Fracture Properties of LPCVD Silicon Nitride and Thermally Grown Silicon Oxide Thin Films From the Load-Deflection of Long Si3N4 and SiO2/Si3N4 Diaphragms

The bulge test is successfully extended to the determination of the fracture properties of silicon nitride and oxide thin films. This is achieved by using long diaphragms made of silicon nitride single layers and oxide/nitride bilayers, and applying comprehensive mechanical model that describes the mechanical response of the diaphragms under uniform differential pressure. The model is valid for thin films with arbitrary z-dependent plane-strain modulus and prestress, where z denotes the coordinate perpendicular to the diaphragm. It takes into account the bending rigidity and stretching stiffness of the layered materials and the compliance of the supporting edges. This enables the accurate computation of the load-deflection response and stress distribution throughout the composite diaphragm as a function of the load, in particular at the critical pressure leading to the fracture of the diaphragms. The method is applied to diaphragms made of single layers of 300-nm-thick silicon nitride deposited by low-pressure chemical vapor deposition and composite diaphragms of silicon nitride grown on top of thermal silicon oxide films produced by wet thermal oxidation at 950 degrees C and 1050 degrees C with target thicknesses of 500, 750, and 1000 mn. All films characterized have an amorphous structure. Plane-strain moduli E-ps and prestress levels sigma(0) of 304.8 +/- 12.2 GPa and 1132.3 +/- 34.4 MPa, respectively, are extracted for Si3N4, whereas E-ps = 49.1 +/- 7.4 GPa and sigma(0) = -258.6 +/- 23.1 MPa are obtained for SiO2 films. The fracture data are analyzed using the standardized form of the Weibull distribution. The Si3N4 films present relatively high values of maximum stress at fracture and Weibull moduli, i.e., sigma(max) = 7.89 +/- 0.23 GPa and m = 50.0 +/- 3.6, respectively, when compared to the thermal oxides (sigma(max) = 0.89 +/- 0.07 GPa and m = 12.1 +/- 0.5 for 507-nm-thick 950 degrees C layers). A marginal decrease of sigma(max) with thickness is observed for SiO2, with no significant differences between the films grown at 950 degrees C and 1050 degrees C. Weibull moduli of oxide thin films are found to lie between 4.5 +/- 1.2 and 19.8 +/- 4.2, depending on the oxidation temperature and film thickness.

Mechanical Deformation Behavior of Nonpolar GaN Thick Films by Berkovich Nanoindentation

In this study, the deformation mechanisms of nonpolar GaN thick films grown on m-sapphire by hydride vapor phase epitaxy (HVPE) are investigated using nanoindentation with a Berkovich indenter, cathodoluminescence (CL), and Raman microscopy. Results show that nonpolar GaN is more susceptible to plastic deformation and has lower hardness than c-plane GaN. After indentation, lateral cracks emerge on the nonpolar GaN surface and preferentially propagate parallel to the < 11 (2) over bar0 > orientation due to anisotropic defect-related stresses. Moreover, the quenching of CL luminescence can be observed to extend exclusively out from the center of the indentations along the < 11 (2) over bar0 > orientation, a trend which is consistent with the evolution of cracks. The recrystallization process happens in the indented regions for the load of 500 mN. Raman area mapping indicates that the distribution of strain field coincides well with the profile of defect-expanded dark regions, while the enhanced compressive stress mainly concentrates in the facets of the indentation.

Relationship between load/unload response ratio and damage variable and its application

The physics-based parameter: load/unload response ratio (LURR) was proposed to measure the proximity of a strong earthquake, which achieved good results in earthquake prediction. As LURR can be used to describe the damage degree of the focal media qualitatively, there must be a relationship between LURR and damage variable (D) which describes damaged materials quantitatively in damage mechanics. Hence, based on damage mechanics and LURR theory, taking Weibull distribution as the probability distribution function, the relationship between LURR and D is set up and analyzed. This relationship directs LURR applied in damage analysis of materials quantitatively from being qualitative earlier, which not only provides the LURR method with a more solid basis in physics, but may also give a new approach to the damage evaluation of big scale structures and prediction of engineering catastrophic failure. Copyright (c) 2009 John Wiley & Sons, Ltd.

