Solid-phase crystallization and dopant activation of amorphous silicon films by pulsed rapid thermal annealing

An improved pulsed rapid thermal annealing method has been used to crystallize amorphous silicon films prepared by PECVD. The solid-phase crystallization and dopant activation process can be completed with time-temperature budgets such as 10 cycles of 60-s 550 degrees C thermal bias/l-s 850 degrees C thermal pulse. A mean grain size more than 1000 Angstrom and a Hall mobility of 24.9 cm(2)/V s are obtained in the crystallized films. The results indicate that this annealing method possesses the potential for fabricating large-area and good-quality polycrystalline silicon films on low-cost glass substrate. (C) 1998 Elsevier Science B.V. All rights reserved.

COMPARISON OF PROPERTIES OF SOLID-PHASE EPITAXIAL SILICON-ON-SAPPHIRE FILMS RECRYSTALLIZED BY RAPID THERMAL ANNEALING AND FURNACE ANNEALING

Chemically vapour deposited silicon on sapphire (SOS) films 0.25 mu m thick were implanted with Si-28(+) and recrystallized in solid phase by furnace annealing (FA) and IR rapid thermal annealing (RTA) in our laboratory. An improvement in crystalline quality can be obtained using both annealing procedures. After FA, it is hard to retain the intrinsic high resistivity value(10(4)-10(5) Ohm cm) observed in as-grown SOS films, so the improvement process cannot be put to practical use effectively. However, it is demonstrated that by properly adjusting the implantation and RTA conditions, significant improvements in both film quality and film autodoping can be accomplished. This work describes a modified double solid phase epitaxy process in which the intrinsic high resistivities of the as grown SOS films are retained. The mechanism of suppression of Al autodoping is discussed.

Improvement of CMOS SOS devices characteristics by a modified solid phase epitaxy

CMOS/SOS devices have lower carriers mobility and higher channel leakage current than bulk silicon CMOS devices. These mainly results from the defects of heteroepitaxial silicon film, especially from the defects near Si-Sapphire interface. This paper describes the experiment results of CMOS/SOS devices characteristics improved by a better epitaxial silicon quality which is obtained by a modified solid phase epitaxy.

The solid-liquid extraction of yttrium from rare earths by solvent (ionic liquid) impreganated resin coupled with complexing method

A kind of solvent (ionic liquid) impreganated resin (IL-SIR) was developed herein for ameliorating imidazolium-type IL-based liquid-liquid extraction of metal ions. In this study, [C(8)mim][PF6] containing Cyanex923 was immobilized on XAD-7 resin for solid-liquid extraction of rare earth (RE). The solid-liquid extraction contributed to ameliorating mass transfer efficiency, i.e. shortening equilibrium time from 40 min to 20 min, increasing extraction efficiency from 29% to 80%. In additional, the novel IL-SIR could separate Y(III) from Sc(III), Ho(III), Er(III), Yb(III) effectively by adding water-soluble complexing agent.

Strings of interconnected hollow carbon nanoparticles with porous shells prepared using simple solid-phase synthesis

Strings of interconnected hollow carbon nanoparticles with porous shells were prepared by simple heat-treatments of a mixture of resorcinol-formaldehyde gel and transition-metal salts. The sample was characterized by scanning electron microscopy, transmission electron microscopy, X-ray diffraction and nitrogen adsorption. Results show that the sample consisted of relatively uniform hollow particles with sizes ranging from 70 to 80 nm forming a strings-of-pearls-like nanostructure. The material with porous shells possessed well-developed graphitic structure with an interlayer (d(002)) spacing of 0.3369 nm and the stack height of the graphite crystallites of 9 nm.

Convenient preparation of tunably loaded chemically converted graphene oxide/epoxy resin nanocomposites from graphene oxide sheets through two-phase extraction

We report a facile method to create the chemically converted graphene oxide/epoxy resin nanocomposites from graphene oxide sheets through two-phase extraction. Great improvements in mechanical properties such as compressive failure strength and toughness have been achieved for the chemically converted graphene oxide/epoxy resin for a 0.0375 wt% loading of chemically converted graphene oxide sheets in epoxy resin by 48.3% and 1185.2%, respectively. In addition, the loading of graphene is also conveniently tunable even to 0.15 wt% just by increasing the volume of the graphene oxide dispersion.

In situ chlorinating-graft copolymerization on isotactic polypropylene in gas-solid phase

A novel method in situ chlorinating-graft copolymerization (ISCGC) of grafting maleic anhydride (MAH) on isotactic polypropylene (iPP) in gas-solid phase was investigated in this paper. Chlorine (Cl-2) was used as initiator, chlorinating agent and termination agent at the same time during the reaction. The iPP was chlorinated as well as grafted with MAH in the reaction process. The product with chlorine and MAH in the same molecule was named as PP-cg-MAH. Existence of PP-cg-MAH was identified by Fourier transform infrared. Thermal behavior and crystallinity of PP-cg-MAH were analyzed by differential scanning calorimetry, X-ray diffraction and polarizing microscope. Influencing factors for the value of graft degree were also discussed. Compared with conventional peroxide initiated graft method, ISCGC revealed higher MAH graft efficiency (33%), and particularly alleviated degradation of iPP. iPP could be grafted successfully and without changing physical properties dramatically through this method.

A reversibly tunable colloidal photonic crystal via the infiltrated solvent liquid-solid phase transition

A reversibly tunable colloidal photonic crystal between two stop bands was realized by a liquid-solid phase transition of liquid infiltrated into the air voids of silica opals. The difference of the peak wavelengths of the two stop bands was dependent on the diameter of the silica opals and the difference of the refractive index of the filled solvent between the solid and liquid state. The reversibly tunable photonic crystals have good stability and reproducibility.

Rapid solution and solid phase synthesis of monodisperse oligo[(1,4-phenyleneethynylene)-alt-(2,5-thiopheneethynylene)]s

Monodisperse oligo[(1,4-phenyleneethynylene)-alt-(2,5-thiopheneethynylene)]s, new candidates for molecular wires, were rapidly synthesized via an iterative divergent/convergent doubling strategy in solution as well as on Merrifield's resin.

A rapid solid-phase synthesis to soluble oligothiophene molecular wires

A novel method for the preparation of oligothiophene molecular wires is described via a bi-directional solid-phase synthesis. Using an alternating sequence of bromination and Stille coupling reactions, oligomers were obtained up to the heptamer in excellent yield and purity.