星间激光通讯中的精跟踪研究

星间激光通讯中，精跟踪起着十分重要的作用，而精密偏转镜（FSM）是精跟踪系统中最为关键的部件．基于光学矢量反射定律，推导得到了FSM的精确光学特性，这一特性为精跟踪控制系统提供了精确的理论依据．设计了基于FSM精确光学特性的精跟踪控制系统，对系统整定所用的单纯形法进行了两点重要改进，并对所设计的精跟踪系统进行了数字模拟，由此实现了对FSM的精确控制，提高了精跟踪系统的精确性；将光学衍射超分辨原理应用到星间激光通讯中．利用三区位相光瞳滤波器的超分辨性能，改变光学系统的点扩散函数，从而改变接收端焦平面上的光强

星间光通信中的APT技术及其控制系统

APT（Acquisition Pointing and Tracking）技术是星间光通信的关键技术。介绍了该技术中的扫描、捕获、指向、跟踪过程及其控制系统，重点论述了实现跟踪的困难性，相应地介绍了一种有效的扰动抑制控制系统。

Extended fractional Fourier transforms

The concept of an extended fractional Fourier transform (FRT) is suggested. Previous PBT's and complex FRT's are only its subclasses. Then, through this concept and its method, we explain the physical meaning of any optical Fresnel diffraction through a lens: It is just an extended FRT; a lens-cascaded system can equivalently be simplified to a simple analyzer of the FRT; the two-independent-parameter FRT of an object illuminated with a plane wave can be readily implemented by a lens of arbitrary focal length; when cascading, the Function of each lens unit and the relationship between the adjacent ones are clear and simple; and more parameters and fewer restrictions on cascading make the optical design easy. (C) 1997 Optical Society of America.

Enlarging the depth of focus by filtering in the phase-space domain

The ambiguity function was employed as a merit function to design an optical system with a high depth of focus. The ambiguity function with the desired enlarged-depth-of-focus characteristics was obtained by using a properly designed joint filter to modify the ambiguity function of the original pupil in the phase-space domain. From the viewpoint of the filter theory, we roughly propose that the constraints of the spatial filters that are used to enlarge the focal depth must be satisfied. These constraints coincide with those that appeared in the previous literature on this topic. Following our design procedure, several sets of apodizers were synthesized, and their performances in the defocused imagery were compared with each other and with other previous designs. (c) 2005 Optical Society of America.

透镜自重变形引起波像差的有限元分析

在用大口径、长焦距平行光管模拟激光远场特性时，其光组透镜在重力作用下的变形不能忽略，为了分析对出射光束质量的影响，采用有限元分析软件“ANSYS”建立了平行光管光组中声400mm平凸透镜的有限元模型，给出一种分析透镜轴向变形引起的波像差的方法，在不同工况下，计算了平凸透镜在重力作用下轴向变形的峰谷值和均方根值，对轴向变形量均方根值最小工况画出了透镜表面变形的等值线图，计算了声350mm通光口径内的波像差峰谷值和均方根值，对平行光管光组的波像差做出估计，验证了设计的合理性。

Influences of phase shift on superresolution performances of annular filters

This paper investigates the influences of phase shift on superresolution performances of annular filters. Firstly, it investigates the influence of phase shift on axial superresolution. It proves theoretically that axial superresolution can not be obtained by two-zone phase filter with phase shift pi, and it gets the phase shift with which axial superresolution can be brought by two-zone phase filter. Secondly, it studies the influence of phase shift on transverse superresolution. It finds that the three-zone phase filter with arbitrary phase shift has an almost equal optimal transverse gain to that of commonly used three-zone phase filter, but can produce a much higher axial superresolution gain. Thirdly, it investigates the influence of phase shift on three-dimensional superresolution. Three-dimensional superresolution capability and design margin of three-zone complex filter with arbitrary phase shift are obtained, which presents the theoretical basis for three-dimensional superresolution design. Finally, it investigates the influence of phase shift on focal shift. To obtain desired focal shifts, it designs a series of three-zone phase filters with different phase shifts. A spatial light modulator (SLM) is used to implement the designed filters. By regulating the voltage imposed on the SLM, an accurate focal shift control is obtained.

Analysis of optical systems with extended depth of field using the Wigner distribution function

We describe the use of a Wigner distribution function approach for exploring the problem of extending the depth of field in a hybrid imaging system. The Wigner distribution function, in connection with the phase-space curve that formulates a joint phase-space description of an optical field, is employed as a tool to display and characterize the evolving behavior of the amplitude point spread function as a wave propagating along the optical axis. It provides a comprehensive exhibition of the characteristics for the hybrid imaging system in extending the depth of field from both wave optics and geometrical optics. We use it to analyze several well-known optical designs in extending the depth of field from a new viewpoint. The relationships between this approach and the earlier ambiguity function approach are also briefly investigated. (c) 2006 Optical Society of America.