Relationship between load/unload response ratio and damage variable and its application

The physics-based parameter: load/unload response ratio (LURR) was proposed to measure the proximity of a strong earthquake, which achieved good results in earthquake prediction. As LURR can be used to describe the damage degree of the focal media qualitatively, there must be a relationship between LURR and damage variable (D) which describes damaged materials quantitatively in damage mechanics. Hence, based on damage mechanics and LURR theory, taking Weibull distribution as the probability distribution function, the relationship between LURR and D is set up and analyzed. This relationship directs LURR applied in damage analysis of materials quantitatively from being qualitative earlier, which not only provides the LURR method with a more solid basis in physics, but may also give a new approach to the damage evaluation of big scale structures and prediction of engineering catastrophic failure. Copyright (c) 2009 John Wiley & Sons, Ltd.

Study on the Cell Structure and Compressive Behavior of Biodegradable Poly(epsilon-caprolactone) Foam

Biodegradable poly(e-caprolactone) (PCL) foams with a series of controlled structures were prepared by using chemical foaming method. The cell morphology was detected by scanning electron microscope (SEM). The compressive behavior of the foams was investigated by uniaxial compression test. The effect of density and structural parameters on the foam compressive behavior was analyzed. It was found that the relative compressive modulus has a power law relationship with relative density. Increasing of both the cell wall thickness and the cell density lead to higher compressive modulus of the foam; however, the cell size has no distinct effect on compressive behavior.

Studies on the alkylation of isobutane with butene over WO3/ZrO2 strong solid acid (I) - Effect of preparation, load of WO3 and calcination temperature

A series of WO3/ZrO2 strong solid acid prepared under different conditions were studied. Their crystal structures, surface properties and acidities were determined by means of XRD, DTA-TG, H-2- TPR, Laser Raman and acidity measurements. The results revealed that ZrO2 in WO3/ZrO2 existed mainly in tetragonal phase, the addition of WO3 plays an important role to stabilize tetragonal phase of ZrO2 and thus the catalyst had a considerable surface area. WO3 in WO3/ZrO2 was dispersed and crystalized in WO3 crystalite on ZrO2 surface and partly reacted with ZrO2 to form the bond of Zr-O-W, which acts as the strong solid acid site. The catalytic properties of WO3/ZrO2 strong solid acid for alkylation of iso-butane with butene under the different conditions were investigated. They had a better reaction performance than other strong solid acids, a parallel relationship could be drawn between the catalytic activity and the amount of acid sites as well as the acidic strength of the catalysts.

基于窗口精细结构描述的岩体质量评价及力学参数综合优选

This thesis bases on horizontal research project “The research about the fine structure and mechanical parameters of abutment jointed rock mass of high arch dam on Jinping Ⅰ Hydropower Station, Yalong River” and “The research about the fine structure and mechanical parameters of the columnar basalt rock mass on Baihetan Hydropower Station, Jinsha River”. A rounded system about the fine structure description and rock mass classification is established. This research mainly contains six aspects as follow: (1) Methods about fine structure description of the window rock mass; (2) The window rock mass classification about the fine structure; (3) Model test study of intermittent joints; (4) Window rock mass strength theory; (5) Numerical experimentations about window rock mass; (6) The multi-source fusion of mechanical parameters based on Bayes principle. Variation of intact rock strength and joint conditions with the weathering and relaxation degree is studied through the description of window rock mass. And four principal parameters: intact rock point load strength, integration degree of window rock mass, joint conditions, and groundwater condition is selected to assess the window rock mass. Window rock mass is classified into three types using the results of window rock mass fine structure description combined with joints develop model. Scores about intact rock strength, integrality condition, divisional plane condition and groundwater conditions are given based on window rock mass fine structure description. Then quality evaluation about two different types of rock mass: general joint structure and columnar jointing structure are carried out to use this window rock mass classification system. Application results show that the window rock mass classification system is effective and applicable. Aimed at structural features of window structure of “the rock mass damaged by recessive fracture”, model tests and numerical models are designed about intermittent joints. By conducting model tests we get shear strength under different normal stress in integrated samples, through samples and intermittent joints samples. Also, the changing trends of shear strength in various connectivity rates are analyzed. We numerically simulate the entire process of direct shear tests by using PFC2D. In order to tally the stress-strain curve of numerical simulation with experimental tests about both integrated samples and through samples, we adjust mechanical factors between particles. Through adopting the same particle geometric parameter, the numerical sample of intermittent joints in different connective condition is re-built. At the same time, we endow the rock bridges and joints in testing samples with the fixed particle contacting parameters, and conduct a series of direct shear tests. Then the destructive process and mechanical parameters in both micro-prospective and macro-prospective are obtained. By synthesizing the results of numerical and sample tests and analyzing the evolutionary changes of stress and strain on intermittent joints plane, we conclude that the centralization of compressive stress on rock bridges increase the shear strength of it. We discuss the destructive mechanics of intermittent joints rock under direct shear condition, meanwhile, divide the whole shear process into five phases, which are elasticity phase, fracture initiation phase, peak value phase, after-peak phase and residual phase. In development of strength theory, the shear strength mechanisms of joint and rock bridge are analyzed respectively. In order to apply the deducted formulation conveniently in the real projects, a relationship between these formulations and Mohr-Coulomb hypothesis is built up. Some sets of numerical simulation methods, i.e. the distinct element method (UDEC) based on in-situ geology mapping are developed and introduced. The working methods about determining mechanical parameters of intact rock and joints in numerical model are studied. The operation process and analysis results are demonstrated detailed from the research on parameters of rock mass based on numerical test in the Jinping Ⅰ Hydropower Station and Baihetan Hydropower Station. By comparison，the advantages and disadvantages are discussed. Results about numerical simulation study show that we can get the shear strength mechanical parameters by changing the load conditions. The multi-source rock mass mechanical parameters can be fused by the Bayes theory, which are test value, empirical value and theoretical value. Then the value range and its confidence probability of different rock mass grade are induced and these data supports the reliability design.

