不同形状微管道中的气体流动

不同形状微尺度管道（圆形、六边形、半圆形、不同宽高比的矩形）中的气体流动特性是微机电系统设计最为关心的问题之一．文中利用信息保存（IP）方法和直接模拟Monte Carlo（DSMC）方法进行研究，给出两种方法的计算结果相互符合，并与其它研究者的BGK模型方程计算结果进行了比较．对于微尺度管道中关心的低Mach数流动，IP方法的统计收敛效率明显优于DSMC方法,通过拟合IP和DSMC结果，给出了圆形、六边形、半圆形、不同宽高比的矩形截面情况下无量纲质量流率与等效Knudsen数的关系．

电子束物理气相沉积钇钛合金薄膜的组分和厚度分布

大面积薄膜的组分和厚度分布是实际工艺中最为关心的问题之一.利用实验和直接模拟Monte Carlo(DSMC)方法,分别研究了双电子束和三电子束物理气相沉积(EBPVD)中,钇和钛蒸气原子的三维低密度、非平衡射流,获得了它们在100和150mm单晶硅基片表面的沉积厚度和组分的分布.DSMC结果与钇和钛的蒸发速率的石英晶振探头原位测量值,沉积薄膜厚度分布的台阶仪和Rutherford背散射仪的测量数据,沉积薄膜组分分布的Rutherford背散射仪和电感耦合等离子体原子发射光谱仪测量值,均相符甚好.这表明通过DSMC方法与精细测量相结合,可在原子水平上实现EBPVD输运工艺的定量预测和设计。

矩形微槽道气体流动的速度分布

矩形微槽道的各个流向截面可以局部近似为平面Poiseuille流动，应用信息保存（IP）方法和直接模拟Monte Carlo（DSMC）方法计算了从连续介质区到自由分子流区的平面Poiseuille流动，利用其结果对Beskok-Karniadakis公式和质量流率动理论因子进行修正和重新拟合，给出在整个稀薄气体流动领域都适用的微槽道气体流动速度分布.

认识稀薄气体动力学

以通俗易懂的方式介绍了空气动力学当气体间断分子效应显著时发展起来的特殊分支－－稀薄气体动力学。讨论了非平衡现象与稀薄气体动力学的。通过与8速度气体模型的间断Boltzmann方程的对比，解释了Boltzmann方程碰撞项的物理意义和数学困难，简要综述了其一般解法。讨论了分在物体表面的反射和问题的边界条件，着重介绍了直接模拟Monte Carlo (DSMC)方法和为克服低速稀薄流动（如MEMS中流动）中模拟困难的信息保存（IP）方法。

微尺度气体流动

了解微尺度气体流动特点是微机电系统设计和优化的基础。有关的研究可以上溯到20世纪初Knudsen的平面槽道流动质量流量的测量和Millikan的小球阻力系数的测量，实验结果揭示了稀薄气体效应即尺度效应对气体运动的重要影响。由于流动特征长度很小，微尺度气流经常处到滑流区甚至过渡领域，流动的相似参数为Knudsen数和Mach数。因此可以考虑利用相似准则，通过增大几何尺寸、减小压力的途径，解决微机电系统实验观测遇到的困难。为解决直接模拟Monte Carlo方法分析微机电系统中低速稀薄气流遇到的统计涨落困难，我们提出了信息保存法（IP），该方法能够有效克服统计散布，并已成功用于多种微尺度气流。

直接统计模拟位置元方法中的分子表面反射确定论判据

发展的分子表面反射判据，使判断分子是否与某一表面无相撞问题得到了有效的解决。此外，还讨论了分子空间位置坐标的记录方法、分子碰撞对的极限距离、网格自适应等实际模拟技术。与圆球自由分子流准确解和过渡领域贴体网格DSMC模拟结果的比较，证明了上述判据和技术和有效性。

Statistical Simulation of Thin-Film Bearings

The information preservation (IP) method and the direct simulation Monte Carlo (DSMC) method are used to simulate the gas flows between the write/read head and the platter of the disk drive (the slider bearing problem). The results of both methods are in good agreement with numerical solution of the Reynolds equation in the cases studied. However, the DSMC method owing to the problem of large sample size demand and the difficulty in regulating boundary conditions at the inlet and outlet was able to simulate only short bearings, while IP simulates the bearing of authentic length ~1000 m ? and can provide more detailed flow information.

