A metal-polymer composite with unusual properties

Electrically conductive composites that contain conductive filler dispersed in an insulating polymer matrix are usually prepared by the vigorous mixing of the components. This affects the structure of the filler particles and thereby the properties of the composite. It is shown that by careful mixing nano-scale features on the surface of the filler particles can be retained. The fillers used possess sharp surface protrusions similar to the tips used in scanning tunnelling microscopy. The electric field strength at these tips is very large and results in field assisted (Fowler-Nordheim) tunnelling. In addition the polymer matrix intimately coats the filler particles and the particles do not come into direct physical contact. This prevents the formation of chains of filler particles in close contact as the filler content increases. In consequence the composite has an extremely high resistance even at filler loadings above the expected percolation threshold. The retention of filler particle morphology and the presence of an insulating polymer layer between them endow the composite with a number of unusual properties. These are presented here together with appropriate physical models. © 2005 IOP Publishing Ltd.

Complementary metal-oxide-semiconductor-compatible and self-aligned catalyst formation for carbon nanotube synthesis and interconnect fabrication

We have for the first time developed a self-aligned metal catalyst formation process using fully CMOS (complementary metal-oxide-semiconductor) compatible materials and techniques, for the synthesis of aligned carbon nanotubes (CNTs). By employing an electrically conductive cobalt disilicide (CoSi 2) layer as the starting material, a reactive ion etch (RIE) treatment and a hydrogen reduction step are used to transform the CoSi 2 surface into cobalt (Co) nanoparticles that are active to catalyze aligned CNT growth. Ohmic contacts between the conductive substrate and the CNTs are obtained. The process developed in this study can be applied to form metal nanoparticles in regions that cannot be patterned using conventional catalyst deposition methods, for example at the bottom of deep holes or on vertical surfaces. This catalyst formation method is crucially important for the fabrication of vertical and horizontal interconnect devices based on CNTs. © 2012 American Institute of Physics.

Enhancing parametric sensitivity using mode localization in electrically coupled mems resonators

We use vibration localization as a sensitive means of detecting small perturbations in stiffness in a pair of weakly coupled micromechanical resonators. For the first time, the variation in the eigenstates is studied by electrostatically coupling nearly identical resonators to allow for stronger localization of vibrational energy due to perturbations in stiffness. Eigenstate variations that are orders of magnitude greater than corresponding shifts in resonant frequency for an induced stiffness perturbation are experimentally demonstrated. Such high, voltagetunable parametric sensitivities together with the added advantage of intrinsic common mode rejection pave the way to a new paradigm of mechanical sensing. ©2009 IEEE.