预应力结构抗滑桩设计计算方法及其在滑坡治理中的应用研究

Landslide is a kind of serious geological hazards and its damage is very great. In recent years, landslides become more and more frequent along with increase of scale of engineering constructions and cause greater loss. Consequently, how to protect landslides has become important research subject in the engineering field. This paper improves the method how to compute landslide thrust and solves the irrational problem in the design of piles because of the irrational landslide thrust according to the theory and technology of existed anti-slide piles and pre-stressed cable anti-slide piles. Modern pre-stressing technology has been introduced and load balancing method has been used to improve the stressing behavior of anti-slide piles. Anchor cables, anti-slide piles and modern pre-stressing technology have been used to prevention complicated landslide. It is an important base to select values for the landslide thrust. An improved method to calculate design thrust of anti-slide piles has been presented in this paper on the base of residual thrust method by comparing existing methods to select values of landslide thrust in the design of anti-slide piles. In the method, residual landslide thrust behind the anti-slide piles and residual skid resistance before the piles has been analyzed, equitable distribution of residual landslide thrust behind the piles has been realized, and the method to select value of design thrust becomes more reasonable. The pre-stressed cable anti-slide piles are developed from the common anti-slide piles and are common method to prevent landslide. Their principle is that internal force of anti-slide piles is adjusted and size of section is diminished by changing constraint conditions of anti-slide piles. For landslides with deep slip surface and large scale of slopes, limitation of the method appears. Such landslides are in need of long piles and anchor cables which are not only non-economic but also can generate larger deformation and leave potential danger after prevention. For solving the problem, a new kind of anti-slide piles, inner pre-stressing force anti-slide piles, is presented in this paper, and its principle is that an additional force, which is generated in the inner anti-slide piles by arranging pre-stressed reinforcement or tight wire in a certain form in interior of anti-slide piles and stretching the steel reinforcement or tight wire, may balance out the internal force induced by landslide thrust whole or partly (load balancing method). The method will change bending moment which anti-slide piles are not good at bearing into compressive stress which piles are good at bearing, improve stressing performance of anti-slide piles greatly, diminish size of section, and make anti-slide piles not fissured in the natural service or postpone appearance of the fissures, and improve viability of anti-slide piles. Pre-stressed cable anti-slide piles and inner pre-stressing force anti-slide piles go by the general name of pre-stressed structure anti-slide piles in the paper, and their design and calculation method is also analyzed. A new calculation method is provided in the paper for design of anti-slide piles. For pre-stressed structure anti-slide piles, a new computation mode is firstly presented in the paper on the foundation of cantilever piles. In the mode, constraint form of load-bearing section of the anti-slide piles should be confirmed according to reservoir conditions in order to figure out amount of pre-stress of the anchor cables, and internal force should be analyzed for the load-bearing section of pre-stressed structure anti-slide piles so as to confirm anchorage section of anti-slide piles. Pre-stressed cables of the pre-stressed cable anti-slide piles can be arranged as required. This paper analyzes the load-bearing section of single-row and double-row pre-stressed cable anti-slide piles and provides a calculation method for design of the pre-stressed cable anti-slide piles. Inner pre-stressing force anti-slide piles are a new kind of structural style. Their load-bearing section is divided into four computation modes according to whether pre-stressed cables are applied for exterior of the anti-slide piles, and whether single-row or double-row exterior pre-stressed cables are applied. The load balancing method is used to analyze the computation modes for providing a method to design the inner pre-stressing force anti-slide piles rationally. Pre-stressed cable anti-slide piles and inner pre-stressing force anti-slide piles are applied to research on Mahe landfall in Yalong Lenggu hydropower station by the improved method to select value of design thrust of anti-slide piles. A good effect is obtained in the analysis.