Information Preservation (IP) Method in Simulation

This paper reviews firstly methods for treating low speed rarefied gas flows: the linearised Boltzmann equation, the Lattice Boltzmann method (LBM), the Navier-Stokes equation plus slip boundary conditions and the DSMC method, and discusses the difficulties in simulating low speed transitional MEMS flows, especially the internal flows. In particular, the present version of the LBM is shown unfeasible for simulation of MEMS flow in transitional regime. The information preservation (IP) method overcomes the difficulty of the statistical simulation caused by the small information to noise ratio for low speed flows by preserving the average information of the enormous number of molecules a simulated molecule represents. A kind of validation of the method is given in this paper. The specificities of the internal flows in MEMS, i.e. the low speed and the large length to width ratio, result in the problem of elliptic nature of the necessity to regulate the inlet and outlet boundary conditions that influence each other. Through the example of the IP calculation of the microchannel (thousands long) flow it is shown that the adoption of the conservative scheme of the mass conservation equation and the super relaxation method resolves this problem successfully. With employment of the same measures the IP method solves the thin film air bearing problem in transitional regime for authentic hard disc write/read head length ( ) and provides pressure distribution in full agreement with the generalized Reynolds equation, while before this the DSMC check of the validity of the Reynolds equation was done only for short ( ) drive head. The author suggests degenerate the Reynolds equation to solve the microchannel flow problem in transitional regime, thus provides a means with merit of strict kinetic theory for testing various methods intending to treat the internal MEMS flows.

Information preservation (IP) method in simulation of internal rarefied gas flows in MEMS

This paper reviews firstly methods for treating low speed rarefied gas flows: the linearised Boltzmann equation, the Lattice Boltzmann method (LBM), the Navier-Stokes equation plus slip boundary conditions and the DSMC method, and discusses the difficulties in simulating low speed transitional MEMS flows, especially the internal flows. In particular, the present version of the LBM is shown unfeasible for simulation of MEMS flow in transitional regime. The information preservation (IP) method overcomes the difficulty of the statistical simulation caused by the small information to noise ratio for low speed flows by preserving the average information of the enormous number of molecules a simulated molecule represents. A kind of validation of the method is given in this paper. The specificities of the internal flows in MEMS, i.e. the low speed and the large length to width ratio, result in the problem of elliptic nature of the necessity to regulate the inlet and outlet boundary conditions that influence each other. Through the example of the IP calculation of the microchannel (thousands m ? long) flow it is shown that the adoption of the conservative scheme of the mass conservation equation and the super relaxation method resolves this problem successfully. With employment of the same measures the IP method solves the thin film air bearing problem in transitional regime for authentic hard disc write/read head length ( 1000 L m ? = ) and provides pressure distribution in full agreement with the generalized Reynolds equation, while before this the DSMC check of the validity of the Reynolds equation was done only for short ( 5 L m ? = ) drive head. The author suggests degenerate the Reynolds equation to solve the microchannel flow problem in transitional regime, thus provides a means with merit of strict kinetic theory for testing various methods intending to treat the internal MEMS flows.

Monte Carlo Modeling of Micro Scale Gas Flows

An information preservation (IP) method has been used to simulate many micro scale gas flows. It may efficiently reduce the statistical scatter inherent in conventional particle approaches such as the direct simulation Monte Carlo (DSMC) method. This paper reviews applications of IP to some benchmark problems. Comparison of the IP results with those given by experiment, DSMC, and the linearized Boltzmann equation, as well as the Navier-Stokes equations with a slip boundary condition, and the lattice Boltzmann equation, shows that the IP method is applicable to micro scale gas flows over the entire flow regime from continuum to free molecular.

