Tribological properties of mems materials measured on a small-scale device

Micro-electro-mechanical systems, MEMS, is a rapidly growing interdisciplinary technology within the general field of Micro-Systems Technology which deals with the design and manufacture of miniaturised machines with major dimensions at the scale of tens, to perhaps hundreds, of microns. Because they depend on the cube of a representative dimension, component masses and inertias rapidly become small as size decreases whereas surface and tribological effects, which often depend on area, become increasingly important. Although MEMS components and their areas of contact are small, tribological conditions, measured by contact pressures or acceptable wear rates, are demanding and technical and commercial success will require careful measurement and precise control of surface topography and properties. Fabrication of small numbers of MEMS devices designed to test potential material combinations can be prohibitively expensive and thus there is a need for small scale test facilities which mimic the contact conditions within a micro-machine without themselves requiring processing within a full semiconductor foundry. The talk will illustrate some initial experimental results from a small-scale experimental device which meets these requirements, examining in particular the performance of Diamond-Like-Carbon coatings on a silicon substrate. Copyright © 2005 by ASME.

Large-eddy simulations and measurements of a small-scale high-speed coflowing jet

Measurements and predictions are made of a short-cowl coflowing jet with a bypass ratio of 8:1. The Reynolds number is 300,000, and the inlet Mach numbers are representative of aeroengine conditions. The low Reynolds number of the measurements makes the case well suited to the assessment of large-eddy-simulation-related strategies. The nozzle concentricity is carefully controlled to deal with the emerging metastability issues of jets with coflow. Measurements of mean quantities and turbulence statistics are made using both laser Doppler anemometry and particle image velocimetry. The simulations are completed on 6× 106, 12× 106, and 50 × 106 cell meshes. To overcome near-wall modeling problems, a hybrid large-eddy-simulation-Reynolds-averaged-Navier-Stokesrelated method is used. The near-wall Reynolds-averaged-Navier-Stokes layer is helpful in preventing nonphysical separation from the nozzle wall.Copyright © 2010 by the American Institute of Aeronautics and Astronautics, Inc.

Comparison of les to LDA and PIV measurements of a small scale high speed coflowing jet

Measurements and predictions are made of a short cowl co-flowing jet with a bypass ratio of 8:1. The Reynolds number for computations and measurements are matched at 300,000 and the Mach numbers representative of realistic jet conditions with core and co flow velocities of 240m/s and 216m/s respectively. The low Reynolds number of the measurements makes the case well suited to the assessment of large eddy resolving computational strategies. Also, the nozzle concentricity was carefully controlled to deal with the emerging metastability issues of jets with coflow. Measurements of mean quantities and turbulence statistics are made using both two dimensional coincident LDA and PIV systems. The computational simulations are completed on a modest 12×106 mesh. The simulation is now being run on a 50×106 mesh using hybrid RANSNLES (Numerical Large Eddy Simulation). Close to the nozzle wall a k-l RANS model is used. For an axisymmetric jet, comparison is made between simulations which use NLES, RANSNLES and also a simple imposed velocity profile where the nozzle is not modeled. The use of a near wall RANS model is shown to be beneficial. When compared with the measurements the NLES results are encouraging. Copyright © 2008 by the American Institute of Aeronautics and Astronautics, Inc. All rights reserved.