Impact of polarized illumination on high NA imaging in ArF immersion lithography at 45 nm node

Immersion lithography has been considered as the mainstream technology to extend the feasibility of optical lithography to further technology nodes. Using proper polarized illumination in an immersion lithographic tool is a powerful means to enhance the image quality and process capability for high numerical aperture (NA) imaging. In this paper, the impact of polarized illumination on high NA imaging in ArF immersion lithography for 45 nm dense lines and semi-dense lines is studied by PROLITH simulation. The normalized image log slope (NILS) and exposure defocus (ED) window are simulated under various polarized illumination modes, and the impact of polarized illumination on image quality and process latitude is analyzed. (C) 2007 Elsevier GmbH. All rights reserved.

Subwavelength imaging by a dielectric-tube photonic crystal

In contrast to previous two-dimensional coated photonic crystals, in this paper we propose a left-handed one that is made of dielectric tubes arranged in a close-packed hexagonal lattice. Without metallic cores, this structure is low-loss and convenient to fabricate. Negative refraction and its resulting focusing are investigated by dispersion characteristic analysis and numerical simulation of the field pattern. With proper modification at the interface, the image is improved. With better isotropy than that with noncircular rods, planoconcave lenses made by dielectric tubes focus a Gaussian beam exactly at R//n - 1/.

Subwavelength imaging with two symmetrical interfaces by dielectric-tube photonic crystals

As distinct from coated photonic crystals, in this paper we propose a novel one that is made of dielectric tubes arranged in a close-packet square lattice. Without metallic cores, this structure is low-loss and convenient to fabricate. A left-handed frequency region is found in the second band by dispersion characteristic analysis. Without inactive modes for the transverse electric mode, negative refraction and subwavelength imaging are demonstrated by the finite-difference time-domain simulations with two symmetrical interfaces, i.e. Gamma X and Gamma M.

Quasi-self-imaging planar waveguide lasers with high-power single-mode output

We describe high-power planar waveguide laser which can achieve single-mode output from a multi-mode structure. The planar waveguide is constructed with incomplete self-imaging properties, by which the coupling loss of each guided mode can be discriminated. Thermal lens effects are evaluated for single-mode operation of such high-power diode-pumped solid-state lasers. (c) 2005 Elsevier B.V. All rights reserved.

Experimental demonstration of phase locking of a two-dimensional fiber laser array using a self-imaging resonator

Phase locking of a two-dimensional fiber laser array is experimentally demonstrated by using a self-imaging resonator and a spatial filter. The stable beam profiles of in-phase mode and out-of-phase mode are observed by controlling the position of spatial filter. The phase locking fiber array with in-phase mode has produced 26 W coherent output. An antisymmetric eigenmode is also observed in our experiments. The phase locking is not sensitive to power variations among the pump beams and the configuration has the ability to repair a missing element. (C) 2008 American Institute of Physics.

A novel polarization modulator for a Moire system with grating imaging

A polarization modulator based on splitting with a Savart plate and rotation of an analyzer for a moire system with grating imaging is presented, and its modulation principle is analyzed. The polarization modulator is simple and achromatic. It is composed of a polarizer, a Savart plate, and an analyzer. The polarizer and the Savart plate are placed in front of the index grating to split the image of the scale grating in the moire system. The analyzer is placed behind the grating and rotated to realize the modulation of the moire signal. The analyzer can be rotated either continually with high speed or step by step with low speed to form different modulation modes. The polarization modulator makes the moire system insensitive to the change of initial intensity. In experiments, we verified the usefulness of the polarization modulator.