Wavefront conversion by local volume holograms between cylindrical and plane waves with reconstruction at a different readout wavelength

Based on the two-dimensional coupled-wave theory, the wavefront conversion between cylindrical and plane waves by local volume holograms recorded at 632.8 nm and reconstructed at 800 nm is investigated. The proposed model can realize the 90 degrees holographic readout at a different readout wavelength. The analytical integral solutions for the amplitudes of the space harmonics of the field inside the transmission geometry are presented. The values of the off-Bragg parameter at the reconstructed process and the diffracted beam's amplitude distribution are analysed. In addition, the dependences of diffraction efficiency on the focal length of the recording cylindrical wave and on the geometrical dimensions of the grating are discussed. Furthermore, the focusing properties of this photorefractive holographic cylindrical lens are analysed.

基于镜像焦面检测对准标记的套刻性能原位测量技术

套刻性能是现代高精度步进扫描投影光刻机的重要性能指标之一。提出了一种基于镜像焦面检测对准标记（简称“镜像焦面检测对准标记”）的光刻机套刻性能原位测量技术。该技术通过对曝光在硅片上的镜像焦面检测对准标记图形进行光学对准，利用标记图形对准位置与理想位置偏差实现套刻性能的原位检测。实验结果表明该技术在进行套刻误差的精确测量的同时还可以全面、定量地计算影响光刻机单机套刻误差的场内参量及场间参量。与目前套刻性能原位测量技术相比，该技术有效地避免了测量精度对轴向像质限制的依赖，简化了光刻机整机性能检测的过程。

电控径向滤波器的横向超分辨与轴向焦移

提出一种光瞳滤波器来同时实现横向超分辨和轴向焦移效应的电控制．该光瞳滤波器由两偏光镜及包含有径向双折射元件的任意偏振态的电控旋光器组成。利用径向双折射元件对光偏振态的空间调制作用，结合旋光器对任意偏振态光的旋光作用，与两个偏光镜结合，实现了空间偏振态的重新分布．利用庞加莱球及琼斯理论进行了分析，结果表明，借助这种电致位相延迟来实现的偏振态调制效应，可同时实现横向超分辨与轴向焦移效应。对能够同时获得横向超分辨与轴向焦移的情况进行了分析，得到了系统各组成参量及电光调制范围。

光刻机硅片表面不平度原位检测技术

随着光刻特征尺寸的不断减小，硅片表面不平度对光刻性能的影响越来越显著．该文提出了一种新的硅片表面不平度的原位检测技术本文在分析特殊测试标记成像规律的基础上，讨论了测试标记的对准位置偏移量与硅片袁面起伏高度的变化规律，提出了一种新的硅片表面不平度原位检测技术．实验表明，该技术可实现硅片表面不平度及硅片表面形貌的高准确度原位测量．该技术考虑了光刻机承片台吸附力的非均匀性对硅片表面不平度的影响，更真实反映曝光工作状态下的硅片表面不平度大小．与现有的原位检测方法相比，硅片表面不平度的测量空间分辨率提高了1．67％

平面交叉型微透镜阵列的制作及成像特性研究

介绍了采用光刻离子交换工艺制作平面交叉型微透镜阵列的方法。利用积分形式的光线方程式讨论了平面交叉型微透镜的近轴光学特性，研究了微透镜的光线轨迹方程式和一些重要的近轴成像特性，利用ABCD定理得到了平面交叉型微透镜像距、焦距、像高、横向放大率和主平面位置的数学表达式，焦距的理论计算结果和实验数据吻合得很好。

激光脉冲宽度对有质动力加速电子的影响

基于真空中单电子运动模型，编程计算得到了高斯激光脉冲与初始位于激光传播轴上电子的相互作用结果。不同激光参鼍条件下，得到了电子的能量增益与激光强度、焦斑大小和脉冲宽度关系。结果表明，高斯激光脉冲焦斑较大时，电子没有明显的能量增益，高斯激光脉冲焦斑太小时，电子也没有明显的能量增益。电子的能量增益有一个最佳焦斑大小。在相同激光强度下，电子能量增益的最佳焦斑大小随脉冲宽度的增大而增大，但最佳焦斑大小与脉冲宽度的比值基本上是不变的。

Improved uniformity of target illumination by combining a lens array and the technique of spectral dispersion

A scheme using a lens array and the technique of spectral dispersion is presented to improve target illumination uniformity in laser produced plasmas. Detailed two-dimensional simulation shows that a quasi-near-field target pattern, of steeper edges and without side lobes, is achieved with a lens array, while interference stripes inside the pattern are smoothed out by the use of the spectral dispersion technique. Moving the target slightly from the exact focal plane of the principal focusing lens can eliminate middle-scale-length intensity fluctuation further. Numerical results indicate that a well-irradiated laser spot with small nonuniformity and great energy efficiency can be obtained in this scheme. (c) 2007 American Institute of Physics.

Beam smoothing by lens array with spectral dispersion

A scheme of combining technology of lens array (LA) and smoothing by spectral dispersion (SSD) is introduced to improve the irradiation uniformity in laser fusion based on the earlier works on LA. The feasibility of the scheme is also analyzed by numerical simulation. It shows that a focal pattern with flat-top and sharp-edge profile could be obtained, and the irradiation nonuniformity can fall down from 14% with only LA to 3% with both SSD and LA. And this smoothing scheme is depended less on the incidence comparing to other smoothing methods. The preliminary experiment has demonstrated its effectiveness. (c) 2006 Elsevier B.V. All rights reserved.