岩石类材料静态、动态拉伸弹性模量测试方法研究——以巴西圆盘试验和霍普金森压杆、效应为手段

As we all know, rock-like materials will absolutely show very different mechanical properties under the compressive stress and tensile stress respectively. Similarly, under the dynamic compressive stress or dynamic tensile stress, the characteristics of the dynamics showed by the rock-like materials also have great differences from the mechanical behavior under static force. Studying their similarities and differences in rock mechanics theory and practical engineering will be of great significance. Generally, there are compression modulus of elasticity and tensile modulus of elasticity corresponding to compressive stress state and the tensile stress state in the rock. Both the two kinds of elastic modulus play an extremely important role in calculation of engineering mechanics. Their reliability directly affects the accuracy and reliability of the calculation results of internal stress field and displacement field of engineering rock mass. At present, it is easy to obtain the compression modulus of elasticity in laboratory; but it is very difficult to determine the tensile modulus of elasticity with direct tensile test due to that direct tensile test is difficult to perform in laboratory in general. In order to solve this problem, this thesis invents and develops several indirect test methods to determine the static or dynamic tensile modulus of elasticity of rock-type materials with high reliability and good interoperability. For the static tensile modulus of elasticity, the analytical stress field solution has been given out for the Brazilian disc under the radial and linear concentration load with Airy stress function method. At the same time, the stress field has been modeled for the Brazilian disc test by using the finite element software of ANSYS and ADINA. The analytical stress field solution is verified to be right by comparatively researching the analytical stress field solution and the numerical stress field solution. Based on the analytical stress field solution, this thesis proposes that a strain gauge is pasted at the Brazilian disc center along the direction perpendicular to the applied force to indirectly determine the static tensile modulus of elasticity, and related measurement theory also has been developed. The method proposed here has good feasibility and high accuracy verified by the experimental results. For the dynamic tensile modulus of elasticity, two measuring methods and theories are invented here. The first one is that the Split Hopkinson Pressure Bar is used to attract the Brazilian disc to generate the dynamic load, make the dynamic tensile stress is formed at the Brazilian disc center; and also a strain gauge is pasted at the Brazilian disc center to record the deformation. The second is that, in the Hopkinson effect phenomenon, the reflection tensile stress wave is formed when the shock wave propagates to the free end of cylindrical rock bar and reflect, which can make the rock bar is under dynamic tensile stress state; and some strain gauges are pasted at the appropriate place on the rock bar to record the strain coursed by the tensile or compressive stress wave. At last, the dynamic tensile modulus of elasticity can be determined by the recorded strain and the dynamic tensile stress which can be determined by related theories developed in this thesis.

