sol-gel method under process control. In our preceding study, we investigated in detail, the effect of doping mode on the photocatalytic activity of TiO2 films showing that Mn non-uniform doping can greatly enhance the activity. In this study we looked at the effect of doping concentration on the photocatalytic activity of the TiO2 films. In this paper, the thin films were characterized by UV-vis spectrophotometer and electrochemical workstation. The activity of the photocatalyst was also evaluated by photocatalytic degradation rate of aqueous methyl orange under UV radiation. The results illustrate that the TiO2 thin film doped by Mn non-uniformly at the optimal dopant concentration (0.7 at %) is of the highest activity, and on the contrary, the activity of those doped uniformly is decreased. As a comparison, in 80 min, the degradation rate of methyl orange is 62 %, 12 % and 34 % for Mn non-uniform doping film (0.7 at %), the uniform doping film (0.7 at %) and pure titanium dioxide film, respectively. We have seen that, for the doping and the pure TiO2 films, the stronger signals of open circuit potential and transient photocurrent, the better photocatalytic activity. We also discusse the effect of dopant concentration on the photocatalytic activity of the TiO2 films in terms of effective separation of the photon-generated carriers in the semiconductor. (C) Versita Warsaw and Springer-Verlag Berlin Heidelberg. All rights reserved.

森林流域单元水文模型的构建与应用

目前全球缺水、水污染、洪涝灾害以及水土流失仍然非常严重，尤其在我国北方地区。流域水文模型可用来进行不同需水管理的情景分析，为解决我国水问题提供科学依据。分布式水文模型是流域水文模型的发展方向，具有显著特点：1）应用前景广泛，不仅可以模拟流域水文过程，还可以协助模拟泥沙或污染物的运移过程，为水利工程设计、水土保持、环境保护等领域提供技术支持；2）能够预测流域土地利用或气候变化下的流域水文响应过程变化，为管理部门提供决策支持；3）模型所需要的参数全部具有物理意义，可通过实际测量确定，适合模拟实测系列较短或是无观测流域的水文过程；4）对于目前国际水文界的前沿问题—水文尺度转换提供了一种有效的解决途径。 然而分布式水文模型还不完善，如1)真实性问题。对一些水文过程和边界条件还不确定。2)尺度转换问题。目前很少考虑尺度对参数有效性的影响。3)检验问题。还无法判断对有些难以测量的水文状态变量的模拟正确与否。4)计算时间和数据存储的问题。有些分布式水文模型虽然具有很强的水文物理基础和完善的模型结构，但是计算时间过长和(或)数据存储过大，难以应用。上述问题的核心就是对分布式水文模型的核心—单元水文模型的研究不够，需要为进一步完善单元水文模型进行研究。 本文采用饱和入渗理论、Saint-Venant方程、Richards方程、Penman-Monteith方程等等构建了以有限差分法求解的适用于森林流域的单元水文模型，并通过实验室模拟试验和坡地径流场资料进行了验证，主要结论为： 通过不同坡度和不同雨强下的室内坡面产汇流实验模拟，表明：该模型模拟的坡面流和壤中流过程与实测过程基本一致，峰现时间、径流历时、峰值流量、出流总量模拟值与实测值的相对误差均较小，基本小于10%。模型的模拟精度较高，实用性较强，为深入研究壤中流机制和改进流域降雨-径流模型提供了理论依据。 通过坡地径流观测场实测资料的验证，表明：该模型模拟的坡面流过程精度较高，累计流量的精度更高于小时过程的精度，离差系数、效率系数、确定系数均较理想，具有应用价值，有助于改善分布式水文模型在森林流域的模拟效果。

Effects of Magnetohydrodynamic Interaction-Zone Position on Shock-Wave/Boundary-Layer Interaction

A third-order weighted essentially nonoscillatory and non-free-parameter difference scheme magnetohydrodynamic solver has been established to investigate the mechanisms of magnetohydrodynamics controlling separation induced by an oblique shock wave impinging on a flat plate. The effects of magnetohydrodynamic interaction-zone location on the separation point, reattachment point, separation-bubble size, and boundary-layer velocity profiles are analyzed. The results show that there exists a best location for the magnetohydrodynamic zone to be applied, where the separation point is delayed the farthest, and the separation bubble is decreased up to about 50% in size compared to the case without magnetohydrodynamic control, which demonstrated the promising of magnetohydrodynamics suppressing the separation induced by shock-wave/boundary-layer interactions.

Spatial resolved temperature measurement based on absorption spectroscopy using a single tunable diode laser

A novel method based on wavelength-multiplexed line-of-sight absorption and profile fitting for non-uniform flow field measurement is reported. A wavelength scanning combing laser temperature and current modulation WMS scheme is used to implement the wavelength-multiplexed-profile fitting method. Second harmonic (2f) signal of eight H2O transitions features near 7,170 cm(-1) are measured in one period using a single tunable diode laser. Spatial resolved temperature distribution upon a CH4/air premixed flat flame burner is obtained. The result validates the feasibility of strategy for non-uniform flow field diagnostics by means of WMS-2f TDLAS.