Coma measurement by use of an alternating phase-shifting mask mark with a specific phase width

The correlation between the coma sensitivity of the alternating phase-shifting mask (Alt-PSM) mark and the mark's structure is studied based on the Hopkins theory of partially coherent imaging and positive resist optical lithography (PROLITH) simulation. It is found that an optimized Alt-PSM mark with its phase width being two-thirds its pitch has a higher sensitivity to coma than Alt-PSM marks with the same pitch and the different phase widths. The pitch of the Alt-PSM mark is also optimized by PROLITH simulation, and the structure of p - 1.92 lambda/NA and pw = 2p/3 proves to be with the highest sensitivity. The optimized Alt-PSM mark is used as a measurement mark to retrieve coma aberration from the projection optics in lithographic tools. In comparison with an ordinary Alt-PSM mark with its phase width being a half its pitch, the measurement accuracies of Z(7) and Z(14) apparently increase. (C) 2009 Optical Society of America

高功率钕玻璃激光三倍频脉冲时间波形的研究

基于目前国内规模最大的激光驱动器——“神光Ⅱ”八路基频光已经实现功率平衡运行，通过改变其中若干路三倍频系统各调谐量的偏离，对输出三倍频波形进行束与束之间的横向对比研究．研究发现，对于Ⅱ类-Ⅱ类偏振失配三倍频系统，在影响转换效率的三个调谐量中，偏振分配角失配△θp，对三倍频波形影响最大；在入射基频功率密度约为1．0GW／cm^2情况下，当三倍频系统三个调谐量都处在最佳匹配时，三倍频波形半峰全宽τ最小。研究工作为最终实现“神光Ⅱ”八路光束三倍频功率平衡输出提供了晶体调试的方法。

Large three-photon absorption and intramolecular charge transfer of the bis-donor fluorene-based molecules

Three-photon absorption (3PA) of two fluorene-based molecules with D-pi-D structural motifs (abbreviated as BPAF and BCZF) has been determined by using a Q-switched Nd: YAG laser pumped with 38 ps pulses at 1064 nm in DMF. The measured 3PA cross-sections are 222 and 140 x 10(-78) cm(6) s(2) for BPAF and BCZF, respectively. AM1 calculations show that attaching different donors changes the charge density distribution of the fluorene skeleton, and it is observed that the 3PA cross-section can be enhanced with increasing intramolecular charge transfer character, measured by the parameter Delta p(1)/Delta p(2)/Delta p(1)'. (c) 2005 Elsevier B.V. All fights reserved.