复杂裂隙岩体统计断裂本构关系与变形参数研究

Rock mass is widely recognized as a kind of geologic body which consists of rock blocks and discontinuities. The deformation and failure of rock mass is not only determined by rock block，but also by discontinuity which is virtually more important. Mutual cutting and combination of discontinuities controlled mechanical property of rock mass. The complex cutting of discontinuities determine the intense anisotropy on mechanical property of rock mass，especially under the effect of ground stress. Engineering practice has show that the brittle failure of hard rock always occurs when its working stress is far lower than the yield strength and compressive strength，the failure always directly related to the fracture propagation of discontinuities. Fracture propagation of discontinuities is the virtue of hard rock’s failure. We can research the rock mass discontinuous mechanical properties precisely by the methods of statistical analysis of discontinuities and Fracture Mechanics. According to Superposition Principle in Fracture Mechanics，A Problem or C Problem could be chosen to research. Problem A mainly calculates the crack-tip stress field and displacement field on internal discontinuities by numerical method. Problem C calculate the crack-tip stress field and displacement field under the assumption of that the mainly rock mass stress field has been known. So the Problem C avoid the complex mutual interference of stress fields of discontinuities，which is called crack system problem in Fracture Mechanics. To solve Problem C, field test on stress field in the rock mass is needed. The linear Superposition of discontinuities strain energies are Scientific and Rational. The difference of Fracture Mechanics between rock mass and other materials can mostly expression as：other materials Fracture Mechanics mostly face the problem A，and can’t avoid multi-crack puzzle, while the Rock mass Fracture Mechanics answer to the Problem C. Problem C can avoid multi-discontinuities mutual interference puzzle via the ground stress test. On the basis of Problem C, Fracture Mechanics could be used conveniently in rock mass. The rock mass statistics fracture constitutive relations, which introduced in this article, are based on the Problem C and the Discontinuity Strain Energy linear superposition. This constitutive relation has several merits: first, it is physical constitutive relation rather than empirical; second, it is very fit to describe the rock mass anisotropy properties; third, it elaborates the exogenous factors such as ground stress. The rock mass statistics fracture constitutive relation is the available approach to answer to the physical, anisotropic and ground stress impacted rock mass problems. This article stand on the foundation of predecessor’s statistics fractures constitutive relation, and improved the discontinuity distributive function. This article had derived the limitation of negative exponential distribution in the course of regression analysis, and advocated to using the two parameter negative exponential distribution for instead. In order to solve the problems of two-dimension stability on engineering key cross-sectional view in rock mass, this article derived the rock mass planar flexibility tensor, and established rock mass two-dimension penetrate statistics fracture constitutive relation on the basis of penetrate fracture mechanics. Based on the crack tip plasticity research production of penetrate fracture, for example the Irwin plasticity equifinality crack, this article established the way to deal with the discontinuity stress singularity and plastic yielding problem at discontinuity tip. The research on deformation parameters is always the high light region of rock mass mechanics field. After the dam foundation excavation of XiaoWan hydroelectric power station, dam foundation rock mass upgrowthed a great deal of unload cracks, rock mass mechanical property gotten intricacy and strong anisotropy. The dam foundation rock mass mostly upgrowthed three group discontinuities： the decantation discontinuity, the steep pitch discontinuity, and the schistosity plane. Most of the discontinuities have got partial unload looseness. In accordance with ground stress field data, the dam foundation stress field greatly non-uniform, which felled under the great impaction of tectonic stress field, self-weight stress field, excavation geometric boundary condition, and excavation, unload. The discontinuity complexity and stress field heterogeneity, created the rock mass mechanical property of dam foundation intricacy and levity. The research on the rock mass mechanics, if not take every respected influencing factor into consideration as best as we can, major errors likely to be created. This article calculated the rock mass elastic modulus that after Xiao Wan hydroelectric power station dam foundation gutter excavation finished. The calculation region covered possession monolith of Xiao Wan concrete double-curvature arch dam. Different monolith were adopted the penetrate fracture statistics constitutive relation or bury fracture statistics constitutive relation selectively. Statistics fracture constitutive relation is fit for the intensity anisotropy and heterogeneity rock mass of Xiao Wan hydroelectric power station dam foundation. This article had contrastive analysis the statistics fracture constitutive relation result with the inclined plane load test actual measurement elastic modulus and RMR method estimated elastic modulus, and find that the three methods elastic modulus have got greatly comparability. So, the statistics fracture constitutive relations are qualified for trust. Generally speaking，this article had finished following works based on predecessors job: “Argumentation the C Problems of superposition principle in Fracture Mechanics, establish two-dimension penetrate statistics fracture constitutive relation of rock mass, argue the negative exponential distribution limitation and improve it, improve of the three-dimension berry statistics fracture constitutive relation of rock mass, discontinuity-tip plastic zone isoeffect calculation, calculate the rock mass elastic modulus on two-dimension cross-sectional view”. The whole research clue of this article inherited from the “statistics rock mass mechanics” of Wu Faquan（1992）.