Development of a Cell Size Relaxed Scheme for the Direct Simulation Monte Carlo Method

The conventional direct simulation Monte Carlo (DSMC) method has a strong restriction on the cell size because simulated particles are selected randomly within the cell for collisions. Cells with size larger than the molecular mean free path are generally not allowed in correct DSMC simulations. However, the cell-size induced numerical error can be controlled if the gradients of flow properties are properly involved during collisions. In this study, a large cell DSMC scheme is proposed to relax the cell size restriction. The scheme is applied to simulate several test problems and promising results are obtained even when the cell size is greater than 10 mean free paths of gas molecules. However, it is still necessary, of course, that the cell size be small with respect to the flow field structures that must be resolved.

Information Preservation Modeling of Rayleigh-Benard Transition from Thermal Conduction to Convection

Onset and evolution of the Rayleigh-Benard (R-B) convection are investigated using the Information Preservation (IP) method. The information velocity and temperature are updated using the Octant Flux Splitting (OFS) model developed by Masters & Ye based on the Maxwell transport equation suggested by Sun & Boyd. Statistical noise inherent in particle approaches such as the direct simulation Monte Carlo (DSMC) method is effectively reduced by the IP method, and therefore the evolutions from an initial quiescent fluid to a final steady state are shown clearly. An interesting phenomenon is observed: when the Rayleigh number (Ra) exceeds its critical value, there exists an obvious incubation stage. During the incubation stage, the vortex structure clearly appears and evolves, whereas the Nusselt number (Nu) of the lower plate is close to unity. After the incubation stage, the vortex velocity and Nu rapidly increase, and the flow field quickly reaches a steady, convective state. A relation of Nu to Ra given by IP agrees with those given by DSMC, the classical theory and experimental data.

IP Simulation of Micro Gas Flows under 3-D Head Sliders

Gas film lubrication of a three-dimensional flat read-write head slider is calculated using the information preservation (IP) method and the direct simulation Monte Carlo (DSMC) method, respectively. The pressure distributions on the head slider surface at different velocities and flying heights obtained by the two methods are in excellent agreement. IP method is also employed to deal with head slider with three-dimensional complex configuration. The pressure distribution on the head slider surface and the net lifting force obtained by the IP method also agree well with those of DSMC method. Much less (of the order about 10(2) less) computational time (the sum of the time used to reach a steady stage and the time used in sampling process) is needed by the IP method than the DSMC method and such an advantage is more remarkable as the gas velocity decreases.

A Breakdown Criterion of Free Molecular Flows and an Optimum Analysis of EBPVD

Two important issues in electron beam physical vapor deposition (EBPVD) are addressed. The first issue is a validity condition of the classical cosine law widely used in the engineering context. This requires a breakdown criterion of the free molecular assumption on which the cosine law is established. Using the analytical solution of free molecular effusion flow, the number of collisions (N-c) for a particle moving from an evaporative source to a substrate is estimated that is proven inversely proportional to the local Knudsen number at the evaporation surface. N-c = 1 is adopted as a breakdown criterion of the free molecular assumption, and it is verified by experimental data and DSMC results. The second issue is how to realize the uniform distributions of thickness and component over a large-area thin film. Our analysis shows that at relatively low evaporation rates the goal is easy achieved through arranging the evaporative source positions properly and rotating the substrate.

模拟MEMS中气体流动的工具——信息保存法

MEMS中气体流动因特征尺度小而是稀薄气体的领域,本文首先介绍处理低速稀薄气体流动的一些方法:线化Boltzmann方程,Lattice Boltzmann方法,加滑移边界的Navier-Stoks方程,以及DSMC方法,并讨论它们模拟MEMS中过渡领域低速流动所遇到的困难。信息保存法克服了流速低使得信息噪声比小引起统计模拟的困难,已成功模拟了一些一维和二维问题。MEMS中流速低和大的长宽比的特点还引起出入口边界条件相互影响需要协调的问题,通过微槽道流动的算例,在模拟中采用守恒形式的质量守恒方程和超松弛法成功地解决了这一问题。处理有温度变化的MEMS流动问题和跨越领域的混合算法是重要的问题,本文用信息保存法也进行了有益的尝试。