Effects of Thermocapillary Convection on the Growth Process in Industrial 8-inch Silicon Czochralski Growth

Czochralski (CZ) crystal growth process is a widely used technique in manufacturing of silicon crystals and other semiconductor materials. The ultimate goal of the IC industry is to have the highest quality substrates, which are free of point defect, impurities and micro defect clusters. The scale up of silicon wafer size from 200 mm to 300 mm requires large crucible size and more heat power. Transport phenomena in crystal growth processes are quite complex due to melt and gas flows that may be oscillatory and/or turbulent, coupled convection and radiation, impurities and dopant distributions, unsteady kinetics of the growth process, melt crystal interface dynamics, free surface and meniscus, stoichiometry in the case of compound materials. A global model has been developed to simulate the temperature distribution and melt flow in an 8-inch system. The present program features the fluid convection, magnetohydrodynamics, and radiation models. A multi-zone method is used to divide the Cz system into different zones, e.g., the melt, the crystal and the hot zone. For calculation of temperature distribution, the whole system inside the stainless chamber is considered. For the convective flow, only the melt is considered. The widely used zonal method divides the surface of the radiation enclosure into a number of zones, which has a uniform distribution of temperature, radiative properties and composition. The integro-differential equations for the radiative heat transfer are solved using the matrix inversion technique. The zonal method for radiative heat transfer is used in the growth chamber, which is confined by crystal surface, melt surface, heat shield, and pull chamber. Free surface and crystal/melt interface are tracked using adaptive grid generation. The competition between the thermocapillary convection induced by non-uniform temperature distributions on the free surface and the forced convection by the rotation of the crystal determines the interface shape, dopant distribution, and striation pattern. The temperature gradients on the free surface are influenced by the effects of the thermocapillary force on the free surface and the rotation of the crystal and the crucible.

生物催化的Baeyer-Villiger氧化反应研究

Baeyer-Villiger氧化反应是一种很重要的化学反应，产生的许多中间体或产物可以被用来生产多种化学产品和药物。此反应具有多功能性，可以氧化多种羰基化合物，但是化学方法中的必需反应物——氧化剂在生产、储存、运输、反应的过程中都存在很多的不安全因素，反应的立体选择性也不强，而生物转化则具有底物选择性、立构选择性、化学选择性、对映选择性等一般化学反应中不具备的优点，在精细化工中占有很大的优势。在工业生物催化中有很好的应用前景。 为了研究生物催化的Baeyer-Villiger反应，我们从本实验室保藏菌种中分离筛选出一株能够以环己酮作为唯一碳源的菌株，进行初步研究并对其产物进行GC/MS定性，探讨了pH，装液量，底物浓度，培养时间，温度以及转速等条件对细菌生长的影响，并进一步研究了细菌的底物广谱性。 此菌株经鉴定属于邻单胞菌属Plesiomonas sp.)， 根据正交试验，确定了菌的最佳生长条件：底物浓度为1mL/L，底物浓度过高对菌株生长有抑制作用，转速为150 rpm ，温度为30℃ ，pH为7.0； 此菌株转化环己酮的产物通过GC/MS检测含有内酯，表明此菌株能够催化Baeyer-Villiger氧化反应；此菌株还能够以与环己酮有相似结构的环己烷，环戊酮等作为唯一碳源生长，说明此菌株底物利用范围比较广，用途比较广泛。 Baeyer-Villiger oxidation is an important chemical conversion, its products and intermediates can be used to produce a lot of medicine and fine chemicals. Its success is largely due to its versatility: a variety of carbonyl compounds can be oxidized, a large number of functional groups are tolerated, the regiochemistry is highly predictable and so on, but the oxidants that the traditional chemistry way needs have a number of problem in their production, storage, transportation and reaction, Chemistry way has not a high stereochemistry yet. However, biotransformations have many attractive characters, such as substrate-, stereo-, chemo- and enantioselectivity, so it has a great advantage in the fine chemical industry and has a bright prospect in the industrial biological catalysis. In order to study Baeyer-Villiger oxidation, we isolated a strain which can utilize cyclohexanone as sole carbon source and had a primary research on it. Its product was identified by GC/MS. Effects of pH, volume, concentration of cyclohexanone, cultivating time, temperature and rotate speed on the growth of bacteria were discussed, and the other organic substrates were also studied. The strain was identified as Plesiomonas sp.. The result of orthogonal test made it sure that the best growth condition of the strain is: rotate speed 150 rpm, temperature 30℃, pH7.0, concentration of cyclohexanone1ml/L. There is caprolactone in the product of the fermentation with cyclohexanone as substrate by GC/MS,which indicated that the strain can catalyse Baeyer-Villiger oxidation.In addition,the strain can utilize other organic substrates having the similar structure with cyclohexanone such as cyclohexane, cyclopentanone, Swertiamarin as sole carbon source.So the strain can be applied extentively.